Efficient global sensitivity analysis for silicon line gratings using polynomial chaos
| Author: | Nando Farchmin, Martin Hammerschmidt, Philipp-Immanuel Schneider, Matthias Wurm, Markus Bär, Sebastian Heidenreich |
|---|---|
| Document Type: | Article |
| Parent Title (English): | Proc. SPIE |
| Volume: | 11057 |
| First Page: | 110570J |
| Year of first publication: | 2019 |
| DOI: | https://doi.org/10.1117/12.2525978 |
