Recent advances in Bayesian optimization with applications to parameter reconstruction in optical nano-metrology
| Author: | Matthias Plock, Sven BurgerORCiD, Philipp-Immanuel Schneider |
|---|---|
| Document Type: | Article |
| Parent Title (English): | Proc. SPIE |
| Volume: | 11783 |
| First Page: | 117830J |
| Year of first publication: | 2021 |
| ArXiv Id: | http://arxiv.org/abs/2107.05499 |
| DOI: | https://doi.org/10.1117/12.2592266 |

