Domain decomposition method for electromagnetic scattering problems: application to EUV lithography
| Author: | Lin Zschiedrich, Sven BurgerORCiD, Achim Schädle, Frank Schmidt |
|---|---|
| Document Type: | In Proceedings |
| Parent Title (English): | Proceedings of the 5th International Conference on Numerical Simulation of Optoelectronic devices |
| First Page: | 55 |
| Last Page: | 56 |
| Year of first publication: | 2005 |
| DOI: | https://doi.org/10.1109/NUSOD.2005.1518132 |

