TY - JOUR A1 - Petrik, Peter A1 - Kumar, Nitish A1 - Fried, Miklos A1 - Fodor, Bálint A1 - Juhász, György A1 - Pereira, Silvania A1 - Burger, Sven A1 - Urbach, H. Paul T1 - Fourier ellipsometry – an ellipsometric approach to Fourier scatterometry JF - J. Eur. Opt. Soc.-Rapid Y1 - 2015 U6 - https://doi.org/10.2971/jeos.2015.15002 VL - 10 SP - 15002 ER -