TY - CHAP A1 - Mukherjee, Deshabrato A1 - Burger, Sven A1 - Siefke, Thomas A1 - Gour, Jeetendra A1 - Bodermann, Bernd A1 - Petrik, Peter T1 - Modeling of dimensions and sensing properties of gold gratings by spectroscopic ellipsometry and finite element method T2 - EPJ Web of Conferences Y1 - 2024 U6 - https://doi.org/10.1051/epjconf/202430902016 VL - 309 SP - 02016 ER -