Deterministic integration of quantum dots into on-chip multi-mode interference couplers via in-situ electron beam lithography
Author: | Peter Schnauber, Johannes Schall, Samir Bounouar, Theresa Höhne, Suk-In Park, Geun-Hwan Ryu, Tobias Heindel, Sven BurgerORCiD, Jin-Dong Song, Sven Rodt, Stephan Reitzenstein |
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Document Type: | In Proceedings |
Parent Title (English): | Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference (CLEO/EQEC) |
First Page: | EB2.2 |
Series: | OSA Technical Digest |
Year of first publication: | 2019 |
DOI: | https://doi.org/10.1109/CLEOE-EQEC.2019.8872583 |