TY - JOUR A1 - Gschrey, Manuel A1 - Thoma, Alexander A1 - Schnauber, Peter A1 - Seifried, Marc A1 - Schmidt, Ronny A1 - Wohlfeil, Benjamin A1 - Krüger, Luzy A1 - Schulze, Jan-Hindrick A1 - Heindel, Tobias A1 - Burger, Sven A1 - Schmidt, Frank A1 - Strittmatter, Andre A1 - Rodt, Sven A1 - Reitzenstein, Stephan T1 - Highly indistinguishable photons from deterministic quantum-dot microlenses utilizing three-dimensional in situ electron-beam lithography JF - Nature Communications Y1 - 2015 U6 - https://doi.org/10.1038/ncomms8662 VL - 6 SP - 7662 ER - TY - CHAP A1 - Thoma, Alexander A1 - Schnauber, Peter A1 - Gschrey, Manuel A1 - Schmidt, Ronny A1 - Wohlfeil, Benjamin A1 - Seifried, Marc A1 - Schulze, Jan-Hindrick A1 - Burger, Sven A1 - Schmidt, Frank A1 - Strittmatter, Andre A1 - Rodt, Sven A1 - Heindel, Tobias A1 - Reitzenstein, Stephan T1 - Indistinguishable Photons from Deterministically Fabricated Quantum Dot Microlenses T2 - Advanced Photonics Y1 - 2015 U6 - https://doi.org/10.1364/IPRSN.2015.IS4A.6 SP - IS4A.6 ER - TY - CHAP A1 - Gschrey, Manuel A1 - Seifried, Marc A1 - Krüger, Luzy A1 - Schmidt, Ronny A1 - Schulze, Jan-Hindrick A1 - Heindel, Tobias A1 - Burger, Sven A1 - Rodt, Sven A1 - Schmidt, Frank A1 - Strittmatter, Andre A1 - Reitzenstein, Stephan T1 - Advanced Quantum Light Sources: Modelling and Realization by Deterministic Nanofabrication Technologies T2 - Integrated Photonics Research, Silicon and Nanophotonics Y1 - 2014 U6 - https://doi.org/10.1364/IPRSN.2014.IW1A.3 VL - IPRSN SP - IW1A.3 ER - TY - CHAP A1 - Gschrey, Manuel A1 - Seifried, Marc A1 - Krüger, Luzy A1 - Schmidt, Ronny A1 - Schulze, Jan-Hindrick A1 - Heindel, Tobias A1 - Burger, Sven A1 - Rodt, Sven A1 - Schmidt, Frank A1 - Strittmatter, Andre A1 - Reitzenstein, Stephan T1 - Boosting the photon-extraction efficiency of nanophotonic structures by deterministic microlenses T2 - CLEO: 2014 Y1 - 2014 U6 - https://doi.org/10.1364/CLEO_QELS.2014.FF2K.2 SP - FF2K.2 PB - Optical Society of America ER - TY - GEN A1 - Amiranashvili, Shalva A1 - Bandelow, Uwe A1 - Blome, Mark A1 - Burger, Sven A1 - Schmidt, Frank A1 - Schmidt, Kersten A1 - Zschiedrich, Lin ED - Deuflhard, Peter ED - et al., T1 - Nanophotonics and nonlinear fiber optics T2 - MATHEON-Mathematics for Key Technologies Y1 - 2014 U6 - https://doi.org/10.4171/137 VL - 1 SP - 257 EP - 275 PB - European Mathematical Society ER - TY - CHAP A1 - Thoma, Alexander A1 - Schnauber, Peter A1 - Gschrey, Manuel A1 - Schmidt, Ronny A1 - Wohlfeil, Benjamin A1 - Seifried, Marc A1 - Schulze, Jan-Hindrick A1 - Burger, Sven A1 - Schmidt, Frank A1 - Strittmatter, Andre A1 - Rodt, Sven A1 - Heindel, Tobias A1 - Reitzenstein, Stephan T1 - Indistinguishable Photons from Deterministic Quantum Dot Microlenses T2 - European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference Y1 - 2015 U6 - https://doi.org/10.1364/IPRSN.2015.IS4A.6 SP - EA_8_5 ER - TY - CHAP A1 - Scholze, Frank A1 - Laubis, Christian A1 - Ulm, Gerhard A1 - Dersch, Uwe A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank ED - Schellenberg, Frank T1 - Evaluation of EUV scatterometry for CD characterization