TY - JOUR A1 - Siefke, Thomas A1 - Hurtado, Carol A1 - Dickmann, Johannes A1 - Dickmann, Walter A1 - Käseberg, Tim A1 - Meyer, Jan A1 - Burger, Sven A1 - Zeitner, Uwe A1 - Bodermann, Bernd A1 - Kroker, Stefanie T1 - Quasi-bound states in the continuum for deep subwavelength structural information retrieval for DUV nano-optical polarizers JF - Opt. Express Y1 - 2020 U6 - https://doi.org/10.1364/OE.396044 VL - 28 SP - 23122 ER - TY - CHAP A1 - Mukherjee, Deshabrato A1 - Burger, Sven A1 - Siefke, Thomas A1 - Gour, Jeetendra A1 - Bodermann, Bernd A1 - Petrik, Peter T1 - Modeling of dimensions and sensing properties of gold gratings by spectroscopic ellipsometry and finite element method T2 - EPJ Web of Conferences Y1 - 2024 U6 - https://doi.org/10.1051/epjconf/202430902016 VL - 309 SP - 02016 ER - TY - JOUR A1 - Mukherjee, Deshabrato A1 - Burger, Sven A1 - Siefke, Thomas A1 - Gour, Jeetendra A1 - Bodermann, Bernd A1 - Petrik, Peter T1 - Spectroscopic Ellipsometry of Plasmonic Gratings─Ideal Parameters for Sensing and Subpicometer Measurement Uncertainty JF - ACS Omega Y1 - 2025 U6 - https://doi.org/10.1021/acsomega.5c00951 VL - 10 IS - 14 SP - 14466 EP - 14473 ER -