TY - THES A1 - Zschiedrich, Lin T1 - Transparent boundary conditions for Maxwell's equations: Numerical concepts beyond the PML method N2 - Optical technologies are ubiquitously used in hi-tech devices. As a common feature of such devices one finds structures with dimensions in the order of the wavelength of the used light. To design and produce such devices, the wave nature of light must be taken into account. Accordingly, robust simulation tools are required which are based on rigorously solving Maxwell's equations, the governing equations of light propagation within macroscopic media. This thesis contributes to the modeling and the numerical computation of light scattering problems: Light scattering problems are typically posed on the entire space. The Perfectly-Matched -Layer method (PML) is widely used to restrict the simulation problem onto a bounded computational domain. We propose an adaptive PML method which exhibits a good convergence even for critical problems where standard PML implementations fail. Besides the computation of the near field, that is the electromagnetic field within the computational domain, it is of major interest to evaluate the electromagnetic field in the exterior domain and to compute the far field. So far, this was numerically only possible for simple geometries such as homogeneous exterior domains or layered media. To deal with more complicated devices, for example with waveguide inhomogeneities, we develop an evaluation formula based on the PML solution which allows for an exterior domain field evaluation in a half space above the device. Finally, we generalize the PML method to problems with multiply structured exterior domains. The term “multiply structured exterior domain” is defined in this thesis and means that the exterior domain exhibits several half-infinite structures. Mathematically, this gives rise to various complications. For example, no analytical solutions to Maxwell's equations for standard light sources are available in the exterior domain, which are needed to describe the incoming field in a light scattering problem. To tackle this we propose a new light scattering problem formulation which fits well into the PML method framework and which may be regarded as an extension of classical contributions by Sommerfeld, Wiener and Hopf. An exterior domain evaluation formula for multiply structured exterior domains with an extended illumination is derived as well. KW - transparent boundary conditions KW - electromagnetic scattering KW - Maxwell's equations KW - perfectly matched layers KW - PML KW - Wiener-Hopf techniques Y1 - 2009 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:188-fudissthesis000000013994-8 ER - TY - GEN A1 - Schädle, Achim A1 - Zschiedrich, Lin T1 - Additive Schwarz method for scattering problems using the PML method at interfaces N2 - Scattering problems in integrated optics can be modeled in simple cases by the Helmholtz equation. The computational domain is truncated by a non-reflecting boundary condition. We investigate Schwarz algorithms with a sort of DtN operator, realized by the PML-method, at the interfaces of the sub-domains as an iterative solver. T3 - ZIB-Report - 05-27 KW - perfectly matched layer KW - Helmholtz equation KW - scattering KW - domain decomposition Y1 - 2005 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:0297-zib-8613 ER - TY - GEN A1 - Schädle, Achim A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Klose, Roland A1 - Schmidt, Frank T1 - Domain Decomposition Method for Maxwell's Equations: Scattering off Periodic Structures N2 - We present a domain decomposition approach for the computation of the electromagnetic field within periodic structures. We use a Schwarz method with transparent boundary conditions at the interfaces of the domains. Transparent boundary conditions are approximated by the perfectly matched layer method (PML). To cope with Wood anomalies appearing in periodic structures an adaptive strategy to determine optimal PML parameters is developed. We focus on the application to typical EUV lithography line masks. Light propagation within the multi-layer stack of the EUV mask is treated analytically. This results in a drastic reduction of the computational costs and allows for the simulation of next generation lithography masks on a standard personal computer. T3 - ZIB-Report - 06-04 KW - domain decomposition KW - conical diffraction KW - electro-magnetic scattering KW - Maxwell's equations KW - Lithography KW - finite elements Y1 - 2006 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:0297-zib-8984 ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Schmidt, Frank T1 - Finite-element based electromagnetic field simulations: Benchmark results for isolated structures T2 - Proc. SPIE Y1 - 2013 U6 - https://doi.org/10.1117/12.2026213 VL - 8880 SP - 88801Z ER - TY - CHAP A1 - Pomplun, Jan A1 - Burger, Sven