TY - CHAP A1 - Zschiedrich, Lin A1 - Greiner, Horst A1 - Pomplun, Jan A1 - Hammerschmidt, Martin A1 - Burger, Sven A1 - Schmidt, Frank T1 - FEM simulations of light extraction from nanostructured organic light-emitting diodes T2 - Renewable Energy and the Environment Optics and Photonics Congress Y1 - 2012 U6 - https://doi.org/10.1364/SOLED.2012.LT2B.5 SP - LT2B.5 PB - Optical Society of America ER - TY - CHAP A1 - Zschiedrich, Lin A1 - Betz, Fridtjof A1 - Binkowski, Felix A1 - Kuen, Lilli A1 - Hammerschmidt, Martin A1 - Burger, Sven T1 - Efficient Photonic Component Analysis via AAA Rational Approximation T2 - 2025 International Conference on Numerical Simulation of Optoelectronic Devices (NUSOD) Y1 - 2025 U6 - https://doi.org/10.1109/NUSOD64393.2025.11199710 SP - 115 EP - 116 ER - TY - JOUR A1 - Torun, Cem Güney A1 - Schneider, Philipp-Immanuel A1 - Hammerschmidt, Martin A1 - Burger, Sven A1 - Munns, Joseph H.D. A1 - Schröder, Tim T1 - Optimized diamond inverted nanocones for enhanced color center to fiber coupling JF - Appl. Phys. Lett. Y1 - 2021 U6 - https://doi.org/10.1063/5.0050338 VL - 118 SP - 234002 ER - TY - JOUR A1 - Tillmann, Peter A1 - Bläsi, Benedikt A1 - Burger, Sven A1 - Hammerschmidt, Martin A1 - Höhn, Oliver A1 - Becker, Christiane A1 - Jäger, Klaus T1 - Optimizing metal grating back reflectors for III-V-on-silicon multijunction solar cells JF - Opt. Express Y1 - 2021 U6 - https://doi.org/10.1364/OE.426761 VL - 29 SP - 22517 ER - TY - CHAP A1 - Sekulic, Ivan A1 - Schneider, Philipp-Immanuel A1 - Hammerschmidt, Martin A1 - Schaible, Jonas A1 - Burger, Sven T1 - Physics informed Bayesian optimization for inverse design of diffractive optical elements T2 - Proc. SPIE Y1 - 2025 U6 - https://doi.org/10.1117/12.3064372 VL - PC13573 SP - PC135730R ER - TY - GEN A1 - Sekulic, Ivan A1 - Schneider, Philipp-Immanuel A1 - Hammerschmidt, Martin A1 - Burger, Sven T1 - Machine-learning driven design of metasurfaces: learn the physics and not the objective function T2 - Proc. SPIE Y1 - 2024 U6 - https://doi.org/10.1117/12.3022119 VL - PC13017 SP - PC130170X ER - TY - CHAP A1 - Schneider, Philipp-Immanuel A1 - Zschiedrich, Lin A1 - Hammerschmidt, Martin A1 - Kuen, Lilli A1 - Sekulic, Ivan A1 - Kluge, Julien A1 - Leykauf, Bastian A1 - Krutzik, Markus A1 - Burger, Sven T1 - Boosting quantum optics experiments with Bayesian optimization T2 - Proc. SPIE Y1 - 2022 U6 - https://doi.org/10.1117/12.2632419 VL - 12227 SP - 122270F ER - TY - CHAP A1 - Schneider, Philipp-Immanuel A1 - Sekulic, Ivan A1 - Plock, Matthias A1 - Hammerschmidt, Martin A1 - Rodt, Sven A1 - Reitzenstein, Stephan A1 - Burger, Sven T1 - Physics-informed Bayesian optimization of nanophotonic devices T2 - Advanced Photonics Congress Y1 - 2025 U6 - https://doi.org/10.1364/IPRSN.2025.ITu1A.2 VL - IPRSN SP - ITu1A.2 ER - TY - JOUR A1 - Schneider, Philipp-Immanuel A1 - Santiago, Xavier Garcia A1 - Soltwisch, Victor A1 - Hammerschmidt, Martin A1 - Burger, Sven A1 - Rockstuhl, Carsten T1 - Benchmarking five global optimization approaches for nano-optical shape optimization and parameter reconstruction JF - ACS Photonics Y1 - 2019 U6 - https://doi.org/10.1021/acsphotonics.9b00706 VL - 6 SP - 2726 ER - TY - CHAP A1 - Schneider, Philipp-Immanuel A1 - Santiago, Xavier Garcia