TY - JOUR A1 - Plock, Matthias A1 - Burger, Sven A1 - Schneider, Philipp-Immanuel T1 - Recent advances in Bayesian optimization with applications to parameter reconstruction in optical nano-metrology JF - Proc. SPIE Y1 - 2021 U6 - https://doi.org/10.1117/12.2592266 VL - 11783 SP - 117830J ER -