of EUV masks using rigorous FEM-simulation T2 - Emerging Lithographic Technologies XII Y1 - 2008 VL - 6921 PB - SPIE ER - TY - CHAP A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank A1 - Scholze, Frank A1 - Laubis, Christian A1 - Dersch, Uwe ED - Horiuchi, Toshiyuki T1 - Metrology of EUV masks by EUV-scatterometry and finite element analysis T2 - Photomask and Next-Generation Lithography Mask Technology XV Y1 - 2008 VL - 7028 PB - SPIE ER - TY - CHAP A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank A1 - Zschiedrich, Lin A1 - Scholze, Frank ED - Martin, P. ED - Naber, R. T1 - Rigorous FEM-Simulation of EUV-Masks: Influence of shape and material parameters T2 - Photomask Technology Y1 - 2006 U6 - https://doi.org/10.1117/12.686828 VL - 6349 SP - 63493D PB - Proc. SPIE ER - TY - CHAP A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank A1 - Scholze, Frank A1 - Laubis, Christian A1 - Dersch, Uwe ED - Bosse, Harald T1 - Finite element analysis of EUV lithography T2 - Modeling Aspects in Optical Metrology Y1 - 2007 U6 - https://doi.org/10.1117/12.726156 VL - 6617 SP - 661718 PB - Proc. SPIE ER - TY - CHAP A1 - Scholze, Frank A1 - Laubis, Christian A1 - Dersch, Uwe A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank ED - Bosse, Harald T1 - The influence of line edge roughness and CD uniformity on EUV scatterometry for CD characterization of EUV masks T2 - Modeling Aspects in Optical Metrology Y1 - 2007 VL - 6617 SP - 66171A PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Schmidt, Frank A1 - Kato, Akiko A1 - Laubis, Christian A1 - Scholze, Frank T1 - Investigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical Simulations T2 - Photomask Technology 2011 Y1 - 2011 U6 - https://doi.org/10.1117/12.896839 VL - 8166 SP - 81661Q PB - Proc. SPIE ER - TY - GEN A1 - Schädle, Achim A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Klose, Roland A1 - Schmidt, Frank T1 - Domain Decomposition Method for Maxwell's Equations: Scattering off Periodic Structures N2 - We present a domain decomposition approach for the computation of the electromagnetic field within periodic structures. We use a Schwarz method with transparent boundary conditions at the interfaces of the domains. Transparent boundary conditions are approximated by the perfectly matched layer method (PML). To cope with Wood anomalies appearing in periodic structures an adaptive strategy to determine optimal PML parameters is developed. We focus on the application to typical EUV lithography line masks. Light propagation within the multi-layer stack of the EUV mask is treated analytically. This results in a drastic reduction of the computational costs and allows for the simulation of next generation lithography masks on a standard personal computer. T3 - ZIB-Report - 06-04 KW - domain decomposition KW - conical diffraction KW - electro-magnetic scattering KW - Maxwell's equations KW - Lithography KW - finite elements Y1 - 2006 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:0297-zib-8984 ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Schmidt, Frank T1 - Finite-element based