Grazing incidence x-ray fluorescence based characterization of nanostructures for element sensitive profile reconstruction

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Author:Anna Andrle, Philipp Hönicke, Philipp-Immanuel Schneider, Yves Kayser, Martin Hammerschmidt, Sven BurgerORCiD, Frank Scholze, Burkhard Beckhoff, Victor Soltwisch
Document Type:Article
Parent Title (English):Proc. SPIE
Volume:11057
First Page:110570M
Year of first publication:2019
DOI:https://doi.org/10.1117/12.2526082