A1 - Binkowski, Felix A1 - Gutsche, Philipp A1 - Höhne, Theresa A1 - Hammerschmidt, Martin A1 - Zschiedrich, Lin A1 - Burger, Sven T1 - Light Management for Engineering Luminescence in Nanoscale Environments By Numerical Optimization T2 - The Electrochemical Society, Meeting Abstracts Y1 - 2018 U6 - https://doi.org/10.1149/MA2018-01/16/1164 SN - 2151-2043 VL - 16 SP - 1164 ER - TY - JOUR A1 - Schneider, Philipp-Immanuel A1 - Hammerschmidt, Martin A1 - Zschiedrich, Lin A1 - Burger, Sven T1 - Using Gaussian process regression for efficient parameter reconstruction JF - Proc. SPIE Y1 - 2019 U6 - https://doi.org/10.1117/12.2513268 VL - 10959 SP - 1095911 ER - TY - JOUR A1 - Santiago, Xavier Garcia A1 - Hammerschmidt, Martin A1 - Burger, Sven A1 - Rockstuhl, Carsten A1 - Fernandez-Corbaton, Ivan A1 - Zschiedrich, Lin T1 - Decomposition of scattered electromagnetic fields into vector spherical wave functions on surfaces with general shapes JF - Phys. Rev. B Y1 - 2019 U6 - https://doi.org/10.1103/PhysRevB.99.045406 VL - 99 SP - 045406 ER - TY - JOUR A1 - Plock, Matthias A1 - Hammerschmidt, Martin A1 - Burger, Sven A1 - Schneider, Philipp-Immanuel A1 - Schütte, Christof T1 - Impact Study of Numerical Discretization Accuracy on Parameter Reconstructions and Model Parameter Distributions JF - Metrologia N2 - In optical nano metrology numerical models are used widely for parameter reconstructions. Using the Bayesian target vector optimization method we fit a finite element numerical model to a Grazing Incidence x-ray fluorescence data set in order to obtain the geometrical parameters of a nano structured line grating. Gaussian process, stochastic machine learning surrogate models, were trained during the reconstruction and afterwards sampled with a Markov chain Monte Carlo sampler to determine the distribution of the reconstructed model parameters. The numerical discretization parameters of the used finite element model impact the numerical discretization error of the forward model. We investigated the impact of the polynomial order of the finite element ansatz functions on the reconstructed parameters as well as on the model parameter distributions. We showed that such a convergence study allows to determine numerical parameters which allows for efficient and accurate reconstruction results. Y1 - 2023 U6 - https://doi.org/10.1088/1681-7575/ace4cd VL - 60 SP - 054001 ER - TY - JOUR A1 - Pflüger, Mika A1 - Kline, R. Joseph A1 - Fernández Herrero, Analia A1 - Hammerschmidt, Martin A1 - Soltwisch, Victor A1 - Krumrey, Michael T1 - Extracting dimensional parameters of gratings produced with self-aligned multiple patterning using grazing-incidence small-angle x-ray scattering JF - J. Micro Nanolithogr. MEMS MOEMS Y1 - 2020 U6 - https://doi.org/10.1117/1.JMM.19.1.014001 VL - 19 SP - 014001 ER - TY - GEN A1 - Pflüger, Mika A1 - Kline, R Joseph A1 - Fernández Herrero, Analía A1 - Hammerschmidt, Martin A1 - Soltwisch, Victor A1 - Krumrey, Michael T1 - Extracting dimensional parameters of gratings produced with self-aligned multiple patterning using grazing-incidence small-angle x-ray scattering [Source Code] Y1 - 2020 U6 - https://doi.org/10.24433/CO.0953516.v2 ER - TY - JOUR A1 - Pakhomov, Anton V. A1 - Hammerschmidt, Martin A1 - Burger, Sven A1 - Pertsch, Thomas A1 - Setzpfand, Frank T1 - Modeling of surface-induced second-harmonic generation from multilayer structures by the transfer matrix method JF - Opt. Express Y1 - 2021 U6 - https://doi.org/10.1364/OE.417066 VL - 29 SP - 9098 ER - TY - JOUR A1 - Pakhomov, Anton A1 - Löchner, Franz A1 - Zschiedrich, Lin A1 - Saravi, Sina A1 - Hammerschmidt, Martin A1 - Burger, Sven A1 - Pertsch, Thomas A1 - Setzpfand, Frank T1 - Far-field polarization signatures of surface optical nonlinearity in noncentrosymmetric semiconductors JF - Sci. Rep. Y1 - 2020 U6 - https://doi.org/10.1038/s41598-020-67186-0 VL - 10 SP - 10545 ER - TY - JOUR A1 - Manley, Phillip A1 - Walde, Sebastian A1 - Hagedorn, Sylvia A1 - Hammerschmidt, Martin A1 - Burger, Sven A1 - Becker, Christiane T1 - Nanopatterned Sapphire Substrates in Deep-UV LEDs: Is there an Optical Benefit? JF - Opt. Express Y1 - 2020 U6 - https://doi.org/10.1364/OE.379438 VL - 28 SP - 3619 ER - TY - JOUR A1 - Manley, Phillip A1 - Segantini, Michele A1 - Ahiboz, Doguscan A1 - Hammerschmidt, Martin A1 - Arnaoutakis, Georgios A1 - MacQueen, Rowan W. A1 - Burger, Sven A1 - Becker, Christiane T1 - Double-layer metasurface for enhanced photon up-conversion JF - APL Photon. Y1 - 2021 U6 - https://doi.org/10.1063/5.0040839 VL - 6 SP - 036103 ER - TY - CHAP A1 - Manley, Phillip A1 - Krüger, Jan A1 - Zschiedrich, Lin A1 - Hammerschmidt, Martin A1 - Bodermann, Bernd A1 - Köning, Rainer A1 - Schneider, Philipp-Immanuel T1 - Elementary, my dear Zernike: model order reduction for accelerating optical dimensional microscopy T2 - EPJ Web Conf. Y1 - 2022 U6 - https://doi.org/10.1051/epjconf/202226610010 VL - 266 SP - 10010 ER - TY - CHAP A1 - Manley, Phillip A1 - Krüger, Jan A1 - Bodermann, Bernd A1 - Köning, Rainer A1 - Heinrich, Andreas A1 - Eder, Christian A1 - Goehnermeier, Aksel A1 - Zeiser, Ulrike A1 - Hammerschmidt, Martin A1 - Zschiedrich, Lin A1 - Schneider, Philipp-Immanuel T1 - Efficient simulation of microscopic imaging for reconstruction of nanostructures T2 - Proc. SPIE Y1 - 2023 U6 - https://doi.org/10.1117/12.2673077 VL - PC12619 SP - PC126190B ER - TY - JOUR A1 - Manley, Phillip A1 - Hammerschmidt, Martin A1 - Zschiedrich, Lin A1 - Jäger, Klaus A1 - Becker, Christiane A1 - Burger, Sven T1 - Modelling luminescent coupling in multi-junction solar cells: perovskite silicon tandem case study JF - Proc. SPIE Y1 - 2024 U6 - https://doi.org/10.1117/12.3023941 VL - 13014 SP - 1301404 ER - TY - CHAP A1 - Manley, Phillip A1 - Hammerschmidt, Martin A1 - Burger, Sven A1 - Becker, Christiane ED - Zhoudi, Said ED - Topa, Antonio T1 - Nanophotonic Enhancement of Light Out-Coupling for Deep-UV LEDs T2 - The 10th International Conference on Metamaterials, Photonic Crystals and Plasmonics (META 2019) Y1 - 2019 SN - 2429-1390 SP - 745 ER - TY - CHAP A1 - Mangalgiri, Gauri A1 - Šiškins, Makars A1 - Arslanova, Alina A1 - Hammerschmidt, Martin A1 - Manley, Phillip A1 - Riedel, Wiebke A1 - Schmid, Martina T1 - Highly Transmittive Broadband Dielectric Nanoholes T2 - CLEO Y1 - 2017 U6 - https://doi.org/10.1364/CLEO_AT.2017.JTu5A.117 SP - JTu5A.117 ER - TY - JOUR A1 - Lockau, Daniel A1 - Sontheimer, Tobias A1 - Preidel, Veit A1 - Ruske, Florian A1 - Hammerschmidt, Martin A1 - Becker, Christiane A1 - Schmidt, Frank