TY - JOUR A1 - Graf, Florian A1 - Feis, Joshua A1 - Santiago, Xavier Garcia A1 - Wegener, Martin A1 - Rockstuhl, Carsten A1 - Fernandez-Corbaton, Ivan T1 - Achiral, Helicity Preserving, and Resonant Structures for Enhanced Sensing of Chiral Molecules JF - ACS Photonics Y1 - 2019 U6 - https://doi.org/10.1021/acsphotonics.8b01454 VL - 6 SP - 482 ER - TY - JOUR A1 - Schneider, Philipp-Immanuel A1 - Santiago, Xavier Garcia A1 - Soltwisch, Victor A1 - Hammerschmidt, Martin A1 - Burger, Sven A1 - Rockstuhl, Carsten T1 - Benchmarking five global optimization approaches for nano-optical shape optimization and parameter reconstruction JF - ACS Photonics Y1 - 2019 U6 - https://doi.org/10.1021/acsphotonics.9b00706 VL - 6 SP - 2726 ER - TY - CHAP A1 - Werdehausen, Daniel A1 - Staude, Isabelle A1 - Burger, Sven A1 - Petschulat, Jörg A1 - Scharf, Toralf A1 - Pertsch, Thomas A1 - Decker, Manuel T1 - Using effective medium theories to design tailored nanocomposite materials for optical systems T2 - Proc. SPIE Y1 - 2018 U6 - https://doi.org/10.1117/12.2320525 VL - 10745 SP - 107450H ER - TY - JOUR A1 - Werdehausen, Daniel A1 - Burger, Sven A1 - Staude, Isabelle A1 - Pertsch, Thomas A1 - Decker, Manuel T1 - General design formalism for highly efficient flat optics for broadband applications JF - Opt. Express Y1 - 2020 U6 - https://doi.org/10.1364/OE.386573 VL - 28 SP - 6452 ER - TY - JOUR A1 - Pflüger, Mika A1 - Kline, R. Joseph A1 - Fernández Herrero, Analia A1 - Hammerschmidt, Martin A1 - Soltwisch, Victor A1 - Krumrey, Michael T1 - Extracting dimensional parameters of gratings produced with self-aligned multiple patterning using grazing-incidence small-angle x-ray scattering JF - J. Micro Nanolithogr. MEMS MOEMS Y1 - 2020 U6 - https://doi.org/10.1117/1.JMM.19.1.014001 VL - 19 SP - 014001 ER - TY - JOUR A1 - Gutsche, Philipp A1 - Santiago, Xavier Garcia A1 - Schneider, Philipp-Immanuel A1 - McPeak, Kevin A1 - Nieto-Vesperinas, Manuel A1 - Burger, Sven T1 - Role of Geometric Shape in Chiral Optics JF - Symmetry Y1 - 2020 U6 - https://doi.org/10.3390/sym12010158 VL - 12 SP - 158 ER - TY - JOUR A1 - Santiago, Xavier Garcia A1 - Hammerschmidt, Martin A1 - Burger, Sven A1 - Rockstuhl, Carsten A1 - Fernandez-Corbaton, Ivan A1 - Zschiedrich, Lin T1 - Decomposition of scattered electromagnetic fields into vector spherical wave functions on surfaces with general shapes JF - Phys. Rev. B Y1 - 2019 U6 - https://doi.org/10.1103/PhysRevB.99.045406 VL - 99 SP - 045406 ER - TY - JOUR A1 - Werdehausen, Daniel A1 - Staude, Isabelle A1 - Burger, Sven A1 - Petschulat, Jörg A1 - Scharf, Toralf A1 - Pertsch, Thomas A1 - Decker, Manuel T1 - Design rules for customizable optical materials based on nanocomposites JF - Opt. Mater. Express Y1 - 2018 U6 - https://doi.org/10.1364/OME.8.003456 VL - 8 SP - 3456 ER - TY - CHAP A1 - Schneider, Philipp-Immanuel A1 - Santiago, Xavier Garcia A1 - Binkowski, Felix A1 - Gutsche, Philipp A1 - Höhne, Theresa A1 - Hammerschmidt, Martin A1 - Zschiedrich, Lin A1 - Burger, Sven T1 - Light Management for Engineering Luminescence in Nanoscale Environments By Numerical Optimization T2 - The Electrochemical Society, Meeting Abstracts Y1 - 2018 U6 - https://doi.org/10.1149/MA2018-01/16/1164 SN - 2151-2043 VL - 16 SP - 1164 ER - TY - JOUR A1 - Hammerschmidt, Martin A1 - Schneider, Philipp-Immanuel A1 - Santiago, Xavier Garcia A1 - Zschiedrich, Lin A1 - Weiser, Martin A1 - Burger, Sven T1 - Solving inverse problems appearing in design and metrology of diffractive optical elements by