Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion

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Metadaten
Author:Martin Hammerschmidt, Martin Weiser, Xavier Garcia Santiago, Lin Zschiedrich, Bernd Bodermann, Sven Burger
Document Type:Article
Parent Title (English):Proc. SPIE
Volume:10330
First Page:1033004
Year of first publication:2017
ArXiv Id:http://arxiv.org/abs/1707.08467
Preprint:urn:nbn:de:0297-zib-64704
DOI:https://doi.org/10.1117/12.2270596