First steps towards a scatterometry reference standard
| Author: | Bernd Bodermann, Poul-Erik Hansen, Sven BurgerORCiD, Mark-Alexander Henn, Hermann Gross, Markus Bär, Frank Scholze, Johannes Endres, Matthias Wurm |
|---|---|
| Document Type: | In Proceedings |
| Parent Title (English): | Proc. SPIE |
| Volume: | 8466 |
| First Page: | 84660E |
| Year of first publication: | 2012 |
| DOI: | https://doi.org/10.1117/12.929903 |

