Recent advances in Bayesian optimization with applications to parameter reconstruction in optical nano-metrology

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Metadaten
Author:Matthias Plock, Sven Burger, Philipp-Immanuel Schneider
Document Type:Article
Parent Title (English):Proc. SPIE
Volume:11783
First Page:117830J
Year of first publication:2021
ArXiv Id:http://arxiv.org/abs/2107.05499
DOI:https://doi.org/10.1117/12.2592266