TY - CHAP A1 - Tyminski, Jacek A1 - Popescu, Raluca A1 - Burger, Sven A1 - Pomplun, Jan A1 - Zschiedrich, Lin A1 - Matsuyama, Tomoyuki A1 - Noda, Tomoya ED - Conley, W. T1 - Finite element models of lithographic mask topography T2 - Proc. SPIE Y1 - 2012 U6 - https://doi.org/10.1117/12.916957 VL - 8326 SP - 83261B ER -