A1 - Rozova, Maria A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - Finite element simulation of optical modes in VCSELs T2 - Numerical Simulation of Optoelectronic Devices (NUSOD), 11th International Conference on Y1 - 2011 U6 - https://doi.org/10.1109/NUSOD.2011.6041170 SP - 119 EP - 120 ER - TY - CHAP A1 - Zschiedrich, Lin A1 - Schmidt, Frank A1 - Pomplun, Jan A1 - Burger, Sven T1 - Finite elements for nano-optics applications T2 - Proc. Europ. Opt. Soc. Ann. Meet. 2016 (EOSAM) Y1 - 2016 SN - 978-1-5108-4796-5 SP - 178 ER - TY - JOUR A1 - Schneider, Philipp-Immanuel A1 - Hammerschmidt, Martin A1 - Zschiedrich, Lin A1 - Burger, Sven T1 - Using Gaussian process regression for efficient parameter reconstruction JF - Proc. SPIE Y1 - 2019 U6 - https://doi.org/10.1117/12.2513268 VL - 10959 SP - 1095911 ER - TY - JOUR A1 - Binkowski, Felix A1 - Zschiedrich, Lin A1 - Burger, Sven T1 - An auxiliary field approach for computing optical resonances in dispersive media JF - J. Eur. Opt. Soc.-Rapid Y1 - 2019 U6 - https://doi.org/10.1186/s41476-019-0098-z VL - 15 SP - 3 ER - TY - JOUR A1 - Kewes, Günter A1 - Binkowski, Felix A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Benson, Oliver T1 - Heuristic Modeling of Strong Coupling in Plasmonic Resonators JF - ACS Photonics Y1 - 2018 U6 - https://doi.org/10.1021/acsphotonics.8b00766 VL - 5 SP - 4089 ER - TY - JOUR A1 - Binkowski, Felix A1 - Zschiedrich, Lin A1 - Burger, Sven T1 - A Riesz-projection-based method for nonlinear eigenvalue problems JF - J. Comput. Phys. Y1 - 2020 U6 - https://doi.org/10.1016/j.jcp.2020.109678 VL - 419 SP - 109678 ER - TY - JOUR A1 - Lalanne, P. A1 - Yan, W. A1 - Gras, A. A1 - Sauvan, C. A1 - Hugonin, J.-P. A1 - Besbes, M. A1 - Demésy, G. A1 - Truong, M. D. A1 - Gralak, B. A1 - Zolla, F. A1 - Nicolet, A. A1 - Binkowski, Felix A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Zimmerling, J. A1 - Remis, R. A1 - Urbach, H. Paul A1 - Liu, H. T. A1 - Weiss, T. T1 - Quasinormal mode solvers for resonators with dispersive materials JF - J. Opt. Soc. Am. A Y1 - 2019 U6 - https://doi.org/10.1364/JOSAA.36.000686 VL - 36 SP - 686 ER - TY - JOUR A1 - Ledentsov, Jr., Nikolay A1 - Shchukin, Vitaly A1 - Kropp, Jörg-R. A1 - Zschiedrich, Lin A1 - Schmidt, Frank A1 - Ledentsov, Jr., Nikolay T1 - Resonant cavity light–emitting diodes based on dielectric passive cavity structures JF - Proc. SPIE Y1 - 2017 U6 - https://doi.org/10.1117/12.2253089 VL - 10124 SP - 101240O ER - TY - JOUR A1 - Hiremath, Kirankumar A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - Numerical solution of nonlocal hydrodynamic Drude model for arbitrary shaped nano-plasmonic structures using Nedelec finite elements JF - J. Comp. Phys. Y1 - 2012 U6 - https://doi.org/10.1016/j.jcp.2012.05.013 VL - 231 IS - 17 SP - 5890 EP - 5896 ER - TY - CHAP A1 - Hohage, Thorsten A1 - Schmidt, Frank A1 - Zschiedrich, Lin ED - Michielsen, Bas ED - Decavèle, Francine T1 - A new method for the solution of scattering problems T2 - Proceedings of the JEE’02 Symposium Y1 - 2002 SP - 251 EP - 256 PB - ONERA CY - Toulouse ER - TY - JOUR A1 - Hohage, Thorsten A1 - Schmidt, Frank A1 - Zschiedrich, Lin T1 - Solving Time-Harmonic Scattering Problems Based on the Pole Condition I: Theory JF - SIAM J. Math. Anal. Y1 - 2003 U6 - https://doi.org/10.1137/S0036141002406473 VL - 35 IS - 1 SP - 183 EP - 210 ER - TY - JOUR A1 - Hohage, Thorsten A1 - Schmidt, Frank A1 - Zschiedrich, Lin T1 - Solving Time-Harmonic Scattering Problems Based on the Pole Condition II: Convergence of the PML Method JF - SIAM J. Math. Anal. Y1 - 2003 U6 - https://doi.org/10.1137/S0036141002406485 VL - 35 IS - 3 SP - 547 EP - 560 ER - TY - JOUR A1 - Enkrich, Christian A1 - Wegener, M. A1 - Linden, S. A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank A1 - Zhou, C. A1 - Koschny, T. A1 - Soukoulis, C. T1 - Magnetic metamaterials at telecommunication and visible frequencies JF - Phys. Rev. Lett. Y1 - 2005 U6 - https://doi.org/10.1103/PhysRevLett.95.203901 VL - 95 SP - 203901 ER - TY - JOUR A1 - Lockau, D. A1 - Zschiedrich, Lin A1 - Burger, Sven T1 - Accurate simulation of light transmission through subwavelength apertures in metal films JF - J. Opt. A Y1 - 2009 U6 - https://doi.org/10.1088/1464-4258/11/11/114013 VL - 11 SP - 114013 ER - TY - CHAP A1 - Lockau, D. A1 - Zschiedrich, Lin A1 - Schmidt, Frank A1 - Burger, Sven A1 - Rech, Bernd T1 - Efficient simulation of plasmonic structures for solar cells T2 - International Workshop on Optical Waveguide Theory and Numerical Modelling Y1 - 2009 VL - XVIII SP - 48 PB - Fraunhofer Institute for Applied Optics and Precision Engineering ER - TY - CHAP A1 - Lockau, D. A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Schmidt, Frank A1 - Ruske, F. A1 - Rech, Bernd T1 - Rigorous optical simulation of light management in crystalline silicon thin film solar cells with rough interface textures T2 - Physics and Simulation of Optoelectronic Devices XIX Y1 - 2011 U6 - https://doi.org/10.1117/12.874967 VL - 7933 SP - 79330M PB - Proc. SPIE ER - TY - JOUR A1 - Michaelis, D. A1 - Wächter, Christoph A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Bräuer, Andreas T1 - Micro-optically assisted high index waveguide coupling JF - Appl. Opt. Y1 - 2006 U6 - https://doi.org/10.1364/AO.45.001831 VL - 45 SP - 1831 EP - 1838 ER - TY - CHAP A1 - Klose, Roland A1 - Burger, Sven A1 - Schmidt, Frank A1 - Zschiedrich, Lin T1 - A multilevel method for the computation of eigenmodes in 3D photonic crystals T2 - Proceedings of the 5th International Conference on Numerical Simulation of Optoelectronic Devices Y1 - 2005 U6 - https://doi.org/10.1109/NUSOD.2005.1518135 SP - 61 EP - 62 ER - TY - CHAP A1 - Kleemann, B. A1 - Kurz, J. A1 - Hetzler, J. A1 - Pomplun, Jan A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - Fast online inverse scattering with Reduced Basis Method (RBM) for a 3D phase grating with specific line roughness T2 - Modelling Aspects in Optical Metrology III Y1 - 2011 U6 - https://doi.org/10.1117/12.889364 VL - 8083 SP - 808309 PB - Proc. SPIE ER - TY - CHAP A1 - Pomplun, Jan A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Schmidt, Frank T1 - Reduced basis method for computational lithography T2 - Photomask Technology Y1 - 2009 U6 - https://doi.org/10.1117/12.829639 VL - 7488 SP - 74882B PB - Proc. SPIE ER - TY - CHAP A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank A1 - Zschiedrich, Lin A1 - Scholze, Frank ED - Martin, P. ED - Naber, R. T1 - Rigorous FEM-Simulation of EUV-Masks: Influence of shape and material parameters T2 - Photomask Technology Y1 - 2006 U6 - https://doi.org/10.1117/12.686828 VL - 6349 SP - 63493D PB - Proc. SPIE ER - TY - CHAP A1 - Schädle, Achim A1 - Zschiedrich, Lin ED - Widlund, Olof ED - Keyes, David T1 - Additive Schwarz method for scattering problems using the PML method at interfaces T2 - Domain Decomposition Methods in Science and Engineering XVI Y1 - 2007 VL - 55 SP - 205 EP - 212 PB - Springer ER - TY - JOUR A1 - Schädle, Achim A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Klose, Roland A1 - Schmidt, Frank T1 - Domain Decomposition Method for Maxwell’s Equations JF - J. Comput. Phys. Y1 - 2007 U6 - https://doi.org/10.1016/j.jcp.2007.04.017 VL - 226 SP - 477 EP - 493 ER - TY - CHAP A1 - Schmidt, Frank A1 - Pomplun, Jan A1 - Zschiedrich, Lin A1 - Burger, Sven T1 - Fast online simulation of 3D nanophotonic structures by the reduced basis method T2 - Integrated Optics: Devices, Materials, and Technologies XV Y1 - 2011 U6 - https://doi.org/10.1117/12.874726 VL - 7941 SP - 79410G PB - Proc. SPIE ER - TY - CHAP A1 - Schmidt, Frank A1 - Friese, T. A1 - Zschiedrich, Lin A1 - Deuflhard, Peter T1 - Adaptive Multigrid Methods for the Vectorial Maxwell Eigenvalue Problem for Optical Waveguide Design T2 - Mathematics - Key Technology for the Future Y1 - 2003 UR - http://www.zib.de/Publications/Reports/ZR-00-54.pdf SP - 270 EP - 292 PB - Springer ER - TY - JOUR A1 - Schmidt, Frank A1 - Hohage, Thorsten A1 - Klose, Roland A1 - Schädle, Achim A1 - Zschiedrich, Lin T1 - Pole condition: A numerical method for Helmholtz-type scattering problems with inhomogeneous exterior domain JF - J. Comput. Appl. Math. Y1 - 2008 U6 - https://doi.org/10.1016/j.cam.2007.04.046 VL - 218 IS - 1 SP - 61 EP - 69 ER - TY - CHAP A1 - Rozova, Maria A1 - Pomplun, Jan A1 - Zschiedrich, Lin A1 - Schmidt, Frank A1 - Burger, Sven T1 - 3D finite element simulation of optical modes in VCSELs T2 - Proc. SPIE Y1 - 2012 U6 - https://doi.org/10.1117/12.906372 VL - 8255 SP - 82550K ER - TY - JOUR A1 - Ruprecht, Daniel A1 - Schädle, Achim A1 - Schmidt, Frank A1 - Zschiedrich, Lin T1 - Transparent boundary conditions for time-dependent problems JF - SIAM J. Sci. Comput. Y1 - 2008 U6 - https://doi.org/10.1137/070692637 VL - 30 IS - 5 SP - 2358 EP - 2385 ER - TY - CHAP A1 - Schmidt, Frank A1 - Burger, Sven A1 - Pomplun, Jan A1 - Zschiedrich, Lin ED - Greiner, Christoph ED - Wächter, Christoph T1 - Advanced FEM analysis of optical waveguides: algorithms and applications T2 - Integrated Optics Y1 - 2008 U6 - https://doi.org/10.1117/12.765720 VL - 6896 SP - 689602 PB - SPIE ER - TY - JOUR A1 - Pomplun, Jan A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - Adaptive finite element method for simulation of optical nano structures JF - Phys. Status Solidi B Y1 - 2007 U6 - https://doi.org/10.1002/pssb.200743192 VL - 244 SP - 3419 EP - 3434 ER - TY - CHAP A1 - Pomplun, Jan A1 - Holzlöhner, Ronald A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank ED - Adibi, Ali ED - Scherer, Axel ED - Lin, Shawn-Yu T1 - FEM investigation of leaky modes in hollow core photonic crystal fibers T2 - Proc. SPIE, Photonic Crystal Materials and Devices VI Y1 - 2007 UR - http://arxiv.org/pdf/physics/0702165 VL - 6480 SP - 64800M ER - TY - CHAP