Grazing incidence x-ray fluorescence based characterization of nanostructures for element sensitive profile reconstruction
| Author: | Anna Andrle, Philipp Hönicke, Philipp-Immanuel Schneider, Yves Kayser, Martin Hammerschmidt, Sven BurgerORCiD, Frank Scholze, Burkhard Beckhoff, Victor Soltwisch |
|---|---|
| Document Type: | Article |
| Parent Title (English): | Proc. SPIE |
| Volume: | 11057 |
| First Page: | 110570M |
| Year of first publication: | 2019 |
| ArXiv Id: | http://arxiv.org/abs/2104.13749 |
| DOI: | https://doi.org/10.1117/12.2526082 |
