TY - CHAP A1 - Manley, Phillip A1 - Krüger, Jan A1 - Bodermann, Bernd A1 - Köning, Rainer A1 - Heinrich, Andreas A1 - Eder, Christian A1 - Goehnermeier, Aksel A1 - Zeiser, Ulrike A1 - Hammerschmidt, Martin A1 - Zschiedrich, Lin A1 - Schneider, Philipp-Immanuel T1 - Efficient simulation of microscopic imaging for reconstruction of nanostructures T2 - Proc. SPIE Y1 - 2023 U6 - https://doi.org/10.1117/12.2673077 VL - PC12619 SP - PC126190B ER - TY - JOUR A1 - Krüger, Jan A1 - Manley, Phillip A1 - Bergmann, Detlef A1 - Köning, Rainer A1 - Bodermann, Bernd A1 - Eder, Christian A1 - Heinrich, Andreas A1 - Schneider, Philipp-Immanuel A1 - Hammerschmidt, Martin A1 - Zschiedrich, Lin A1 - Manske, Eberhard T1 - Introduction and application of a new approach for model-based optical bidirectional measurements JF - Meas. Sci. Technol. Y1 - 2024 U6 - https://doi.org/10.1088/1361-6501/ad4b53 VL - 35 SP - 085014 ER - TY - CHAP A1 - Krüger, Jan A1 - Manley, Phillip A1 - Zschiedrich, Lin A1 - Hammerschmidt, Martin A1 - Schneider, Philipp-Immanuel A1 - Köning, Rainer A1 - Bodermann, Bernd T1 - Untersuchung des Schwingungseinflusses auf gemessene Punktspreizfunktionen in der optischen Mikroskopie T2 - Proc. DGaO Y1 - 2022 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:0287-2022-P005-6 SP - P5 ER - TY - CHAP A1 - Manley, Phillip A1 - Krüger, Jan A1 - Zschiedrich, Lin A1 - Hammerschmidt, Martin A1 - Bodermann, Bernd A1 - Köning, Rainer A1 - Schneider, Philipp-Immanuel T1 - Elementary, my dear Zernike: model order reduction for accelerating optical dimensional microscopy T2 - EPJ Web Conf. Y1 - 2022 U6 - https://doi.org/10.1051/epjconf/202226610010 VL - 266 SP - 10010 ER - TY - JOUR A1 - Krüger, Jan A1 - Dopslaff, Sven A1 - Manley, Phillip A1 - Bergmann, Detlef A1 - Köning, Rainer A1 - Dai, Gaoliang A1 - Hahm, Kai A1 - Schneider, Philipp-Immanuel A1 - Hammerschmidt, Martin A1 - Zschiedrich, Lin A1 - Bosse, Harald A1 - Bodermann, Bernd T1 - Photomask linewidth measurement comparison including an improved model-based through-focus measurement approach JF - Meas. Sci. Technol. Y1 - 2026 U6 - https://doi.org/10.1088/1361-6501/ae44bb VL - 37 SP - 095004 ER -