TY - JOUR A1 - Hammerschmidt, Martin A1 - Weiser, Martin A1 - Santiago, Xavier Garcia A1 - Zschiedrich, Lin A1 - Bodermann, Bernd A1 - Burger, Sven T1 - Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion JF - Proc. SPIE Y1 - 2017 U6 - https://doi.org/10.1117/12.2270596 VL - 10330 SP - 1033004 ER - TY - JOUR A1 - Hammerschmidt, Martin A1 - Schneider, Philipp-Immanuel A1 - Santiago, Xavier Garcia A1 - Zschiedrich, Lin A1 - Weiser, Martin A1 - Burger, Sven T1 - Solving inverse problems appearing in design and metrology of diffractive optical elements by using Bayesian optimization JF - Proc. SPIE Y1 - 2018 U6 - https://doi.org/10.1117/12.2315468 VL - 10694 SP - 1069407 ER - TY - GEN A1 - Hammerschmidt, Martin A1 - Weiser, Martin A1 - Santiago, Xavier Garcia A1 - Zschiedrich, Lin A1 - Bodermann, Bernd A1 - Burger, Sven T1 - Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion N2 - We present a Newton-like method to solve inverse problems and to quantify parameter uncertainties. We apply the method to parameter reconstruction in optical scatterometry, where we take into account a priori information and measurement uncertainties using a Bayesian approach. Further, we discuss the influence of numerical accuracy on the reconstruction result. T3 - ZIB-Report - 17-37 KW - computational metrology KW - optical metrology KW - computational lithography KW - nanolithography KW - finite- element methods KW - nanooptics Y1 - 2017 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:0297-zib-64704 SN - 1438-0064 ER - TY - CHAP A1 - Hammerschmidt, Martin A1 - Lockau, Daniel A1 - Burger, Sven A1 - Schmidt, Frank A1 - Schwanke, Christoph A1 - Kirner, Simon A1 - Calnan, Sonya A1 - Stannowski, Bernd A1 - Rech, Bernd T1 - 3D optical modeling of thin-film a-Si/mc-Si tandem solar cells with random textured interfaces using FEM T2 - Renewable Energy and the Environment Optics and Photonics Congress Y1 - 2012 U6 - https://doi.org/10.1364/E2.2012.JM5A.15 SP - JM5A.15 PB - Optical Society of America ER - TY - JOUR A1 - Hammerschmidt, Martin A1 - Lockau, Daniel A1 - Burger, Sven A1 - Schmidt, Frank A1 - Schwanke, Christoph A1 - Kirner, Simon A1 - Calnan, Sonya A1 - Stannowski, Bernd A1 - Rech, Bernd T1 - FEM-based optical modeling of silicon thin-film tandem solar cells with randomly textured interfaces in 3D JF - Proc. SPIE Y1 - 2013 U6 - https://doi.org/10.1117/12.2001789 VL - 8620 SP - 86201H ER - TY - CHAP A1 - Zschiedrich, Lin A1 - Greiner, Horst A1 - Pomplun, Jan A1 - Hammerschmidt, Martin A1 - Burger, Sven A1 - Schmidt, Frank T1 - FEM simulations of light extraction from nanostructured organic light-emitting diodes T2 - Renewable Energy and the Environment Optics and Photonics Congress Y1 - 2012 U6 - https://doi.org/10.1364/SOLED.2012.LT2B.5 SP - LT2B.5 PB - Optical Society of America ER - TY - JOUR A1 - Becker, Christiane A1 - Wyss, Philippe A1 - Eisenhauer, David A1 - Probst, Jürgen A1 - Preidel, Veit A1 - Hammerschmidt, Martin A1 - Burger, Sven T1 - 5 x 5 cm2 silicon photonic crystal slabs on glass and plastic foil exhibiting broadband absorption and high-intensity near-fields JF - Sci. Rep. Y1 - 2014 U6 - https://doi.org/10.1038/srep05886 VL - 4 SP - 5886 ER - TY - JOUR A1 - Barth, Carlo A1 - Roder, Sebastian A1 - Brodoceanu, Daniel A1 - Kraus, Tobias A1 - Hammerschmidt, Martin A1 - Burger, Sven A1 - Becker, Christiane T1 - Increased fluorescence of PbS quantum dots in photonic crystals by excitation enhancement JF - Appl. Phys. Lett. Y1 - 2017 U6 - https://doi.org/10.1063/1.4995229 VL - 111 SP - 031111 ER - TY - JOUR A1 - Jäger, Klaus A1 - Köppel, Grit A1 - Eisenhauer, David A1 - Chen, Duote A1 - Hammerschmidt, Martin A1 - Burger, Sven A1 - Becker, Christiane T1 - Optical simulations of advanced light management for liquid-phase crystallized silicon thin-film solar cells JF - Proc. SPIE Y1 - 2017 U6 - https://doi.org/10.1117/12.2273994 VL - 10356 SP - 103560F ER - TY - JOUR A1 - Gutsche, Philipp A1 - Poulikakos, Lisa A1 - Hammerschmidt, Martin A1 - Burger, Sven A1 - Schmidt, Frank T1 - Time-harmonic optical chirality in inhomogeneous space JF - Proc. SPIE Y1 - 2016 U6 - https://doi.org/10.1117/12.2209551 VL - 9756 SP - 97560X ER -