Topographic mask modeling with reduced basis finite element method

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Metadaten
Author:Jacek Tyminski, Jan Pomplun, Lin Zschiedrich, Donis Flagello, Tomiyuki Matsuyama
Document Type:Article
Parent Title (English):Proc. SPIE
Volume:8683
First Page:86831C
Year of first publication:2013
DOI:https://doi.org/10.1117/12.2011613