TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Schmidt, Frank T1 - Finite-element based electromagnetic field simulations: Benchmark results for isolated structures T2 - Proc. SPIE Y1 - 2013 U6 - https://doi.org/10.1117/12.2026213 VL - 8880 SP - 88801Z ER - TY - JOUR A1 - Endres, Johannes A1 - Burger, Sven A1 - Wurm, Matthias A1 - Bodermann, Bernd T1 - Numerical investigations of the influence of different commonly applied approximations in scatterometry JF - Proc. SPIE Y1 - 2013 U6 - https://doi.org/10.1117/12.2022108 VL - 8789 SP - 878904 ER - TY - JOUR A1 - Soltwisch, Victor A1 - Burger, Sven A1 - Scholze, Frank T1 - Scatterometry sensitivity analysis for conical diffraction versus in-plane diffraction geometry with respect to the side wall angle JF - Proc. SPIE Y1 - 2013 U6 - https://doi.org/10.1117/12.2020487 VL - 8789 SP - 878905 ER - TY - CHAP A1 - Tyminski, Jacek A1 - Pomplun, Jan A1 - Renwick, Stephen P. T1 - Impact of topographic mask models on scanner matching solutions T2 - Proc. SPIE: Optical Microlithography XXVII Y1 - 2014 U6 - https://doi.org/10.1117/12.2045919 VL - 9052 SP - 905218 ER - TY - CHAP A1 - Kleemann, B. A1 - Kurz, J. A1 - Hetzler, J. A1 - Pomplun, Jan A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - Fast online inverse scattering with Reduced Basis Method (RBM) for a 3D phase grating with specific line roughness T2 - Modelling Aspects in Optical Metrology III Y1 - 2011 U6 - https://doi.org/10.1117/12.889364 VL - 8083 SP - 808309 PB - Proc. SPIE ER - TY - CHAP A1 - Wong, G. A1 - Kang, M. A1 - Lee, H. A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Biancalana, F. A1 - Russell, P. T1 - Strongly Twisted Solid-Core PCF: A One-Dimensional Chiral Metamaterial T2 - Frontiers in Optics Y1 - 2011 U6 - https://doi.org/10.1364/FIO.2011.FMG3 SP - FMG3 PB - Optical Society of America ER - TY - JOUR A1 - Arellano, Cristina A1 - Mingaleev, Sergei F. A1 - Koltchanov, Igor A1 - Richter, Andre A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank T1 - Efficient design of photonic integrated circuits (PICs) by combining device- and circuit- level simulation tools JF - Proc. SPIE Y1 - 2013 U6 - https://doi.org/10.1117/12.2004378 VL - 8627 SP - 862711 ER - TY - JOUR A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Schmidt, Frank A1 - Bodermann, Bernd T1 - Fast simulation method for parameter reconstruction in optical metrology JF - Proc. SPIE Y1 - 2013 U6 - https://doi.org/10.1117/12.2011154 VL - 8681 SP - 868119 ER - TY - JOUR A1 - Zschiedrich, Lin A1 - Greiner, Horst A1 - Burger, Sven A1 - Schmidt, Frank T1 - Numerical analysis of nanostructures for enhanced light extraction from OLEDs JF - Proc. SPIE Y1 - 2013 U6 - https://doi.org/10.1117/12.2001132 VL - 8641 SP - 86410B ER - TY - JOUR A1 - Tyminski, Jacek A1 - Pomplun, Jan A1 - Zschiedrich, Lin A1 - Flagello, Donis A1 - Matsuyama, Tomiyuki T1 - Topographic mask modeling with reduced basis finite element method JF - Proc. SPIE Y1 - 2013 U6 - https://doi.org/10.1117/12.2011613 VL - 8683 SP - 86831C ER -