TY - JOUR A1 - Schneider, Philipp-Immanuel A1 - Santiago, Xavier Garcia A1 - Soltwisch, Victor A1 - Hammerschmidt, Martin A1 - Burger, Sven A1 - Rockstuhl, Carsten T1 - Benchmarking five global optimization approaches for nano-optical shape optimization and parameter reconstruction JF - ACS Photonics Y1 - 2019 U6 - https://doi.org/10.1021/acsphotonics.9b00706 VL - 6 SP - 2726 ER - TY - JOUR A1 - Pflüger, Mika A1 - Kline, R. Joseph A1 - Fernández Herrero, Analia A1 - Hammerschmidt, Martin A1 - Soltwisch, Victor A1 - Krumrey, Michael T1 - Extracting dimensional parameters of gratings produced with self-aligned multiple patterning using grazing-incidence small-angle x-ray scattering JF - J. Micro Nanolithogr. MEMS MOEMS Y1 - 2020 U6 - https://doi.org/10.1117/1.JMM.19.1.014001 VL - 19 SP - 014001 ER - TY - JOUR A1 - Soltwisch, Victor A1 - Burger, Sven A1 - Scholze, Frank T1 - Scatterometry sensitivity analysis for conical diffraction versus in-plane diffraction geometry with respect to the side wall angle JF - Proc. SPIE Y1 - 2013 U6 - https://doi.org/10.1117/12.2020487 VL - 8789 SP - 878905 ER - TY - JOUR A1 - Soltwisch, Victor A1 - Haase, Anton A1 - Wernecke, Jan A1 - Probst, Jürgen A1 - Schoengen, Max A1 - Burger, Sven A1 - Krumrey, Michael A1 - Scholze, Frank T1 - Correlated diffuse x-ray scattering from periodically nanostructured surfaces JF - Phys. Rev. B Y1 - 2016 U6 - https://doi.org/10.1103/PhysRevB.94.035419 VL - 94 SP - 035419 ER - TY - JOUR A1 - Andrle, Anna A1 - Hönicke, Philipp A1 - Schneider, Philipp-Immanuel A1 - Kayser, Yves A1 - Hammerschmidt, Martin A1 - Burger, Sven A1 - Scholze, Frank A1 - Beckhoff, Burkhard A1 - Soltwisch, Victor T1 - Grazing incidence x-ray fluorescence based characterization of nanostructures for element sensitive profile reconstruction JF - Proc. SPIE Y1 - 2019 U6 - https://doi.org/10.1117/12.2526082 VL - 11057 SP - 110570M ER - TY - CHAP A1 - Agcos, Emil A1 - Bodermann, Bernd A1 - Burger, Sven A1 - Dai, Gaoliang A1 - Endres, Johannes A1 - Hansen, Poul-Erik A1 - Nielson, Lars A1 - Madsen, Morten A1 - Heidenreich, Sebastian A1 - Krumrey, Michael A1 - Loechel, Bernd A1 - Probst, Jürgen A1 - Scholze, Frank A1 - Soltwisch, Victor A1 - Wurm, Matthias T1 - Scatterometry reference standards to improve tool matching and traceability in lithographical nanomanufacturing T2 - Proc. SPIE Y1 - 2015 U6 - https://doi.org/10.1117/12.2190409 VL - 9556 SP - 955610 ER - TY - CHAP A1 - Scholze, Frank A1 - Bodermann, Bernd A1 - Burger, Sven A1 - Endres, Johannes A1 - Haase, Anton A1 - Krumrey, Michael A1 - Laubis, Christian A1 - Soltwisch, Victor A1 - Ullrich, Albrecht A1 - Wernecke, Jan T1 - Determination of line profiles on photomasks using DUV, EUV and X-ray scattering T2 - Proc. SPIE Y1 - 2014 U6 - https://doi.org/10.1117/12.2065941 VL - 9231 SP - 92310M ER - TY - CHAP A1 - Soltwisch, Victor A1 - Wernecke, Jan A1 - Haase, Anton A1 - Probst, Jürgen A1 - Schoengen, Max A1 - Scholze, Frank A1 - Pomplun, Jan A1 - Burger, Sven T1 - Determination of line profile on nanostructured surfaces using EUV and x-ray scattering T2 - Proc. SPIE Y1 - 2014 U6 - https://doi.org/10.1117/12.2066165 VL - 9235 SP - 92351D ER - TY - GEN A1 - Pflüger, Mika A1 - Kline, R Joseph A1 - Fernández Herrero, Analía A1 - Hammerschmidt, Martin A1 - Soltwisch, Victor A1 - Krumrey, Michael T1 - Extracting dimensional parameters of gratings produced with self-aligned multiple patterning using grazing-incidence small-angle x-ray scattering [Source Code] Y1 - 2020 U6 - https://doi.org/10.24433/CO.0953516.v2 ER - TY - CHAP A1 - Hammerschmidt, Martin A1 - Plock, Matthias A1 - Burger, Sven A1 - Truong, Vinh A1 - Soltwisch, Victor A1 - Schneider, Philipp-Immanuel T1 - Machine learning approach for full Bayesian parameter reconstruction T2 - Proc. SPIE Y1 - 2025 U6 - https://doi.org/10.1117/12.3062268 VL - 13568 SP - 1356806 ER - TY - JOUR A1 - Andrle, Anna A1 - Hönicke, Philipp A1 - Gwalt, Grzegorz A1 - Schneider, Philipp-Immanuel A1 - Kayser, Yves A1 - Siewert, Frank A1 - Soltwisch, Victor T1 - GIXRF and machine learning as metrological tools for shape and element sensitive reconstructions of periodic nanostructures JF - Proc. SPIE Y1 - 2021 U6 - https://doi.org/10.1117/12.2586082 VL - 11611 SP - 116110R ER - TY - JOUR A1 - Andrle, Anna A1 - Hönicke, Philipp A1 - Gwalt, Grzegorz A1 - Schneider, Philipp-Immanuel A1 - Kayser, Yves A1 - Siewert, Frank A1 - Soltwisch, Victor T1 - Shape- and Element-Sensitive Reconstruction of Periodic Nanostructures with Grazing Incidence X-ray Fluorescence Analysis and Machine Learning JF - Nanomaterials Y1 - 2021 U6 - https://doi.org/10.3390/nano11071647 VL - 11 SP - 1647 ER -