Simulation method improves accuracy for optical metrology and nanooptics design
| Author: | Sven BurgerORCiD |
|---|---|
| Document Type: | Article |
| Parent Title (English): | SPIE Newsroom |
| Year of first publication: | 2009 |
| DOI: | https://doi.org/10.1117/2.1200905.1629 |
| Author: | Sven BurgerORCiD |
|---|---|
| Document Type: | Article |
| Parent Title (English): | SPIE Newsroom |
| Year of first publication: | 2009 |
| DOI: | https://doi.org/10.1117/2.1200905.1629 |