TY - JOUR A1 - Schneider, Philipp-Immanuel A1 - Manley, Phillip A1 - Krüger, Jan A1 - Zschiedrich, Lin A1 - Köning, Rainer A1 - Bodermann, Bernd A1 - Burger, Sven T1 - Reconstructing phase aberrations for high-precision dimensional microscopy JF - Proc. SPIE Y1 - 2022 U6 - https://doi.org/10.1117/12.2620762 VL - 12137 SP - 121370I ER -