TY - CHAP A1 - Hammerschmidt, Martin A1 - Zschiedrich, Lin A1 - Siaudinyté, Lauryna A1 - Manley, Phillip A1 - Schneider, Philipp-Immanuel A1 - Burger, Sven T1 - Forward simulation of coherent beams on grating structures for coherent scatterometry T2 - Proc. SPIE Y1 - 2023 U6 - https://doi.org/10.1117/12.2673231 VL - PC12619 SP - PC1261907 ER -