First steps towards a scatterometry reference standard
Author: | Bernd Bodermann, Poul-Erik Hansen, Sven BurgerORCiD, Mark-Alexander Henn, Hermann Gross, Markus Bär, Frank Scholze, Johannes Endres, Matthias Wurm |
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Document Type: | In Proceedings |
Parent Title (English): | Proc. SPIE |
Volume: | 8466 |
First Page: | 84660E |
Year of first publication: | 2012 |
DOI: | https://doi.org/10.1117/12.929903 |