TY - GEN A1 - Schädle, Achim A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Klose, Roland A1 - Schmidt, Frank T1 - Domain Decomposition Method for Maxwell's Equations: Scattering off Periodic Structures N2 - We present a domain decomposition approach for the computation of the electromagnetic field within periodic structures. We use a Schwarz method with transparent boundary conditions at the interfaces of the domains. Transparent boundary conditions are approximated by the perfectly matched layer method (PML). To cope with Wood anomalies appearing in periodic structures an adaptive strategy to determine optimal PML parameters is developed. We focus on the application to typical EUV lithography line masks. Light propagation within the multi-layer stack of the EUV mask is treated analytically. This results in a drastic reduction of the computational costs and allows for the simulation of next generation lithography masks on a standard personal computer. T3 - ZIB-Report - 06-04 KW - domain decomposition KW - conical diffraction KW - electro-magnetic scattering KW - Maxwell's equations KW - Lithography KW - finite elements Y1 - 2006 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:0297-zib-8984 ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Schmidt, Frank T1 - Finite-element based electromagnetic field simulations: Benchmark results for isolated structures T2 - Proc. SPIE Y1 - 2013 U6 - https://doi.org/10.1117/12.2026213 VL - 8880 SP - 88801Z ER - TY - CHAP A1 - Pomplun, Jan A1 - Burger, Sven A1 - Rozova, Maria A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - Finite element simulation of optical modes in VCSELs T2 - Numerical Simulation of Optoelectronic Devices (NUSOD), 11th International Conference on Y1 - 2011 U6 - https://doi.org/10.1109/NUSOD.2011.6041170 SP - 119 EP - 120 ER - TY - CHAP A1 - Zschiedrich, Lin A1 - Schmidt, Frank A1 - Pomplun, Jan A1 - Burger, Sven T1 - Finite elements for nano-optics applications T2 - Proc. Europ. Opt. Soc. Ann. Meet. 2016 (EOSAM) Y1 - 2016 SN - 978-1-5108-4796-5 SP - 178 ER - TY - JOUR A1 - Schneider, Philipp-Immanuel A1 - Hammerschmidt, Martin A1 - Zschiedrich, Lin A1 - Burger, Sven T1 - Using Gaussian process regression for efficient parameter reconstruction JF - Proc. SPIE Y1 - 2019 U6 - https://doi.org/10.1117/12.2513268 VL - 10959 SP - 1095911 ER - TY - JOUR A1 - Binkowski, Felix A1 - Zschiedrich, Lin A1 - Burger, Sven T1 - An auxiliary field approach for computing optical resonances in dispersive media JF - J. Eur. Opt. Soc.-Rapid Y1 - 2019 U6 - https://doi.org/10.1186/s41476-019-0098-z VL - 15 SP - 3 ER - TY - JOUR A1 - Kewes, Günter A1 - Binkowski, Felix A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Benson, Oliver T1 - Heuristic Modeling of Strong Coupling in Plasmonic Resonators JF - ACS Photonics Y1 - 2018 U6 - https://doi.org/10.1021/acsphotonics.8b00766 VL - 5 SP - 4089 ER - TY - JOUR A1 - Binkowski, Felix A1 - Zschiedrich, Lin A1 - Burger, Sven T1 - A Riesz-projection-based method for nonlinear eigenvalue problems JF - J. Comput. Phys. Y1 - 2020 U6 - https://doi.org/10.1016/j.jcp.2020.109678 VL - 419 SP - 109678 ER - TY - JOUR A1 - Lalanne, P. A1 - Yan, W. A1 - Gras, A. A1 - Sauvan, C. A1 - Hugonin, J.-P. A1 - Besbes, M. A1 - Demésy, G. A1 - Truong, M. D. A1 - Gralak, B. A1 - Zolla, F. A1 - Nicolet, A. A1 - Binkowski, Felix A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Zimmerling, J. A1 - Remis, R. A1 - Urbach, H. Paul A1 - Liu, H. T. A1 - Weiss, T. T1 - Quasinormal mode solvers for resonators with dispersive materials JF - J. Opt. Soc. Am. A Y1 - 2019 U6 - https://doi.org/10.1364/JOSAA.36.000686 VL - 36 SP - 686 ER - TY - JOUR A1 - Ledentsov, Jr., Nikolay A1 - Shchukin, Vitaly A1 - Kropp, Jörg-R. A1 - Zschiedrich, Lin A1 - Schmidt, Frank A1 - Ledentsov, Jr., Nikolay T1 - Resonant cavity light–emitting diodes based on dielectric passive cavity structures JF - Proc. SPIE Y1 - 2017 U6 - https://doi.org/10.1117/12.2253089 VL - 10124 SP - 101240O ER - TY - JOUR A1 - Hiremath, Kirankumar A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - Numerical solution of nonlocal hydrodynamic Drude model for arbitrary shaped nano-plasmonic structures using Nedelec finite elements JF - J. Comp. Phys. Y1 - 2012 U6 - https://doi.org/10.1016/j.jcp.2012.05.013 VL - 231 IS - 17 SP - 5890 EP - 5896 ER -