A1 - Pomplun, Jan A1 - Schmidt, Frank A1 - Burger, Sven A1 - Zschiedrich, Lin T1 - Adaptive Reduced Basis Method for Optical Scattering Problems T2 - Integrated Photonics Research, Silicon and Nanophotonics Y1 - 2010 U6 - https://doi.org/10.1364/IPRSN.2010.IWD4 SP - IWD4 PB - OSA ER - TY - JOUR A1 - Pomplun, Jan A1 - Zschiedrich, Lin A1 - Klose, Roland A1 - Schmidt, Frank A1 - Burger, Sven T1 - Finite element simulation of radiation losses in photonic crystal fibers JF - phys. stat. sol. (a) Y1 - 2007 U6 - https://doi.org/10.1002/pssa.200776414 VL - 204 IS - 11 SP - 3822 EP - 3837 ER - TY - CHAP A1 - Pomplun, Jan A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - Reduced basis method for real-time inverse scatterometry T2 - Modelling Aspects in Optical Metrology III Y1 - 2011 U6 - https://doi.org/10.1117/12.889892 VL - 8083 SP - 808308 PB - Proc. SPIE ER - TY - CHAP A1 - Pomplun, Jan A1 - Wenzel, Hans A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Rozova, Maria A1 - Schmidt, Frank A1 - Crump, Paul A1 - Ekhteraei, Hossein A1 - Schultz, Christoph M. A1 - Erbert, Götz T1 - Thermo-optical simulation of high-power diode lasers T2 - Proc. SPIE Y1 - 2012 U6 - https://doi.org/10.1117/12.909330 VL - 8255 SP - 825510 ER - TY - CHAP A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Kettner, Benjamin A1 - Schmidt, Frank T1 - Advanced Finite Element Method for Nano-Resonators T2 - Proc. SPIE Y1 - 2006 U6 - https://doi.org/10.1117/12.646252 VL - 6115 SP - 611515 ER - TY - CHAP A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Klose, Roland A1 - Schädle, Achim A1 - Schmidt, Frank ED - Sidorin, Y. ED - Wächter, Christoph T1 - JCMmode: an adaptive finite element solver for the computation of leaky modes T2 - Integrated Optics: Devices, Materials, and Technologies IX Y1 - 2005 U6 - https://doi.org/10.1117/12.590372 VL - 5728 SP - 192 EP - 202 PB - Proc. SPIE ER - TY - CHAP A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Pomplun, Jan A1 - Schmidt, Frank ED - Sidorin, Y. ED - Waechter, Ch. T1 - Goal oriented adaptive finite element method for precise simulation of optical components T2 - Proc. SPIE, Integrated Optics Y1 - 2007 UR - http://arxiv.org/pdf/physics/0702128 VL - 6475 SP - 64750H ER - TY - CHAP A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Schädle, Achim A1 - Schmidt, Frank ED - Levinson, Harry ED - Dusa, Mircea T1 - A rigorous finite-element domain decomposition method for electromagnetic near field simulations T2 - Optical Microlithography XXI Y1 - 2008 U6 - https://doi.org/10.1117/12.771989 VL - 6924 PB - SPIE ER - TY - CHAP A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Schädle, Achim A1 - Schmidt, Frank T1 - Domain decomposition method for electromagnetic scattering problems: application to EUV lithography T2 - Proceedings of the 5th International Conference on Numerical Simulation of Optoelectronic devices Y1 - 2005 U6 - https://doi.org/10.1109/NUSOD.2005.1518132 SP - 55 EP - 56 ER - TY - CHAP A1 - Zschiedrich, Lin A1 - Greiner, Horst A1 - Pomplun, Jan A1 - Hammerschmidt, Martin A1 - Burger, Sven A1 - Schmidt, Frank T1 - FEM simulations of light extraction from nanostructured organic light-emitting diodes T2 - Renewable Energy and the Environment Optics and Photonics Congress Y1 - 2012 U6 - https://doi.org/10.1364/SOLED.2012.LT2B.5 SP - LT2B.5 PB - Optical Society of America ER - TY - JOUR A1 - Zschiedrich, Lin A1 - Klose, Roland A1 - Schädle, Achim A1 - Schmidt, Frank T1 - A new finite element realization of the Perfectly Matched Layer Method for Helmholtz scattering problems on polygonal domains in 2D JF - J. Comput. Appl. Math. Y1 - 2006 U6 - https://doi.org/10.1016/j.cam.2005.03.047 VL - 188 SP - 12 EP - 32 ER - TY - CHAP A1 - Zschiedrich, Lin A1 - Schmidt, Frank ED - Horiuchi, Toshiyuki T1 - Finite element simulation of light propagation in non-periodic mask patterns T2 - Photomask and Next-Generation Lithography Mask Technology XV Y1 - 2008 UR - http://arxiv.org/pdf/0804.2587v1 VL - 7028 PB - SPIE ER - TY - CHAP A1 - Wong, G. A1 - Kang, M. A1 - Lee, H. A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Biancalana, F. A1 - Russell, P. T1 - Strongly Twisted Solid-Core PCF: A One-Dimensional Chiral Metamaterial T2 - Frontiers in Optics Y1 - 2011 U6 - https://doi.org/10.1364/FIO.2011.FMG3 SP - FMG3 PB - Optical Society of America ER - TY - CHAP A1 - Tyminski, Jacek A1 - Popescu, Raluca A1 - Burger, Sven A1 - Pomplun, Jan A1 - Zschiedrich, Lin A1 - Matsuyama, Tomoyuki A1 - Noda, Tomoya ED - Conley, W. T1 - Finite element models of lithographic mask topography T2 - Proc. SPIE Y1 - 2012 U6 - https://doi.org/10.1117/12.916957 VL - 8326 SP - 83261B ER - TY - JOUR A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Blome, Mark A1 - Schmidt, Frank T1 - Advanced finite-element methods for design and analysis of nano-optical structures: Applications JF - Proc. SPIE Y1 - 2013 U6 - https://doi.org/10.1117/12.2001094 VL - 8642 SP - 864205 ER - TY - JOUR A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Schmidt, Frank A1 - Bodermann, Bernd T1 - Fast simulation method for parameter reconstruction in optical metrology JF - Proc. SPIE Y1 - 2013 U6 - https://doi.org/10.1117/12.2011154 VL - 8681 SP - 868119 ER - TY - JOUR A1 - Zschiedrich, Lin A1 - Greiner, Horst A1 - Burger, Sven A1 - Schmidt, Frank T1 - Numerical analysis of nanostructures for enhanced light extraction from OLEDs JF - Proc. SPIE Y1 - 2013 U6 - https://doi.org/10.1117/12.2001132 VL - 8641 SP - 86410B ER - TY - JOUR A1 - Tyminski, Jacek A1 - Pomplun, Jan A1 - Zschiedrich, Lin A1 - Flagello, Donis A1 - Matsuyama, Tomiyuki T1 - Topographic mask modeling with reduced basis finite element method JF - Proc. SPIE Y1 - 2013 U6 - https://doi.org/10.1117/12.2011613 VL - 8683 SP - 86831C ER - TY - CHAP A1 - Zschiedrich, Lin A1 - März, Reinhard A1 - Burger, Sven A1 - Schmidt, Frank T1 - Efficient 3D Finite Element Simulation of Fiber-Chip Coupling T2 - Integrated Photonics Research and Applications/Nanophotonics Y1 - 2006 U6 - https://doi.org/10.1364/IPRA.2006.ITuF1 SP - ITuF1 ER - TY - CHAP A1 - Pomplun, Jan A1 - Zschiedrich, Lin A1 - Klose, Roland A1 - Schmidt, Frank A1 - Burger, Sven T1 - Finite Element Simulation of Radiation Losses in Photonic Crystal Fibers T2 - Nanophotonic Materials: Photonic Crystals, Plasmonics, and Metamaterials Y1 - 2008 U6 - https://doi.org/10.1002/9783527621880.ch17 SP - 313 EP - 331 PB - Wiley-VCH ER - TY - CHAP A1 - Wenzel, Hans A1 - Crump, Paul A1 - Ekhteraei, Hossein A1 - Schultz, Christoph M. A1 - Pomplun, Jan A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank A1 - Erbert, Götz T1 - Theoretical and experimental analysis of the lateral modes of high-power broad-area lasers T2 - Numerical Simulation of Optoelectronic Devices Y1 - 2011 U6 - https://doi.org/10.1109/NUSOD.2011.6041183 SP - 143 EP - 144 ER - TY - CHAP A1 - Hammerschmidt, Martin A1 - Lockau, Daniel A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - Optical modelling of incoherent substrate light-trapping in silicon thin film multi-junction solar cells with finite elements and domain decomposition T2 - Proc. SPIE: Physics and Simulation of Optoelectronic Devices XXII Y1 - 2014 U6 - https://doi.org/10.1117/12.2036346 VL - 8980 SP - 898007 PB - SPIE ER - TY - JOUR A1 - Santiago, Xavier Garcia A1 - Hammerschmidt, Martin A1 - Burger, Sven A1 - Rockstuhl, Carsten A1 - Fernandez-Corbaton, Ivan A1 - Zschiedrich, Lin T1 - Decomposition of scattered electromagnetic fields into vector spherical wave functions on surfaces with general shapes JF - Phys. Rev. B Y1 - 2019 U6 - https://doi.org/10.1103/PhysRevB.99.045406 VL - 99 SP - 045406 ER - TY - CHAP A1 - Schneider, Philipp-Immanuel A1 - Santiago, Xavier Garcia A1 - Binkowski, Felix A1 - Gutsche, Philipp A1 - Höhne, Theresa A1 - Hammerschmidt, Martin A1 - Zschiedrich, Lin A1 - Burger, Sven T1 - Light Management for Engineering Luminescence in Nanoscale Environments By Numerical Optimization T2 - The Electrochemical Society, Meeting Abstracts Y1 - 2018 U6 - https://doi.org/10.1149/MA2018-01/16/1164 SN - 2151-2043 VL - 16 SP - 1164 ER - TY - JOUR A1 - Abebe, Muluneh G. A1 - Abass, Aimi A1 - Gomard, Guillaume A1 - Zschiedrich, Lin A1 - Lemmer, Uli A1 - Richards, Bryce S. A1 - Rockstuhl, Carsten A1 - Paetzold, Ulrich W. T1 - Rigorous wave-optical treatment of photon recycling in thermodynamics of photovoltaics: Perovskite thin-film solar cells JF - Phys. Rev. B Y1 - 2018 U6 - https://doi.org/10.1103/PhysRevB.98.075141 VL - 98 SP - 075141 ER - TY - JOUR A1 - Hammerschmidt, Martin A1 - Schneider, Philipp-Immanuel A1 - Santiago, Xavier Garcia A1 - Zschiedrich, Lin A1 - Weiser, Martin A1 - Burger, Sven T1 - Solving inverse problems appearing in design and metrology of diffractive optical elements by using Bayesian optimization JF - Proc. SPIE Y1 - 2018 U6 - https://doi.org/10.1117/12.2315468 VL - 10694 SP - 1069407 ER - TY - JOUR A1 - Höhne, Theresa A1 - Zschiedrich, Lin A1 - Haghighi, Nasibeh A1 - Lott, James A. A1 - Burger, Sven T1 - Validation of quasi-normal modes and of constant-flux modes for computing fundamental resonances of VCSELs JF - Proc. SPIE Y1 - 2018 U6 - https://doi.org/10.1117/12.2307200 VL - 10682 SP - 106821U ER - TY - CHAP A1 - Binkowski, Felix A1 - Zschiedrich, Lin A1 - Burger, Sven T1 - Analysis of light-matter interaction of optical sources with dispersive nanoresonators via contour integration T2 - XXVI International Workshop on Optical Wave & Waveguide Theory and Numerical Modelling, Proceedings Y1 - 2018 SN - 978-3-921823-98-9 SP - 40 ER - TY - CHAP A1 - Schneider, Philipp-Immanuel A1 - Zschiedrich, Lin A1 - Santiago, Xavier Garcia A1 - Burger, Sven T1 - Optimization of quantum optical devices with machine learning T2 - XXVI International Workshop on Optical Wave & Waveguide Theory and Numerical