AAA rational approximation for scatterometry of nanoscale gratings
| Author: | Livius Leibl, Viktoriia Sytenko, Rana Demircioglu, Leonid Beliaev, Felix Binkowski |
|---|---|
| Document Type: | Article |
| Parent Title (English): | ArXiV |
| First Page: | arXiv:2608.2818 |
| Year of first publication: | 2026 |
| ArXiv Id: | http://arxiv.org/abs/2608.28185 |
| DOI: | https://doi.org/10.48550/arXiv.2608.28185 |
