Model order reduction for the time-harmonic Maxwell equation applied to complex nanostructures
- Fields such as optical metrology and computational lithography require fast and efficient methods for solving the time-harmonic Maxwell's equation. Highly accurate geometrical modelling and numerical accuracy at low computational costs are a prerequisite for any simulation study of complex nano-structured photonic devices. We present a reduced basis method (RBM) for the time-harmonic electromagnetic scattering problem based on the hp-adaptive finite element solver JCMsuite capable of handling geometric and non-geometric parameter dependencies allowing for online evaluations in milliseconds. We apply the RBM to compute light-scattering at optical wavelengths of periodic arrays of fin field-effect transistors (FinFETs) where geometrical properties such as the width and height of the fin and gate can vary in a large range.
| Author: | Martin Hammerschmidt, Sven Herrmann, Jan Pomplun, Sven BurgerORCiD, Frank Schmidt |
|---|---|
| Document Type: | Article |
| Parent Title (English): | Proc. SPIE |
| Volume: | 9742 |
| First Page: | 97420M |
| Year of first publication: | 2016 |
| Preprint: | urn:nbn:de:0297-zib-57239 |
| DOI: | https://doi.org/10.1117/12.2212367 |