electromagnetic field simulations: Benchmark results for isolated structures T2 - Proc. SPIE Y1 - 2013 U6 - https://doi.org/10.1117/12.2026213 VL - 8880 SP - 88801Z ER - TY - CHAP A1 - Pomplun, Jan A1 - Burger, Sven A1 - Rozova, Maria A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - Finite element simulation of optical modes in VCSELs T2 - Numerical Simulation of Optoelectronic Devices (NUSOD), 11th International Conference on Y1 - 2011 U6 - https://doi.org/10.1109/NUSOD.2011.6041170 SP - 119 EP - 120 ER - TY - CHAP A1 - Zschiedrich, Lin A1 - Schmidt, Frank A1 - Pomplun, Jan A1 - Burger, Sven T1 - Finite elements for nano-optics applications T2 - Proc. Europ. Opt. Soc. Ann. Meet. 2016 (EOSAM) Y1 - 2016 SN - 978-1-5108-4796-5 SP - 178 ER - TY - CHAP A1 - Barth, Carlo A1 - Roder, Sebastian A1 - Brodoceanu, Daniel A1 - Kraus, Tobias A1 - Burger, Sven A1 - Hammerschmidt, Martin A1 - Schmidt, Frank A1 - Becker, Christiane T1 - Increased fluorescence of PbS quantum dots on photonic crystal slab structures T2 - Proc. Europ. Opt. Soc. Ann. Meet. 2016 (EOSAM) Y1 - 2016 SN - 978-1-5108-4796-5 SP - 181 ER - TY - CHAP A1 - Hammerschmidt, Martin A1 - Barth, Carlo A1 - Burger, Sven A1 - Becker, Christiane A1 - Schmidt, Frank T1 - Determining 2D photonic crystal geometries from reflectance spectra with a reduced basis method T2 - Proc. Europ. Opt. Soc. Ann. Meet. 2016 (EOSAM) Y1 - 2016 SN - 978-1-5108-4796-5 SP - 281 ER - TY - CHAP A1 - Becker, Christiane A1 - Xavier, Jolly A1 - Preidel, Veit A1 - Wyss, Philippe A1 - Sontheimer, Tobias A1 - Rech, Bernd A1 - Probst, Jürgen A1 - Hülsen, Christoph A1 - Löchel, Bernd A1 - Erko, Alexei A1 - Burger, Sven A1 - Schmidt, Frank A1 - Back, Franziska A1 - Rudigier-Voigt, Eveline T1 - Nanophotonic light trapping in polycrystalline silicon thin-film solar cells using periodically nanoimprint-structured glass substrates T2 - Proc. SPIE Y1 - 2013 U6 - https://doi.org/10.1117/12.2023871 VL - 8824 SP - 88240D ER - TY - CHAP A1 - Manley, Phillip A1 - Burger, Sven A1 - Schmidt, Frank A1 - Schmid, Martina ED - Sakabe, Shuji ED - Lienau, Christoph ED - Grunwald, Rüdiger T1 - Design Principles for Plasmonic Nanoparticle Devices T2 - Progress in Nonlinear Nano-Optics Y1 - 2015 UR - http://www.springer.com/978-3-319-12216-8 U6 - https://doi.org/10.1007/978-3-319-12217-5_13 VL - XXI SP - 223 EP - 247 PB - Springer ET - Nano-Optics and Nanophotonics ER - TY - JOUR A1 - Ledentsov, Jr., Nikolay A1 - Shchukin, Vitaly A1 - Kropp, Jörg-R. A1 - Zschiedrich, Lin A1 - Schmidt, Frank A1 - Ledentsov, Jr., Nikolay T1 - Resonant cavity light–emitting diodes based on dielectric passive cavity structures JF - Proc. SPIE Y1 - 2017 U6 - https://doi.org/10.1117/12.2253089 VL - 10124 SP - 101240O ER - TY - CHAP A1 - Hammerschmidt, Martin A1 - Lockau, Daniel A1 - Burger, Sven A1 - Schmidt, Frank A1 - Schwanke, Christoph A1 - Kirner, Simon A1 - Calnan, Sonya A1 - Stannowski, Bernd A1 - Rech, Bernd T1 - 3D optical modeling of thin-film a-Si/mc-Si tandem solar cells with random textured interfaces using FEM T2 - Renewable Energy and the Environment Optics and Photonics Congress Y1 - 2012 