Modelling, Proceedings Y1 - 2018 SN - 978-3-921823-98-9 SP - 6 ER - TY - JOUR A1 - Binkowski, Felix A1 - Betz, Fridtjof A1 - Colom, Rémi A1 - Hammerschmidt, Martin A1 - Zschiedrich, Lin A1 - Burger, Sven T1 - Quasinormal mode expansion of optical far-field quantities JF - Phys. Rev. B Y1 - 2020 U6 - https://doi.org/10.1103/PhysRevB.102.035432 VL - 102 SP - 035432 ER - TY - JOUR A1 - Musiał, Anna A1 - Żołnacz, Kinga A1 - Srocka, Nicole A1 - Kravets, Oleh A1 - Große, Jan A1 - Olszewski, Jacek A1 - Poturaj, Krzysztof A1 - Wojcik, Grzegorz A1 - Mergo, Paweł A1 - Kamil, Dybka A1 - Dyrkacz, Mariusz A1 - Dlubek, Michal A1 - Lauritsen, Kristian A1 - Bülter, Andreas A1 - Schneider, Philipp-Immanuel A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Rodt, Sven A1 - Urbanczyk, Wacław A1 - Sek, Grzegorz A1 - Reitzenstein, Stephan T1 - Plug&play fibre-coupled 73 kHz single-photon source operating in the telecom O-band JF - Adv. Quantum Technol. Y1 - 2020 U6 - https://doi.org/10.1002/qute.202000018 VL - 3 SP - 2000018 ER - TY - CHAP A1 - Rodt, Sven A1 - Schneider, Philipp-Immanuel A1 - Zschiedrich, Lin A1 - Heindel, Tobias A1 - Bounouar, Samir A1 - Kantner, Markus A1 - Koprucki, Thomas A1 - Bandelow, Uwe A1 - Burger, Sven A1 - Reitzenstein, Stephan ED - Kneissl, Michael ED - Knorr, Andreas ED - Reitzenstein, Stephan ED - Hoffmann, Axel T1 - Deterministic Quantum Devices for Optical Quantum Communication T2 - Semiconductor Nanophotonics Y1 - 2020 U6 - https://doi.org/10.1007/978-3-030-35656-9_8 VL - 194 SP - 285 EP - 359 PB - Springer CY - Cham ER - TY - CHAP A1 - Zschiedrich, Lin A1 - Binkowski, Felix A1 - Burger, Sven ED - Kaltenbacher, Manfred T1 - Spectral resonance expansion by Riesz projections T2 - 14 th International Conference on Mathematical and Numerical Aspects of Wave Propagation Book of Abstracts Y1 - 2019 U6 - https://doi.org/10.34726/waves2019 SP - 234 ER - TY - CHAP A1 - Burger, Sven A1 - Schneider, Philipp-Immanuel A1 - Höhne, Theresa A1 - Zschiedrich, Lin ED - Reitzenstein, Stephan ED - Heindel, Tobias T1 - Numerical methods for simulation and optimization of the extraction efficiency from quantum-dot based single-photon emitters T2 - 7th International Workshop on Engineering of Quantum Emitter Properties (EQEP) Y1 - 2019 SP - 20 ER - TY - CHAP A1 - Kewes, Günter A1 - Binkowski, Felix A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Stete, Felix A1 - Koopman, Wouter A1 - Bargheer, Matias A1 - Benson, Oliver ED - Asquini, Rita T1 - Line Broadening Mechanisms in Hybrid Plasmonic Systems for Strong Coupling T2 - Photonics & Electromagnetics Research Symposium Abstracts (PIERS Rome) Y1 - 2019 SP - 704 ER - TY - CHAP A1 - Zschiedrich, Lin A1 - Binkowski, Felix A1 - Burger, Sven ED - Asquini, Rita T1 - Light-matter Interaction in Optical Resonators: Spectral Expansion by Riesz Projection T2 - Photonics & Electromagnetics Research Symposium Abstracts (PIERS Rome) Y1 - 2019 SP - 1067 ER - TY - CHAP A1 - Binkowski, Felix A1 - Zschiedrich, Lin A1 - Schneider, Philipp-Immanuel A1 - Hammerschmidt, Martin A1 - Santiago, Xavier Garcia A1 - Betz, Fridtjof A1 - Burger, Sven ED - Saastamoinen, Kimmo T1 - Spectral Expansion of the Scattering Response of Resonant Nanostructures T2 - EOS Topical Meeting on Diffractive Optics Y1 - 2019 SN - 978-952-68553-8-7 SP - 1 ER - TY - CHAP A1 - Binkowski, Felix A1 - Schneider, Philipp-Immanuel A1 - Hammerschmidt, Martin A1 - Zschiedrich, Lin A1 - Burger, Sven ED - Matijević, Milica ED - Krstić, Marko ED - Beličev, Petra T1 - Numerical optimization of resonant nanophotonic devices T2 - The Seventh International School and Conference on Photonics (PHOTONICA Belgrade) Y1 - 2019 SN - 978-86-7306-153-5 SP - 10 ER - TY - CHAP A1 - Burger, Sven A1 - Binkowski, Felix A1 - Zschiedrich, Lin ED - Zhoudi, Said ED - Topa, Antonio T1 - Computing resonances in nano-photonic devices using Riesz-projection-based methods T2 - The 10th International Conference on Metamaterials, Photonic Crystals and Plasmonics (META 2019) Y1 - 2019 SN - 2429-1390 SP - 92 ER - TY - CHAP A1 - Binkowski, Felix A1 - Zschiedrich, Lin A1 - Burger, Sven ED - Asquini, Rita T1 - Computing Optical Resonances in Plasmonic Systems Using a Contour Integral Method T2 - Photonics & Electromagnetics Research Symposium Abstracts (PIERS Rome) Y1 - 2019 SP - 1068 ER - TY - CHAP A1 - Burger, Sven A1 - Binkowski, Felix A1 - Zschiedrich, Lin ED - Asquini, Rita T1 - Finite Element Simulations of Optical Resonances in Dispersive Nanoresonators T2 - Photonics & Electromagnetics Research Symposium Abstracts (PIERS Rome) Y1 - 2019 SP - 699 ER - TY - GEN A1 - Musiał, Anna A1 - Żołnacz, Kinga A1 - Srocka, Nicole A1 - Kravets, Oleh A1 - Große, Jan A1 - Olszewski, Jacek A1 - Poturaj, Krzysztof A1 - Wojcik, Grzegorz A1 - Mergo, Paweł A1 - Dybka, Kamil A1 - Dyrkacz, Mariusz A1 - Dlubek, Michal A1 - Lauritsen, Kristian A1 - Bülter, Andreas A1 - Schneider, Philipp-Immanuel A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Rodt, Sven A1 - Urbanczyk, Wacław A1 - Sek, Grzegorz A1 - Reitzenstein, Stephan T1 - Front Cover: Plug&Play Fiber‐Coupled 73 kHz Single‐Photon Source Operating in the Telecom O‐Band (Adv. Quantum Technol. 