Spectroscopic Ellipsometry of Plasmonic Gratings─Ideal Parameters for Sensing and Subpicometer Measurement Uncertainty
| Author: | Deshabrato Mukherjee, Sven Burger, Thomas Siefke, Jeetendra Gour, Bernd Bodermann, Peter Petrik |
|---|---|
| Document Type: | Article |
| Parent Title (English): | ACS Omega |
| Volume: | 10 |
| Issue: | 14 |
| First Page: | 14466 |
| Last Page: | 14473 |
| Year of first publication: | 2025 |
| DOI: | https://doi.org/10.1021/acsomega.5c00951 |