U6 - https://doi.org/10.1364/E2.2012.JM5A.15 SP - JM5A.15 PB - Optical Society of America ER - TY - JOUR A1 - Hiremath, Kirankumar A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - Numerical solution of nonlocal hydrodynamic Drude model for arbitrary shaped nano-plasmonic structures using Nedelec finite elements JF - J. Comp. Phys. Y1 - 2012 U6 - https://doi.org/10.1016/j.jcp.2012.05.013 VL - 231 IS - 17 SP - 5890 EP - 5896 ER - TY - CHAP A1 - Hohage, Thorsten A1 - Schmidt, Frank A1 - Zschiedrich, Lin ED - Michielsen, Bas ED - Decavèle, Francine T1 - A new method for the solution of scattering problems T2 - Proceedings of the JEE’02 Symposium Y1 - 2002 SP - 251 EP - 256 PB - ONERA CY - Toulouse ER - TY - JOUR A1 - Hohage, Thorsten A1 - Schmidt, Frank A1 - Zschiedrich, Lin T1 - Solving Time-Harmonic Scattering Problems Based on the Pole Condition I: Theory JF - SIAM J. Math. Anal. Y1 - 2003 U6 - https://doi.org/10.1137/S0036141002406473 VL - 35 IS - 1 SP - 183 EP - 210 ER - TY - JOUR A1 - Hohage, Thorsten A1 - Schmidt, Frank A1 - Zschiedrich, Lin T1 - Solving Time-Harmonic Scattering Problems Based on the Pole Condition II: Convergence of the PML Method JF - SIAM J. Math. Anal. Y1 - 2003 U6 - https://doi.org/10.1137/S0036141002406485 VL - 35 IS - 3 SP - 547 EP - 560 ER - TY - CHAP A1 - Friese, T. A1 - Deuflhard, Peter A1 - Schmidt, Frank ED - Lai, Choi-Hong ED - Bjørstad, Petter E. ED - Cross, Mark ED - Widlund, Olof T1 - A Multigrid Method for the Complex Helmholtz Eigenvalue Problem T2 - Procs. Eleventh International Conference on Domain Decomposition Methods in Sciences and Engineering (DD11), UK Y1 - 1999 SP - 19 EP - 26 PB - DDM.org ER - TY - JOUR A1 - Friese, T. A1 - Schmidt, Frank A1 - Yevick, David T1 - Transparent boundary conditions for a wide-angle approximation of the one-way Helmholtz equation JF - J. Comput. Phys. Y1 - 2000 U6 - https://doi.org/10.1006/jcph.2000.6637 VL - 165 IS - 2 SP - 645 EP - 659 ER - TY - JOUR A1 - Enkrich, Christian A1 - Wegener, M. A1 - Linden, S. A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank A1 - Zhou, C. A1 - Koschny, T. A1 - Soukoulis, C. T1 - Magnetic metamaterials at telecommunication and visible frequencies JF - Phys. Rev. Lett. Y1 - 2005 U6 - https://doi.org/10.1103/PhysRevLett.95.203901 VL - 95 SP - 203901 ER - TY - JOUR A1 - Linden, S. A1 - Enkrich, Christian A1 - Dolling, G. A1 - Klein, M. A1 - Zhou, J. A1 - Koschny, T. A1 - Soukoulis, C. A1 - Burger, Sven A1 - Schmidt, Frank A1 - Wegener, M. T1 - Photonic metamaterials: Magnetism at Optical Frequencies JF - IEEE Journal of Selected Topics in Quantum Electronics Y1 - 2006 U6 - https://doi.org/10.1109/JSTQE.2006.880600 VL - 12 IS - 6 SP - 1097 EP - 1105 ER - TY - CHAP A1 - Lockau, D. A1 - Zschiedrich, Lin A1 - Schmidt, Frank A1 - Burger, Sven A1 - Rech, Bernd T1 - Efficient simulation of plasmonic structures for solar cells T2 - International Workshop on Optical Waveguide Theory and Numerical Modelling Y1 - 2009 VL - XVIII SP - 48 PB - Fraunhofer Institute for Applied Optics and Precision Engineering ER - TY - CHAP A1 - Lockau, D. A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Schmidt, Frank