using Bayesian optimization JF - Proc. SPIE Y1 - 2018 U6 - https://doi.org/10.1117/12.2315468 VL - 10694 SP - 1069407 ER - TY - JOUR A1 - Shpak, Maksim A1 - Burger, Sven A1 - Byman, Ville A1 - Saastamoinen, Kimmo A1 - Haapalainen, Mertsi A1 - Lassila, Antti T1 - Online measurement of optical fibre geometry during manufacturing JF - Proc. SPIE Y1 - 2018 U6 - https://doi.org/10.1117/12.2314762 VL - 10683 SP - 1068318 ER - TY - JOUR A1 - Castagna, Natascia A1 - Morel, Jacques A1 - Testa, Luc A1 - Burger, Sven T1 - Modelling of standard and specialty fibre-based systems using finite element methods JF - Proc. SPIE Y1 - 2018 U6 - https://doi.org/10.1117/12.2307372 VL - 10683 SP - 1068336 ER - TY - CHAP A1 - Schneider, Philipp-Immanuel A1 - Zschiedrich, Lin A1 - Santiago, Xavier Garcia A1 - Burger, Sven T1 - Optimization of quantum optical devices with machine learning T2 - XXVI International Workshop on Optical Wave & Waveguide Theory and Numerical Modelling, Proceedings Y1 - 2018 SN - 978-3-921823-98-9 SP - 6 ER - TY - JOUR A1 - Feis, Joshua A1 - Beutel, Dominik A1 - Köpfler, Julian A1 - Santiago, Xavier Garcia A1 - Rockstuhl, Carsten A1 - Wegener, Martin A1 - Fernandez-Corbaton, Ivan T1 - Helicity-Preserving Optical Cavity Modes for Enhanced Sensing of Chiral Molecules JF - Phys. Rev. Lett. Y1 - 2020 U6 - https://doi.org/10.1103/PhysRevLett.124.033201 VL - 124 SP - 033201 ER - TY - JOUR A1 - Werdehausen, Daniel A1 - Burger, Sven A1 - Staude, Isabelle A1 - Pertsch, Thomas A1 - Decker, Manuel T1 - Flat optics in high numerical aperture broadband imaging systems JF - J. Opt. Y1 - 2020 U6 - https://doi.org/10.1088/2040-8986/ab8ea2 VL - 22 SP - 065607 ER - TY - JOUR A1 - Farchmin, Nando A1 - Hammerschmidt, Martin A1 - Schneider, Philipp-Immanuel A1 - Wurm, Matthias A1 - Bodermann, Bernd A1 - Bär, Markus A1 - Heidenreich, Sebastian T1 - Efficient Bayesian inversion for shape reconstruction of lithography masks JF - J. Micro/Nanolith. MEMS MOEMS Y1 - 2020 U6 - https://doi.org/10.1117/1.JMM.19.2.024001 VL - 19 SP - 024001 ER - TY - CHAP A1 - Zschiedrich, Lin A1 - Binkowski, Felix A1 - Burger, Sven ED - Kaltenbacher, Manfred T1 - Spectral resonance expansion by Riesz projections T2 - 14 th International Conference on Mathematical and Numerical Aspects of Wave Propagation Book of Abstracts Y1 - 2019 U6 - https://doi.org/10.34726/waves2019 SP - 234 ER - TY - CHAP A1 - Binkowski, Felix A1 - Zschiedrich, Lin A1 - Schneider, Philipp-Immanuel A1 - Hammerschmidt, Martin A1 - Santiago, Xavier Garcia A1 - Betz, Fridtjof A1 - Burger, Sven ED - Saastamoinen, Kimmo T1 - Spectral Expansion of the Scattering Response of Resonant Nanostructures T2 - EOS Topical Meeting on Diffractive Optics Y1 - 2019 SN - 978-952-68553-8-7 SP - 1 ER - TY - CHAP A1 - Burger, Sven A1 - Binkowski, Felix A1 - Zschiedrich, Lin ED - Zhoudi, Said ED - Topa, Antonio T1 - Computing resonances in nano-photonic devices using Riesz-projection-based methods T2 - The 10th International Conference on Metamaterials, Photonic Crystals and Plasmonics (META 2019) Y1 - 2019 SN - 2429-1390 SP - 92 ER - TY - JOUR A1 - Pakhomov, Anton A1 - Löchner, Franz A1 - Zschiedrich, Lin A1 - Saravi, Sina A1 - Hammerschmidt, Martin A1 - Burger, Sven A1 - Pertsch, Thomas A1 - Setzpfand, Frank T1 - Far-field polarization signatures of surface optical nonlinearity in noncentrosymmetric semiconductors JF - Sci. Rep. Y1 - 2020 U6 - https://doi.org/10.1038/s41598-020-67186-0 VL - 10 SP - 10545 ER - TY - JOUR A1 - Werdehausen, Daniel A1 - Santiago, Xavier