TY - JOUR A1 - Schneider, Philipp-Immanuel A1 - Manley, Phillip A1 - Krüger, Jan A1 - Zschiedrich, Lin A1 - Köning, Rainer A1 - Bodermann, Bernd A1 - Burger, Sven T1 - Reconstructing phase aberrations for high-precision dimensional microscopy JF - Proc. SPIE Y1 - 2022 U6 - https://doi.org/10.1117/12.2620762 VL - 12137 SP - 121370I ER - TY - JOUR A1 - Binkowski, Felix A1 - Betz, Fridtjof A1 - Hammerschmidt, Martin A1 - Schneider, Philipp-Immanuel A1 - Zschiedrich, Lin A1 - Burger, Sven T1 - Computation of eigenfrequency sensitivities using Riesz projections for efficient optimization of nanophotonic resonators JF - Commun. Phys. Y1 - 2022 U6 - https://doi.org/10.1038/s42005-022-00977-1 VL - 5 SP - 202 ER - TY - JOUR A1 - Krüger, Jan A1 - Dopslaff, Sven A1 - Manley, Phillip A1 - Bergmann, Detlef A1 - Köning, Rainer A1 - Dai, Gaoliang A1 - Hahm, Kai A1 - Schneider, Philipp-Immanuel A1 - Hammerschmidt, Martin A1 - Zschiedrich, Lin A1 - Bosse, Harald A1 - Bodermann, Bernd T1 - Photomask linewidth measurement comparison including an improved model-based through-focus measurement approach JF - Meas. Sci. Technol. Y1 - 2026 U6 - https://doi.org/10.1088/1361-6501/ae44bb VL - 37 SP - 095004 ER -