A1 - Ruske, F. A1 - Rech, Bernd T1 - Rigorous optical simulation of light management in crystalline silicon thin film solar cells with rough interface textures T2 - Physics and Simulation of Optoelectronic Devices XIX Y1 - 2011 U6 - https://doi.org/10.1117/12.874967 VL - 7933 SP - 79330M PB - Proc. SPIE ER - TY - JOUR A1 - Karl, M. A1 - Kettner, Benjamin A1 - Burger, Sven A1 - Schmidt, Frank A1 - Kalt, H. A1 - Hetterich, M. T1 - Dependencies of micro-pillar cavity quality factors calculated with finite element methods JF - Optics Express Y1 - 2009 UR - http://dx.doi.org/10.1364/OE.17.001144 U6 - https://doi.org/10.1364/OE.17.001144 VL - 17 SP - 1144 ER - TY - CHAP A1 - Kettner, Benjamin A1 - Schmidt, Frank T1 - The pole condition as transparent boundary condition for resonance problems T2 - Physics and Simulation of Optoelectronic Devices XIX Y1 - 2011 U6 - https://doi.org/10.1117/12.874752 VL - 7933 SP - 79331B PB - Proc. SPIE ER - TY - CHAP A1 - Klose, Roland A1 - Burger, Sven A1 - Schmidt, Frank A1 - Zschiedrich, Lin T1 - A multilevel method for the computation of eigenmodes in 3D photonic crystals T2 - Proceedings of the 5th International Conference on Numerical Simulation of Optoelectronic Devices Y1 - 2005 U6 - https://doi.org/10.1109/NUSOD.2005.1518135 SP - 61 EP - 62 ER - TY - CHAP A1 - Kleemann, B. A1 - Kurz, J. A1 - Hetzler, J. A1 - Pomplun, Jan A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - Fast online inverse scattering with Reduced Basis Method (RBM) for a 3D phase grating with specific line roughness T2 - Modelling Aspects in Optical Metrology III Y1 - 2011 U6 - https://doi.org/10.1117/12.889364 VL - 8083 SP - 808309 PB - Proc. SPIE ER - TY - JOUR A1 - Pomplun, Jan A1 - Schmidt, Frank T1 - Accelerated a posteriori error estimation for the reduced basis method with application to 3D electromagnetic scattering problems JF - SIAM J. Sci. Comput. Y1 - 2010 U6 - https://doi.org/10.1137/090760271 VL - 32 SP - 498 EP - 520 ER - TY - CHAP A1 - Pomplun, Jan A1 - Schmidt, Frank T1 - Reduced basis method for fast and robust simulation of electromagnetic scattering problems T2 - Numerical Methods in Optical Metrology Y1 - 2009 U6 - https://doi.org/10.1117/12.827588 VL - 7390 SP - 73900I PB - Proc. SPIE ER - TY - CHAP A1 - Pomplun, Jan A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Schmidt, Frank T1 - Reduced basis method for computational lithography T2 - Photomask Technology Y1 - 2009 U6 - https://doi.org/10.1117/12.829639 VL - 7488 SP - 74882B PB - Proc. SPIE ER - TY - CHAP A1 - Schmidt, Frank A1 - Yevick, David T1 - Discrete Transparent Boundary Conditions for the Fresnel Equation T2 - Proceedings of the 8th European Conference on Integrated Optics Y1 - 1997 SP - 222 EP - 225 CY - Royal Institute of Technology, Stockholm, Sweden ER - TY - JOUR A1 - Schädle, Achim A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Klose, Roland A1 - Schmidt, Frank T1 - Domain Decomposition Method for Maxwell’s Equations JF - J. Comput. Phys. Y1 - 2007 U6 - https://doi.org/10.1016/j.jcp.2007.04.017 VL - 226 SP - 477 EP - 493 ER - TY - JOUR A1 - Schlosser, Felix A1 - Schoth, Mario A1 - Burger, Sven A1 - Schmidt, Frank A1 - Knorr, Andreas A1 - Mukamel, S. A1 - Richter, Marten T1 - Ultrafast nonlinear spectroscopy with spatially confined fields JF - AIP Conference Proceedings Y1 - 2011 U6 - https://doi.org/10.1063/1.3644223 VL - 1398 SP - 94 EP - 96 PB - AIP ER - TY - CHAP A1 - Schlosser, Felix A1 - Schoth, Mario A1 - Burger, Sven A1 - Schmidt, Frank A1 - Knorr, Andreas A1 - Mukamel, Shaul A1 - Richter, Marten T1 - Coherent Nonlinear Spectroscopy with Spatiotemporally Controlled Fields T2 - CLEO/QELS Y1 - 2012 U6 - https://doi.org/10.1364/QELS.2012.QF3D.6 SP - QF3D.6 PB - Optical Society of America ER - TY - CHAP A1 - Schlosser, Felix A1 - Schoth, Mario A1 - Hiremath, Kirankumar A1 - Burger, Sven A1 - Schmidt, Frank A1 - Knorr, Andreas A1 - Mukamel, Shaul A1 - Richter, Marten T1 - Combining nanooptical fields and coherent spectroscopy on systems with delocalized excitons T2 - Proc. SPIE Y1 - 2012 U6 - https://doi.org/10.1117/12.906671 VL - 8260 SP - 82601V ER - TY - CHAP A1 - Schmidt, Frank A1 - Pomplun, Jan A1 - Zschiedrich, Lin A1 - Burger, Sven T1 - Fast online simulation of 3D nanophotonic structures by the reduced basis method T2 - Integrated Optics: Devices, Materials, and Technologies XV Y1 - 2011 U6 - https://doi.org/10.1117/12.874726 VL - 7941 SP - 79410G PB - Proc. SPIE ER - TY - CHAP A1 - Schmidt, Frank ED - G. C. Righini, D. T1 - Phase-adaptive basis functions for a multilevel finite element solution of the paraxial wave equation T2 - Euro-Opto Series Y1 - 1994 SP - 57 EP - 61 CY - Lindau, Germany ER - TY - JOUR A1 - Schmidt, Frank T1 - Computation of Discrete Transparent Boundary Conditions for the 2D Helmholtz equation JF - Optical and Quantum Electronics Y1 - 1998 VL - 30 IS - 5,6 SP - 427 EP - 441 ER - TY - CHAP A1 - Schmidt, Frank T1 - Simulation of Scattering and Reflection Problems via Solution of the 2D Helmholtz Equation T2 - Integrated Photonics Research Y1 - 1998 VL - 4 SP - 408 EP - 410 ER - TY - JOUR A1 - Schmidt, Frank T1 - Construction of Discrete Transparent Boundary Conditions for Schrödinger-Type equations JF - Surv. Math. Ind. Y1 - 1999 VL - 9 SP - 87 EP - 100 ER - TY - JOUR A1 - Schmidt, Frank A1 - Friese, T. A1 - Yevick, David T1 - Transparent Boundary Conditions for Split-Step Padé Approximations of the One-Way Helmholtz equation JF - J. Comp. Phys Y1 - 2001 VL - 170 SP - 696 EP - 719 ER - TY - CHAP A1 - Schmidt, Frank A1 - Friese, T. A1 - Zschiedrich, Lin A1 - Deuflhard, Peter T1 - Adaptive Multigrid Methods for the Vectorial Maxwell Eigenvalue Problem for Optical Waveguide Design T2 - Mathematics - Key Technology for the Future Y1 - 2003 UR - http://www.zib.de/Publications/Reports/ZR-00-54.pdf SP - 270 EP - 292 PB - Springer ER - TY - JOUR A1 - Schmidt, Frank A1 - Hohage, Thorsten A1 - Klose, Roland A1 - Schädle, Achim A1 - Zschiedrich, Lin T1 - Pole condition: A numerical method for Helmholtz-type scattering problems with inhomogeneous exterior domain JF - J. Comput. Appl. Math. Y1 - 2008 U6 - https://doi.org/10.1016/j.cam.2007.04.046 VL - 218 IS - 1 SP - 61 EP - 69 ER -