Deterministic integration of quantum dots into on-chip multi-mode interference beamsplitters using in-situ electron beam lithography

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Author:Peter Schnauber, Johannes Schall, Samir Bounouar, Theresa Höhne, Suk-In Park, Geun-Hwan Ryu, Tobias Heindel, Sven Burger, Jin-Dong Song, Sven Rodt, Stephan Reitzenstein
Document Type:Article
Year of first publication:2017
ArXiv Id: