TY - CHAP A1 - Burger, Sven A1 - Kleemann, B. A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - Finite-Element Simulations of Light Propagation through Circular Subwavelength Apertures T2 - Microtechnologies for the New Millenium Y1 - 2009 U6 - https://doi.org/10.1117/12.822828 VL - 7366 SP - 736621 PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Köhle, Roderick A1 - Zschiedrich, Lin A1 - Nguyen, H. A1 - Schmidt, Frank A1 - März, Reinhard A1 - Nölscher, Christoph ED - Martin, P. ED - Naber, R. T1 - Rigorous Simulation of 3D Masks T2 - Photomask Technology Y1 - 2006 UR - http://arxiv.org/pdf/physics/0610218 VL - 6349 SP - 63494Z PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Gutsche, Philipp A1 - Hammerschmidt, Martin A1 - Herrmann, Sven A1 - Pomplun, Jan A1 - Schmidt, Frank A1 - Wohlfeil, Benjamin A1 - Zschiedrich, Lin T1 - Hp-finite-elements for simulating electromagnetic fields in optical devices with rough textures T2 - Proc. SPIE Y1 - 2015 U6 - https://doi.org/10.1117/12.2190119 VL - 9630 SP - 96300S ER - TY - GEN A1 - Hammerschmidt, Martin A1 - Herrmann, Sven A1 - Pomplun, Jan A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Schmidt, Frank T1 - Reduced basis method for Maxwell's equations with resonance phenomena T2 - Proc. SPIE N2 - Rigorous optical simulations of 3-dimensional nano-photonic structures are an important tool in the analysis and optimization of scattering properties of nano-photonic devices or parameter reconstruction. To construct geometrically accurate models of complex structured nano-photonic devices the finite element method (FEM) is ideally suited due to its flexibility in the geometrical modeling and superior convergence properties. Reduced order models such as the reduced basis method (RBM) allow to construct self-adaptive, error-controlled, very low dimensional approximations for input-output relationships which can be evaluated orders of magnitude faster than the full model. This is advantageous in applications requiring the solution of Maxwell's equations for multiple parameters or a single parameter but in real time. We present a reduced basis method for 3D Maxwell's equations based on the finite element method which allows variations of geometric as well as material and frequency parameters. We demonstrate accuracy and efficiency of the method for a light scattering problem exhibiting a resonance in the electric field. T3 - ZIB-Report - 15-37 KW - reduced basis method KW - finite element method KW - maxwell equation KW - photonic crystal KW - nano-photonics Y1 - 2015 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:0297-zib-55687 SN - 1438-0064 VL - 9630 SP - 96300R ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Herrmann, Sven A1 - Schmidt, Frank T1 - hp-finite element method for simulating light scattering from complex 3D structures T2 - Proc. SPIE Y1 - 2015 U6 - https://doi.org/10.1117/12.2085795 VL - 9424 SP - 94240Z ER - TY - GEN A1 - Hammerschmidt, Martin A1 - Weiser, Martin A1 - Santiago, Xavier Garcia A1 - Zschiedrich, Lin A1 - Bodermann, Bernd A1 - Burger, Sven T1 - Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion N2 - We present a Newton-like method to solve inverse problems and to quantify parameter uncertainties. We apply the method to parameter reconstruction in optical scatterometry, where we take into account a priori information and measurement uncertainties using a Bayesian approach. Further, we discuss the influence of numerical accuracy on the reconstruction result. T3 - ZIB-Report - 17-37 KW - computational metrology KW - optical metrology KW - computational lithography KW - nanolithography KW - finite- element methods KW - nanooptics Y1 - 2017 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:0297-zib-64704 SN - 1438-0064 ER - TY - JOUR A1 - Hammerschmidt, Martin A1 - Weiser, Martin A1 - Santiago, Xavier Garcia A1 - Zschiedrich, Lin A1 - Bodermann, Bernd A1 - Burger, Sven T1 - Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion JF - Proc. SPIE Y1 - 2017 U6 - https://doi.org/10.1117/12.2270596 VL - 10330 SP - 1033004 ER - TY - GEN A1 - Hammerschmidt, Martin A1 - Lockau, Daniel A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - Optical modelling of incoherent substrate light-trapping in silicon thin film multi-junction solar cells with finite elements and domain decomposition N2 - In many experimentally realized applications, e.g. photonic crystals, solar cells and light-emitting diodes, nano-photonic systems are coupled to a thick substrate layer, which in certain cases has to be included as a part of the optical system. The finite element method (FEM) yields rigorous, high accuracy solutions of full 3D vectorial Maxwell's equations [1] and allows for great flexibility and accuracy in the geometrical modelling. Time-harmonic FEM solvers have been combined with Fourier methods in domain decomposition algorithms to compute coherent solutions of these coupled system. [2,3] The basic idea of a domain decomposition approach lies in a decomposition of the domain into smaller subdomains, separate calculations of the solutions and coupling of these solutions on adjacent subdomains. In experiments light sources are often not perfectly monochromatic and hence a comparision to simulation results might only be justified if the simulation results, which include interference patterns in the substrate, are spectrally averaged. In this contribution we present a scattering matrix domain decomposition algorithm for Maxwell's equations based on FEM. We study its convergence and advantages in the context of optical simulations of silicon thin film multi-junction solar cells. This allows for substrate light-trapping to be included in optical simulations and leads to a more realistic estimation of light path enhancement factors in thin-film devices near the band edge. T3 - ZIB-Report - 14-21 KW - finite element method KW - rigorous optical modeling KW - domain decomposition KW - multi-junction solar cells KW - thin-film silicon solar cells KW - incoherent layers KW - incoherent light-trapping Y1 - 2014 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:0297-zib-50410 SN - 1438-0064 ER - TY - GEN A1 - Amiranashvili, Shalva A1 - Bandelow, Uwe A1 - Blome, Mark A1 - Burger, Sven A1 - Schmidt, Frank A1 - Schmidt, Kersten A1 - Zschiedrich, Lin ED - Deuflhard, Peter ED - et al., T1 - Nanophotonics and nonlinear fiber optics T2 - MATHEON-Mathematics for Key Technologies Y1 - 2014 U6 - https://doi.org/10.4171/137 VL - 1 SP - 257 EP - 275 PB - European Mathematical Society ER - TY - CHAP A1 - Zschiedrich, Lin A1 - Blome, Therese A1 - Greiner, Horst T1 - Simulation of advanced OLED light extraction structures with novel FEM methods T2 - Organic Photonics VI Y1 - 2014 U6 - https://doi.org/10.1117/12.2054146 VL - 9137 SP - 91370O ER - TY - JOUR A1 - Pomplun, Jan A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Gutsche, Philipp A1 - Schmidt, Frank T1 - Method for fast computation of angular light scattering spectra from 2D periodic arrays JF - Proc. SPIE Y1 - 2016 U6 - https://doi.org/10.1117/12.2219666 VL - 9778 SP - 977839 ER -