6/2020) T2 - Adv. Quantum Technol. Y1 - 2020 U6 - https://doi.org/10.1002/qute.202070061 VL - 3 SP - 2070061 ER - TY - JOUR A1 - Pakhomov, Anton A1 - Löchner, Franz A1 - Zschiedrich, Lin A1 - Saravi, Sina A1 - Hammerschmidt, Martin A1 - Burger, Sven A1 - Pertsch, Thomas A1 - Setzpfand, Frank T1 - Far-field polarization signatures of surface optical nonlinearity in noncentrosymmetric semiconductors JF - Sci. Rep. Y1 - 2020 U6 - https://doi.org/10.1038/s41598-020-67186-0 VL - 10 SP - 10545 ER - TY - CHAP A1 - Binkowski, Felix A1 - Betz, Fridtjof A1 - Colom, Rémi A1 - Hammerschmidt, Martin A1 - Zschiedrich, Lin A1 - Burger, Sven T1 - Modal expansion of optical far-field quantities using quasinormal modes T2 - EPJ Web Conf. Y1 - 2020 U6 - https://doi.org/10.1051/epjconf/202023805007 VL - 238 SP - 05007 ER - TY - CHAP A1 - Colom, Rémi A1 - Binkowski, Felix A1 - Betz, Fridtjof A1 - Hammerschmidt, Martin A1 - Zschiedrich, Lin A1 - Burger, Sven T1 - Quasi-normal mode expansion as a tool for the design of nanophotonic devices T2 - EPJ Web Conf. Y1 - 2020 U6 - https://doi.org/10.1051/epjconf/202023805008 VL - 238 SP - 05008 ER - TY - JOUR A1 - Schneider, Philipp-Immanuel A1 - Srocka, Nicole A1 - Rodt, Sven A1 - Zschiedrich, Lin A1 - Reitzenstein, Stephan A1 - Burger, Sven T1 - Numerical optimization of the extraction efficiency of a quantum-dot based single-photon emitter into a single-mode fiber JF - Opt. Express Y1 - 2018 U6 - https://doi.org/10.1364/OE.26.008479 VL - 26 SP - 8479 ER - TY - JOUR A1 - Zschiedrich, Lin A1 - Binkowski, Felix A1 - Nikolay, Niko A1 - Benson, Oliver A1 - Kewes, Günter A1 - Burger, Sven T1 - Riesz-projection-based theory of light-matter interaction in dispersive nanoresonators JF - Phys. Rev. A Y1 - 2018 U6 - https://doi.org/10.1103/PhysRevA.98.043806 VL - 98 SP - 043806 ER - TY - CHAP A1 - Hiremath, Kirankumar A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Schmidt, Frank T1 - Finite elements based numerical solution of nonlocal hydrodynamic Drude model of nano-plasmonic scatterers T2 - 12th International Conference on Fiber Optics and Photonics Y1 - 2014 U6 - https://doi.org/10.1364/PHOTONICS.2014.M3D.4 SP - M3D.4 ER - TY - JOUR A1 - Żołnacz, Kinga A1 - Musiał, Anna A1 - Srocka, Nicole A1 - Große, Jan A1 - Schlösinger, Maximilian A1 - Schneider, Philipp-Immanuel A1 - Kravets, Oleh A1 - Mikulicz, Monika A1 - Olszewski, Jacek A1 - Poturaj, Krzysztof A1 - Wójcik, Grzegorz A1 - Mergo, Paweł A1 - Dybka, Kamil A1 - Dyrkacz, Mariusz A1 - Dłubek, Michał A1 - Rodt, Sven A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Sęk, Grzegorz A1 - Reitzenstein, Stephan A1 - Urbańczyk, Wacław T1 - Method for direct coupling of a semiconductor quantum dot to an optical fiber for single-photon source applications JF - Opt. Express Y1 - 2019 U6 - https://doi.org/10.1364/OE.27.026772 VL - 27 SP - 26772 ER - TY - CHAP A1 - Hammerschmidt, Martin A1 - Zschiedrich, Lin A1 - Schneider, Philipp-Immanuel A1 - Binkowski, Felix A1 - Burger, Sven T1 - Numerical optimization of resonant photonic devices T2 - Proc. SPIE Y1 - 2019 U6 - https://doi.org/10.1117/12.2534348 VL - 11057 SP - 1105702 ER - TY - JOUR A1 - Binkowski, Felix A1 - Zschiedrich, Lin A1 - Hammerschmidt, Martin A1 - Burger, Sven T1 - Modal analysis for nanoplasmonics with nonlocal material properties JF - Phys. Rev. B Y1 - 2019 U6 - https://doi.org/10.1103/PhysRevB.100.155406 VL - 100 SP - 155406 ER - TY - GEN A1 - Burger, Sven A1 - Klose, Roland A1 - Schädle, Achim A1 - Zschiedrich, Lin T1 - HelmPole - A finite element solver for scattering problems on unbounded domains: Implementation based on PML N2 - The solution of scattering problems described by the Helmholtz equation on unbounded domains is of importance for a wide variety of applications, for example in electromagnetics and acoustics. An implementation of a solver for scattering problems based on the programming language Matlab is introduced. The solver relies on the finite-element-method and on the perfectly-matched-layer-method, which allows for the simulation of scattering problems on complex geometries surrounded by inhomogeneous exterior domains. This report gives a number of detailed examples and can be understood as a user manual to the freely accessible code of the solver HelmPole. T3 - ZIB-Report - 03-38 KW - Helmholtz equation KW - finite element method KW - perfectly matched layer Y1 - 2003 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:0297-zib-7609 ER - TY - GEN A1 - Zschiedrich, Lin A1 - Klose, Roland A1 - Schädle, Achim A1 - Schmidt, Frank T1 - A new Finite Element realization of the Perfectly Matched Layer Method