TY - CHAP A1 - Bodermann, Bernd A1 - Hansen, Poul-Erik A1 - Burger, Sven A1 - Henn, Mark-Alexander A1 - Gross, Hermann A1 - Bär, Markus A1 - Scholze, Frank A1 - Endres, Johannes A1 - Wurm, Matthias T1 - First steps towards a scatterometry reference standard T2 - Proc. SPIE Y1 - 2012 U6 - https://doi.org/10.1117/12.929903 VL - 8466 SP - 84660E ER - TY - JOUR A1 - Kato, Akiko A1 - Burger, Sven A1 - Scholze, Frank T1 - Analytical modeling and 3D finite element simulation of line edge roughness in scatterometry JF - Appl. Optics Y1 - 2012 U6 - https://doi.org/10.1364/AO.51.006457 VL - 51 SP - 6457 EP - 6464 ER -