A1 - Rech, Bernd T1 - Advanced microhole arrays for light trapping in thin film silicon solar cells JF - Solar Energy Materials and Solar Cells Y1 - 2014 U6 - https://doi.org/10.1016/j.solmat.2013.11.024 VL - 125 SP - 298 EP - 304 ER - TY - CHAP A1 - Lockau, Daniel A1 - Hammerschmidt, Martin A1 - Haschke, Jan A1 - Blome, Mark A1 - Ruske, Florian A1 - Schmidt, Frank A1 - Rech, Bernd T1 - A comparison of scattering and non-scattering anti-reflection designs for back contacted polycrystalline thin film silicon solar cells in superstrate configuration T2 - Proc. SPIE Y1 - 2014 U6 - https://doi.org/10.1117/12.2052362 VL - 9140 SP - 914006 ER - TY - GEN A1 - Lockau, Daniel A1 - Hammerschmidt, Martin A1 - Blome, Mark A1 - Schmidt, Frank ED - Deuflhard, Peter ED - et al., T1 - Optics of thin film solar cells T2 - MATHEON-Mathematics for Key Technologies Y1 - 2014 U6 - https://doi.org/10.4171/137 VL - 1 SP - 278 EP - 279 PB - European Mathematical Society ER - TY - CHAP A1 - Kuen, Lilli A1 - Betz, Fridtjof A1 - Binkowski, Felix A1 - Schneider, Philipp-Immanuel A1 - Hammerschmidt, Martin A1 - Heermeier, Niels A1 - Rodt, Sven A1 - Reitzenstein, Stephan A1 - Burger, Sven T1 - Applying a Riesz-projection-based contour integral eigenvalue solver to compute resonance modes of a VCSEL T2 - Proc. SPIE Y1 - 2023 U6 - https://doi.org/10.1117/12.2665490 VL - 12575 SP - 125750J ER - TY - CHAP A1 - Krüger, Jan A1 - Manley, Phillip A1 - Zschiedrich, Lin A1 - Hammerschmidt, Martin A1 - Schneider, Philipp-Immanuel A1 - Köning, Rainer A1 - Bodermann, Bernd T1 - Untersuchung des Schwingungseinflusses auf gemessene Punktspreizfunktionen in der optischen Mikroskopie T2 - Proc. DGaO Y1 - 2022 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:0287-2022-P005-6 SP - P5 ER - TY - JOUR A1 - Krüger, Jan A1 - Manley, Phillip A1 - Bergmann, Detlef A1 - Köning, Rainer A1 - Bodermann, Bernd A1 - Eder, Christian A1 - Heinrich, Andreas A1 - Schneider, Philipp-Immanuel A1 - Hammerschmidt, Martin A1 - Zschiedrich, Lin A1 - Manske, Eberhard T1 - Introduction and application of a new approach for model-based optical bidirectional measurements JF - Meas. Sci. Technol. Y1 - 2024 U6 - https://doi.org/10.1088/1361-6501/ad4b53 VL - 35 SP - 085014 ER - TY - JOUR A1 - Krüger, Jan A1 - Dopslaff, Sven A1 - Manley, Phillip A1 - Bergmann, Detlef A1 - Köning, Rainer A1 - Dai, Gaoliang A1 - Hahm, Kai A1 - Schneider, Philipp-Immanuel A1 - Hammerschmidt, Martin A1 - Zschiedrich, Lin A1 - Bosse, Harald A1 - Bodermann, Bernd T1 - Photomask linewidth measurement comparison including an improved model-based through-focus measurement approach JF - Meas. Sci. Technol. Y1 - 2026 U6 - https://doi.org/10.1088/1361-6501/ae44bb ER - TY - JOUR A1 - Kirner, Simon A1 - Hammerschmidt, Martin A1 - Schwanke, Christoph A1 - Lockau, Daniel A1 - Calnan, Sonya A1 - Frijnts, Tim A1 - Neubert, Sebastian A1 - Schöpke, Andreas A1 - Schmidt, Frank A1 - Zollondz, Jens-Hendrik A1 - Heidelberg, Andreas A1 - Stannowski, Bernd A1 - Rech, Bernd A1 - Schlatmann, Rutger T1 - Implications of TCO Topography on Intermediate Reflector Design for a-Si/μc-Si Tandem Solar Cells — Experiments and Rigorous Optical Simulations JF - IEEE Journal of Photovoltaics Y1 - 2014 U6 - https://doi.org/10.1109/JPHOTOV.2013.2279204 VL - 4 IS - 1 SP - 10 EP - 15 ER - TY - JOUR A1 - Jäger, Klaus A1 - Tejada, Alvarjo A1 - Berwig, Sebastian A1 - Hammerschmidt, Martin A1 - Tockhorn, Philipp A1 - Albrecht, Steve A1 - Becker, Christiane T1 - Optical Simulations of Nanotextured All-Perovskite Tandem Solar Cells JF - Adv. Theory Simul. Y1 - 2025 U6 - https://doi.org/10.1002/adts.202400724 VL - 8 SP - 2400724 ER - TY - CHAP A1 - Jäger, Klaus A1 - Sutter, Johannes A1 - Tockhorn, Philipp A1 - Hammerschmidt, Martin A1 - Schneider, Philipp-Immanuel A1 - Albrecht, Steve A1 - Becker, Christiane T1 - Improving perovskite/silicon tandem solar cells with optical simulations T2 - Proc. SPIE Y1 - 2022 U6 - https://doi.org/10.1117/12.2621255 VL - PC12150 SP - PC1215001 ER - TY - GEN A1 - Jäger, Klaus A1 - Sutter, Johannes A1 - Schneider, Philipp-Immanuel A1 - Hammerschmidt, Martin A1 - Becker, Christiane T1 - Optical simulations of nanotextured perovskite/silicon tandem solar cell T2 - HZB Data Service Y1 - 2021 U6 - https://doi.org/10.5442/ND000005 ER - TY - JOUR A1 - Jäger, Klaus A1 - Sutter, Johannes A1 - Hammerschmidt, Martin A1 - Schneider, Philipp-Immanuel A1 - Becker, Christiane T1 - Prospects of light management in perovskite/silicon tandem solar cells JF - Nanophotonics Y1 - 2021 U6 - https://doi.org/10.1515/nanoph-2020-0674 VL - 10 SP - 1991 ER - TY - CHAP A1 - Jäger, Klaus A1 - Manley, Phillip A1 - Eisenhauer, David A1 - Tockhorn, Philipp A1 - Sutter, Johannes A1 - Hammerschmidt, Martin A1 - Burger, Sven A1 - Albrecht, Steve A1 - Becker, Christiane T1 - Light management with sinusoidal nanotextures T2 - Light, Energy and the Environment 2018 Y1 - 2018 U6 - https://doi.org/10.1364/OSE.2018.OT5C.5 SP - OT5C.5 ER - TY - JOUR A1 - Jäger, Klaus A1 - Manley, Phillip A1 - Chen, Duote A1 - Tockhorn, Philipp A1 - Eisenhauer, David A1 - Köppel, Grit A1 - Hammerschmidt, Martin A1 - Burger, Sven A1 - Albrecht, Steve A1 - Becker, Christiane T1 - Antireflective nanotextures for monolithic perovskite-silicon tandem solar cells JF - Proc. SPIE Y1 - 2018 U6 - https://doi.org/10.1117/12.2306142 VL - 10688 SP - 106880A ER - TY - CHAP A1 - Jäger, Klaus A1 - Köppel, Grit A1 - Hammerschmidt, Martin A1 - Burger, Sven A1 - Becker, Christiane T1 - Accurate optical simulations of periodic nanostructures on a thick glass substrate T2 - 29th Workshop on Quantum Solar Energy Conversion - (QUANTSOL) Y1 - 2017 ER - TY - JOUR A1 - Jäger, Klaus A1 - Köppel, Grit A1 - Hammerschmidt, Martin A1 - Burger, Sven A1 - Becker, Christiane T1 - On accurate simulations of thin-film solar cells with a thick glass superstrate JF - Opt. Express Y1 - 2018 U6 - https://doi.org/10.1364/OE.26.000A99 VL - 26 SP - A99 ER - TY - JOUR A1 - Jäger, Klaus A1 - Köppel, Grit A1 - Eisenhauer, David A1 - Chen, Duote A1 - Hammerschmidt, Martin A1 - Burger, Sven A1 - Becker, Christiane T1 - Optical simulations of advanced light management for liquid-phase crystallized silicon thin-film solar cells JF - Proc. SPIE Y1 - 2017 U6 - https://doi.org/10.1117/12.2273994 VL - 10356 SP - 103560F ER - TY - JOUR A1 - Jäger, Klaus A1 - Köppel, Grit A1 - Barth, Carlo A1 - Hammerschmidt, Martin A1 - Herrmann, Sven A1 - Burger, Sven A1 - Schmidt, Frank A1 - Becker, Christiane T1 - Sinusoidal gratings for optimized light management in c-Si