Scatterometry reference standards to improve tool matching and traceability in lithographical nanomanufacturing
| Author: | Emil Agcos, Bernd Bodermann, Sven BurgerORCiD, Gaoliang Dai, Johannes Endres, Poul-Erik Hansen, Lars Nielson, Morten Madsen, Sebastian Heidenreich, Michael Krumrey, Bernd Loechel, Jürgen Probst, Frank Scholze, Victor Soltwisch, Matthias Wurm |
|---|---|
| Document Type: | In Proceedings |
| Parent Title (English): | Proc. SPIE |
| Volume: | 9556 |
| First Page: | 955610 |
| Year of first publication: | 2015 |
| DOI: | https://doi.org/10.1117/12.2190409 |