Garcia A1 - Burger, Sven A1 - Staude, Isabelle A1 - Pertsch, Thomas A1 - Rockstuhl, Carsten A1 - Decker, Manuel T1 - Modeling Optical Materials at the Single Scatterer Level: The Transition from Homogeneous to Heterogeneous Materials JF - Adv. Theory Simul. Y1 - 2020 U6 - https://doi.org/10.1002/adts.202000192 VL - 3 SP - 2000192 ER - TY - JOUR A1 - Santiago, Xavier Garcia A1 - Burger, Sven A1 - Rockstuhl, Carsten A1 - Schneider, Philipp-Immanuel T1 - Bayesian optimization with improved scalability and derivative information for efficient design of nanophotonic structures JF - J. Light. Technol. Y1 - 2021 U6 - https://doi.org/10.1109/JLT.2020.3023450 VL - 39 SP - 167 ER - TY - JOUR A1 - Santiago, Xavier Garcia A1 - Schneider, Philipp-Immanuel A1 - Rockstuhl, Carsten A1 - Burger, Sven T1 - Shape design of a reflecting surface using Bayesian Optimization JF - J. Phys.: Conf. Ser. Y1 - 2018 U6 - https://doi.org/10.1088/1742-6596/963/1/012003 VL - 963 SP - 012003 ER - TY - JOUR A1 - Werdehausen, Daniel A1 - Burger, Sven A1 - Staude, Isabelle A1 - Pertsch, Thomas A1 - Decker, Manuel T1 - Dispersion-engineered nanocomposites enable achromatic diffractive optical elements JF - Optica Y1 - 2019 U6 - https://doi.org/10.1364/OPTICA.6.001031 VL - 6 SP - 1031 ER - TY - CHAP A1 - Werdehausen, Daniel A1 - Burger, Sven A1 - Staude, Isabelle A1 - Pertsch, Thomas A1 - Decker, Manuel T1 - Nanocomposites – A Route to better and smaller optical Elements? T2 - Optical Design and Fabrication 2019 Y1 - 2019 U6 - https://doi.org/10.1364/OFT.2019.OT2A.2 SP - OT2A.2 ER - TY - JOUR A1 - Scott, Philip A1 - Santiago, Xavier Garcia A1 - Beutel, Dominik A1 - Rockstuhl, Carsten A1 - Wegener, Martin A1 - Fernandez-Corbaton, Ivan T1 - On enhanced sensing of chiral molecules in optical cavities JF - Appl. Phys. Rev. Y1 - 2020 U6 - https://doi.org/10.1063/5.0025006 VL - 7 SP - 041413 ER - TY - GEN A1 - Hammerschmidt, Martin A1 - Weiser, Martin A1 - Santiago, Xavier Garcia A1 - Zschiedrich, Lin A1 - Bodermann, Bernd A1 - Burger, Sven T1 - Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion N2 - We present a Newton-like method to solve inverse problems and to quantify parameter uncertainties. We apply the method to parameter reconstruction in optical scatterometry, where we take into account a priori information and measurement uncertainties using a Bayesian approach. Further, we discuss the influence of numerical accuracy on the reconstruction result. T3 - ZIB-Report - 17-37 KW - computational metrology KW - optical metrology KW - computational lithography KW - nanolithography KW - finite- element methods KW - nanooptics Y1 - 2017 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:0297-zib-64704 SN - 1438-0064 ER - TY - JOUR A1 - Hammerschmidt, Martin A1 - Weiser, Martin A1 - Santiago, Xavier Garcia A1 - Zschiedrich, Lin A1 - Bodermann, Bernd A1 - Burger, Sven T1 - Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion JF - Proc. SPIE Y1 - 2017 U6 - https://doi.org/10.1117/12.2270596 VL - 10330 SP - 1033004 ER - TY - JOUR A1 - Schneider, Philipp-Immanuel A1 - Santiago, Xavier Garcia A1 - Rockstuhl, Carsten A1 - Burger, Sven T1 - Global optimization of complex optical structures using Bayesian optimization based on Gaussian processes JF - Proc. SPIE Y1 - 2017 U6 - https://doi.org/10.1117/12.2270609 VL - 10335 SP - 103350O ER - TY - JOUR A1 - Santiago, Xavier Garcia A1 - Burger, Sven A1 - Rockstuhl, Carsten A1 - Fernandez-Corbaton, Ivan T1 - Measuring the electromagnetic chirality of 2D arrays