GIXRF and machine learning as metrological tools for shape and element sensitive reconstructions of periodic nanostructures
| Author: | Anna Andrle, Philipp Hönicke, Grzegorz Gwalt, Philipp-Immanuel Schneider, Yves Kayser, Frank Siewert, Victor Soltwisch |
|---|---|
| Document Type: | Article |
| Parent Title (English): | Proc. SPIE |
| Volume: | 11611 |
| First Page: | 116110R |
| Year of first publication: | 2021 |
| DOI: | https://doi.org/10.1117/12.2586082 |
