Modeling of dimensions and sensing properties of gold gratings by spectroscopic ellipsometry and finite element method
| Author: | Deshabrato Mukherjee, Sven Burger, Thomas Siefke, Jeetendra Gour, Bernd Bodermann, Peter Petrik |
|---|---|
| Document Type: | In Proceedings |
| Parent Title (English): | EPJ Web of Conferences |
| Volume: | 309 |
| First Page: | 02016 |
| Year of first publication: | 2024 |
| DOI: | https://doi.org/10.1051/epjconf/202430902016 |
