TY - JOUR A1 - Plock, Matthias A1 - Hammerschmidt, Martin A1 - Burger, Sven A1 - Schneider, Philipp-Immanuel A1 - Schütte, Christof T1 - Impact Study of Numerical Discretization Accuracy on Parameter Reconstructions and Model Parameter Distributions JF - Metrologia N2 - In optical nano metrology numerical models are used widely for parameter reconstructions. Using the Bayesian target vector optimization method we fit a finite element numerical model to a Grazing Incidence x-ray fluorescence data set in order to obtain the geometrical parameters of a nano structured line grating. Gaussian process, stochastic machine learning surrogate models, were trained during the reconstruction and afterwards sampled with a Markov chain Monte Carlo sampler to determine the distribution of the reconstructed model parameters. The numerical discretization parameters of the used finite element model impact the numerical discretization error of the forward model. We investigated the impact of the polynomial order of the finite element ansatz functions on the reconstructed parameters as well as on the model parameter distributions. We showed that such a convergence study allows to determine numerical parameters which allows for efficient and accurate reconstruction results. Y1 - 2023 U6 - https://doi.org/10.1088/1681-7575/ace4cd VL - 60 SP - 054001 ER - TY - CHAP A1 - Plock, Matthias A1 - Burger, Sven A1 - Schneider, Philipp-Immanuel T1 - Efficient reconstruction of model parameters using Bayesian target-vector optimization T2 - Proc. SPIE Y1 - 2023 U6 - https://doi.org/10.1117/12.2673590 VL - PC12619 SP - PC1261905 ER - TY - JOUR A1 - Plock, Matthias A1 - Andrle, Kas A1 - Burger, Sven A1 - Schneider, Philipp-Immanuel T1 - Bayesian Target-Vector Optimization for Efficient Parameter Reconstruction JF - Adv. Theory Simul. Y1 - 2022 U6 - https://doi.org/10.1002/adts.202200112 VL - 5 SP - 2200112 ER - TY - GEN A1 - Plock, Matthias A1 - Andrle, Kas A1 - Burger, Sven A1 - Schneider, Philipp-Immanuel T1 - Research data and example scripts for the paper "Bayesian Target-Vector Optimization for Efficient Parameter Reconstruction" T2 - Zenodo Y1 - 2022 U6 - https://doi.org/10.5281/zenodo.6359594 ER - TY - JOUR A1 - Plock, Matthias A1 - Burger, Sven A1 - Schneider, Philipp-Immanuel T1 - Recent advances in Bayesian optimization with applications to parameter reconstruction in optical nano-metrology JF - Proc. SPIE Y1 - 2021 U6 - https://doi.org/10.1117/12.2592266 VL - 11783 SP - 117830J ER -