for Helmholtz scattering problems on polygonal domains in 2D N2 - In this paper we propose a new finite element realization of the Perfectly Matched Layer method (PML-method). Our approach allows to deal with arbitrary shaped polygonal domains and with certain types of inhomogeneous exterior domains. Among the covered inhomogeneities are open waveguide structures playing an essential role in integrated optics. We give a detailed insight to implementation aspects. Numerical examples show exponential convergence behavior to the exact solution with the thickness of the PML sponge layer. T3 - ZIB-Report - 03-44 KW - transparent boundary conditions KW - perfectly matched layer KW - pole condition Y1 - 2003 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:0297-zib-7662 ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank A1 - Evanschitzky, Peter A1 - Erdmann, Andreas ED - Kawahira, H. ED - Zurbrick, L. S. T1 - Benchmark of rigorous methods for electromagnetic field simulation T2 - Photomask Technology Y1 - 2008 UR - http://dx.doi.org/10.1117/12.801248 U6 - https://doi.org/10.1117/12.801248 VL - 7122 SP - 71221 PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Schmidt, Frank ED - Bodermann, Bernd T1 - Rigorous simulations of 3D patterns on extreme ultraviolet lithography masks T2 - Modelling Aspects in Optical Metrology III Y1 - 2011 U6 - https://doi.org/10.1117/12.889831 VL - 8083 SP - 80831B PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Schmidt, Frank A1 - Kato, Akiko A1 - Laubis, Christian A1 - Scholze, Frank T1 - Investigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical Simulations T2 - Photomask Technology 2011 Y1 - 2011 U6 - https://doi.org/10.1117/12.896839 VL - 8166 SP - 81661Q PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Pomplun, Jan A1 - Schmidt, Frank A1 - Zschiedrich, Lin T1 - Finite-element method simulations of high-Q nanocavities with 1D photonic bandgap T2 - Physics and Simulation of Optoelectronic Devices XIX Y1 - 2011 U6 - https://doi.org/10.1117/12.875044 VL - 7933 SP - 79330T PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin ED - Chigrin, Dmitry T1 - Numerical Investigation of Silicon-on-Insulator 1D Photonic Crystal Microcavities T2 - Theoretical and computational nanooptics Y1 - 2009 U6 - https://doi.org/10.1063/1.3253915 VL - 1176 SP - 43 EP - 45 PB - AIP ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Kettner, Benjamin A1 - Schmidt, Frank ED - Hergert, W. ED - Wriedt, T. T1 - FEM simulation of light scattering by nonspherical objects T2 - Mie Theory 1908 – 2008 Y1 - 2008 SP - 82 EP - 83 PB - Universität Bremen ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Klose, Roland A1 - Schädle, Achim A1 - Schmidt, Frank A1 - Enkrich, Christian A1 - Linden, S. A1 - Wegener, M. A1 - Soukoulis, C. ED - Szoplik, T. ED - Özbay, E. ED - Soukoulis, C. ED - Zheludev, N. T1 - Numerical Investigation of Light Scattering off Split-Ring Resonators T2 - Metamaterials Y1 - 2005 U6 - https://doi.org/10.1117/12.622184 VL - 5955 SP - 18 EP - 26 PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Schmidt, Frank A1 - Kettner, Benjamin A1 - Lockau, D. T1 - 3D Finite-Element Simulations of Enhanced Light Transmission Through Arrays of Holes in Metal Films T2 - Numerical Methods in Optical Metrology Y1 - 2009 U6 - https://doi.org/10.1117/12.827543 VL - 7390 SP - 73900H PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Schmidt, Frank T1 - Finite element method for accurate 3D simulation of plasmonic waveguides T2 - Integrated Optics: Devices, Materials, and Technologies XIV Y1 - 2010 U6 - https://doi.org/10.1117/12.841995 VL - 7604 SP - 76040F PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Schmidt, Frank T1 - JCMsuite: An Adaptive FEM Solver for Precise Simulations in Nano-Optics T2 - Integrated Photonics and Nanophotonics Research and Applications Y1 - 2008 U6 - https://doi.org/10.1364/IPNRA.2008.ITuE4 SP - ITuE4 PB - Optical Society of America ER - TY - JOUR A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - FEM Simulation of Plasmon Laser Resonances JF - AIP Conference Proceedings Y1 - 2010 U6 - https://doi.org/10.1063/1.3498131 VL - 1281 SP - 1613 EP - 1616 PB - AIP ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schädle, Achim A1 - Klose, Roland A1 - Kettner, Benjamin A1 - Pomplun, Jan A1 - Pollok, T. A1 - Schmidt, Frank T1 - Advanced FEM Analysis of Nano-Optical Devices T2 - Proc. Symposium on Photonics Technologies for the 7th Framework Programme Y1 - 2006 ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank A1 - Köhle, Roderick A1 - Henkel, Thomas A1 - Küchler, Bernd A1 - Nölscher, Christoph ED - Bosse, Harald T1 - 3D simulations of electromagnetic fields in nanostructures using the time-harmonic finite-element method T2 - Modeling Aspects in Optical Metrology Y1 - 2007 U6 - https://doi.org/10.1117/12.726236 VL - 6617 SP - 66170V PB - Proc. SPIE ER -