thin-film solar cells JF - Proc. SPIE Y1 - 2016 U6 - https://doi.org/10.1117/12.2225459 VL - 9898 SP - 989808 ER - TY - CHAP A1 - Jäger, Klaus A1 - Hammerschmidt, Martin A1 - Köppel, Grit A1 - Burger, Sven A1 - Becker, Christiane T1 - On Accurate Simulations of Thin-Film Solar Cells With a Thick Glass Superstrate T2 - Light, Energy and the Environment 2016 Y1 - 2016 U6 - https://doi.org/10.1364/PV.2016.PM3B.5 SP - PM3B.5 ER - TY - CHAP A1 - Jäger, Klaus A1 - Barth, Carlo A1 - Hammerschmidt, Martin A1 - Herrmann, Sven A1 - Burger, Sven A1 - Schmidt, Frank A1 - Becker, Christiane ED - European Society for Quantum Solar Energy Conversion, T1 - Sinusoidal Nanotextures for Enhanced Light Management in Thin-Film Solar Cells T2 - 28th Workshop on Quantum Solar Energy Conversion - (QUANTSOL) Y1 - 2016 ER - TY - CHAP A1 - Jäger, Klaus A1 - Barth, Carlo A1 - Hammerschmidt, Martin A1 - Herrmann, Sven A1 - Burger, Sven A1 - Schmidt, Frank A1 - Becker, Christiane T1 - Sinusoidal Nanotextures for Coupling Light into c-Si Thin-Film Solar Cells T2 - Light, Energy and the Environement 2015 Y1 - 2015 U6 - https://doi.org/10.1364/PV.2015.PTu4B.3 SP - PTu4B.3 ER - TY - JOUR A1 - Jäger, Klaus A1 - Barth, Carlo A1 - Hammerschmidt, Martin A1 - Herrmann, Sven A1 - Burger, Sven A1 - Schmidt, Frank A1 - Becker, Christiane T1 - Simulations of sinusoidal nanotextures for coupling light into c-Si thin-film solar cells JF - Opt. Express Y1 - 2016 U6 - https://doi.org/10.1364/OE.24.00A569 VL - 24 SP - A569 ER - TY - CHAP A1 - Hammerschmidt, Martin A1 - Zschiedrich, Lin A1 - Siaudinyté, Lauryna A1 - Manley, Phillip A1 - Schneider, Philipp-Immanuel A1 - Burger, Sven T1 - Forward simulation of coherent beams on grating structures for coherent scatterometry T2 - Proc. SPIE Y1 - 2023 U6 - https://doi.org/10.1117/12.2673231 VL - PC12619 SP - PC1261907 ER - TY - CHAP A1 - Hammerschmidt, Martin A1 - Zschiedrich, Lin A1 - Schneider, Philipp-Immanuel A1 - Binkowski, Felix A1 - Burger, Sven T1 - Numerical optimization of resonant photonic devices T2 - Proc. SPIE Y1 - 2019 U6 - https://doi.org/10.1117/12.2534348 VL - 11057 SP - 1105702 ER - TY - GEN A1 - Hammerschmidt, Martin A1 - Weiser, Martin A1 - Santiago, Xavier Garcia A1 - Zschiedrich, Lin A1 - Bodermann, Bernd A1 - Burger, Sven T1 - Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion N2 - We present a Newton-like method to solve inverse problems and to quantify parameter uncertainties. We apply the method to parameter reconstruction in optical scatterometry, where we take into account a priori information and measurement uncertainties using a Bayesian approach. Further, we discuss the influence of numerical accuracy on the reconstruction result. T3 - ZIB-Report - 17-37 KW - computational metrology KW - optical metrology KW - computational lithography KW - nanolithography KW - finite- element methods KW - nanooptics Y1 - 2017 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:0297-zib-64704 SN - 1438-0064 ER - TY - JOUR A1 - Hammerschmidt, Martin A1 - Weiser, Martin A1 - Santiago, Xavier Garcia A1 - Zschiedrich, Lin A1 - Bodermann, Bernd A1 - Burger, Sven T1 - Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion JF - Proc. SPIE Y1 - 2017 U6 - https://doi.org/10.1117/12.2270596 VL - 10330 SP - 1033004 ER -