under normal illumination JF - Opt. Lett. Y1 - 2017 U6 - https://doi.org/10.1364/OL.42.004075 VL - 42 SP - 4075 ER - TY - THES A1 - Pakhomov, Anton T1 - Efficient modeling and optimization of surface second-harmonic generation from nanophotonic components Y1 - 2021 U6 - https://doi.org/10.22032/dbt.49369 ER - TY - GEN A1 - Pflüger, Mika A1 - Kline, R Joseph A1 - Fernández Herrero, Analía A1 - Hammerschmidt, Martin A1 - Soltwisch, Victor A1 - Krumrey, Michael T1 - Extracting dimensional parameters of gratings produced with self-aligned multiple patterning using grazing-incidence small-angle x-ray scattering [Source Code] Y1 - 2020 U6 - https://doi.org/10.24433/CO.0953516.v2 ER - TY - CHAP A1 - Perevoznik, Dmitrii A1 - Bose, Surajit A1 - Burger, Sven A1 - Demircan, Ayhan A1 - Morgner, Uwe T1 - Photonic components in polymers made by femtosecond pulses T2 - Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC) Y1 - 2021 U6 - https://doi.org/10.1109/CLEO/Europe-EQEC52157.2021.9541906 SP - 1 ER - TY - CHAP A1 - Musial, Anna A1 - Zolnacz, Kinga A1 - Srocka, Nicole A1 - Kravets, Oleh A1 - Große, Jan A1 - Schneider, Philipp-Immanuel A1 - Olszewski, Jacek A1 - Poturaj, Krzystof A1 - Wojcik, Grzegorz A1 - Mergo, Pawel A1 - Dybka, Kamil A1 - Dyrkacz, Mariusz A1 - Dlubek, Michal A1 - Rodt, Sven A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Urbanczyk, Waclaw A1 - Sek, Grzegorz A1 - Reitzenstein, Stephan T1 - Stand-alone quantum dot-based single-photon source operating at telecommunication wavelengths T2 - 10th International Conference on Spontaneous Coherence in Excitonic Systems ICSCE10 Y1 - 2020 SP - 39 ER - TY - CHAP A1 - Hammerschmidt, Martin A1 - Zschiedrich, Lin A1 - Siaudinyté, Lauryna A1 - Manley, Phillip A1 - Schneider, Philipp-Immanuel A1 - Burger, Sven T1 - Forward simulation of coherent beams on grating structures for coherent scatterometry T2 - Proc. SPIE Y1 - 2023 U6 - https://doi.org/10.1117/12.2673231 VL - PC12619 SP - PC1261907 ER - TY - JOUR A1 - Andrle, Anna A1 - Hönicke, Philipp A1 - Gwalt, Grzegorz A1 - Schneider, Philipp-Immanuel A1 - Kayser, Yves A1 - Siewert, Frank A1 - Soltwisch, Victor T1 - Shape- and Element-Sensitive Reconstruction of Periodic Nanostructures with Grazing Incidence X-ray Fluorescence Analysis and Machine Learning JF - Nanomaterials Y1 - 2021 U6 - https://doi.org/10.3390/nano11071647 VL - 11 SP - 1647 ER - TY - CHAP A1 - Perevoznik, Dmitrii A1 - Bose, Surajit A1 - Burger, Sven A1 - Demircan, Ayhan A1 - Morgner, Uwe T1 - Writing Photonic Components in Polymers Using Femtosecond Pulses T2 - Conference on Lasers and Electro-Optics (CLEO) Y1 - 2021 U6 - https://doi.org/10.1364/CLEO_AT.2021.ATh4P.4 SP - ATh4P.4 ER - TY - JOUR A1 - Pakhomov, Anton V. A1 - Hammerschmidt, Martin A1 - Burger, Sven A1 - Pertsch, Thomas A1 - Setzpfand, Frank T1 - Modeling of surface-induced second-harmonic generation from multilayer structures by the transfer matrix method JF - Opt. Express Y1 - 2021 U6 - https://doi.org/10.1364/OE.417066 VL - 29 SP - 9098 ER - TY - THES A1 - Santiago, Xavier Garcia T1 - Numerical methods for shape optimization of photonic nanostructures Y1 - 2021 U6 - https://doi.org/10.5445/IR/1000131006 ER - TY - JOUR A1 - Schneider, Philipp-Immanuel A1 - Manley, Phillip A1 - Krüger, Jan A1 - Zschiedrich, Lin A1 - Köning, Rainer A1 - Bodermann, Bernd A1 - Burger, Sven T1 - Reconstructing phase aberrations for high-precision dimensional microscopy JF - Proc. SPIE Y1 - 2022 U6 - https://doi.org/10.1117/12.2620762 VL - 12137 SP - 121370I ER -