Topographic mask modeling with reduced basis finite element method
| Author: | Jacek Tyminski, Jan Pomplun, Lin Zschiedrich, Donis Flagello, Tomiyuki Matsuyama |
|---|---|
| Document Type: | Article |
| Parent Title (English): | Proc. SPIE |
| Volume: | 8683 |
| First Page: | 86831C |
| Year of first publication: | 2013 |
| DOI: | https://doi.org/10.1117/12.2011613 |

