Scatterometry sensitivity analysis for conical diffraction versus in-plane diffraction geometry with respect to the side wall angle
| Author: | Victor Soltwisch, Sven BurgerORCiD, Frank Scholze |
|---|---|
| Document Type: | Article |
| Parent Title (English): | Proc. SPIE |
| Volume: | 8789 |
| First Page: | 878905 |
| Year of first publication: | 2013 |
| DOI: | https://doi.org/10.1117/12.2020487 |

