TY - CHAP A1 - Soltwisch, Victor A1 - Wernecke, Jan A1 - Haase, Anton A1 - Probst, Jürgen A1 - Schoengen, Max A1 - Scholze, Frank A1 - Pomplun, Jan A1 - Burger, Sven T1 - Determination of line profile on nanostructured surfaces using EUV and x-ray scattering T2 - Proc. SPIE Y1 - 2014 U6 - https://doi.org/10.1117/12.2066165 VL - 9235 SP - 92351D ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Schmidt, Frank T1 - Finite-element based electromagnetic field simulations: Benchmark results for isolated structures T2 - Proc. SPIE Y1 - 2013 U6 - https://doi.org/10.1117/12.2026213 VL - 8880 SP - 88801Z ER - TY - CHAP A1 - Pomplun, Jan A1 - Burger, Sven A1 - Rozova, Maria A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - Finite element simulation of optical modes in VCSELs T2 - Numerical Simulation of Optoelectronic Devices (NUSOD), 11th International Conference on Y1 - 2011 U6 - https://doi.org/10.1109/NUSOD.2011.6041170 SP - 119 EP - 120 ER - TY - CHAP A1 - Zschiedrich, Lin A1 - Schmidt, Frank A1 - Pomplun, Jan A1 - Burger, Sven T1 - Finite elements for nano-optics applications T2 - Proc. Europ. Opt. Soc. Ann. Meet. 2016 (EOSAM) Y1 - 2016 SN - 978-1-5108-4796-5 SP - 178 ER - TY - CHAP A1 - Tyminski, Jacek A1 - Pomplun, Jan A1 - Renwick, Stephen P. T1 - Impact of topographic mask models on scanner matching solutions T2 - Proc. SPIE: Optical Microlithography XXVII Y1 - 2014 U6 - https://doi.org/10.1117/12.2045919 VL - 9052 SP - 905218 ER - TY - JOUR A1 - Holzlöhner, Ronald A1 - Burger, Sven A1 - Roberts, P. A1 - Pomplun, Jan T1 - Efficient optimization of hollow-core photonic crystal fiber design using the finite-element method JF - J. Eur. Opt. Soc.-Rapid Y1 - 2006 U6 - https://doi.org/10.2971/jeos.2006.06011 VL - 1 SP - 06011 ER - TY - CHAP A1 - Kleemann, B. A1 - Kurz, J. A1 - Hetzler, J. A1 - Pomplun, Jan A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - Fast online inverse scattering with Reduced Basis Method (RBM) for a 3D phase grating with specific line roughness T2 - Modelling Aspects in Optical Metrology III Y1 - 2011 U6 - https://doi.org/10.1117/12.889364 VL - 8083 SP - 808309 PB - Proc. SPIE ER - TY - JOUR A1 - Pomplun, Jan A1 - Schmidt, Frank T1 - Accelerated a posteriori error estimation for the reduced basis method with application to 3D electromagnetic scattering problems JF - SIAM J. Sci. Comput. Y1 - 2010 U6 - https://doi.org/10.1137/090760271 VL - 32 SP - 498 EP - 520 ER - TY - CHAP A1 - Pomplun, Jan A1 - Schmidt, Frank T1 - Reduced basis method for fast and robust simulation of electromagnetic scattering problems T2 - Numerical Methods in Optical Metrology Y1 - 2009 U6 - https://doi.org/10.1117/12.827588 VL - 7390 SP - 73900I PB - Proc. SPIE ER - TY - CHAP A1 - Pomplun, Jan A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Schmidt, Frank T1 - Reduced basis method for computational lithography T2 - Photomask Technology Y1 - 2009 U6 - https://doi.org/10.1117/12.829639 VL - 7488 SP - 74882B PB - Proc. SPIE ER - TY - THES A1 - Pomplun, Jan T1 - Rigorous FEM-Simulation of Maxwell’s Equations for EUV-Lithography Y1 - 2006 UR - http://www.zib.de/Numerik/NanoOptics/publications/PubText/Pomplun06.pdf ER - TY - CHAP A1 - Scholze, Frank A1 - Laubis, Christian A1 - Ulm, Gerhard A1 - Dersch, Uwe A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank ED - Schellenberg, Frank T1 - Evaluation of EUV scatterometry for CD characterization of EUV masks using rigorous FEM-simulation T2 - Emerging Lithographic Technologies XII Y1 - 2008 VL - 6921 PB - SPIE ER - TY - CHAP A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank A1 - Scholze, Frank A1 - Laubis, Christian A1 - Dersch, Uwe ED - Horiuchi, Toshiyuki T1 - Metrology of EUV masks by EUV-scatterometry and finite element analysis T2 - Photomask and Next-Generation Lithography Mask Technology XV Y1 - 2008 VL - 7028 PB - SPIE ER - TY - CHAP A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank A1 - Zschiedrich, Lin A1 - Scholze, Frank ED - Martin, P. ED - Naber, R. T1 - Rigorous FEM-Simulation of EUV-Masks: Influence of shape and material parameters T2 - Photomask Technology Y1 - 2006 U6 - https://doi.org/10.1117/12.686828 VL - 6349 SP - 63493D PB - Proc. SPIE ER - TY - CHAP A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank A1 - Scholze, Frank A1 - Laubis, Christian A1 - Dersch, Uwe ED - Bosse, Harald T1 - Finite element analysis of EUV lithography T2 - Modeling Aspects in Optical Metrology Y1 - 2007 U6 - https://doi.org/10.1117/12.726156 VL - 6617 SP - 661718 PB - Proc. SPIE ER - TY - CHAP A1 - Schmidt, Frank A1 - Pomplun, Jan A1 - Zschiedrich, Lin A1 - Burger, Sven T1 - Fast online simulation of 3D nanophotonic structures by the reduced basis method T2 - Integrated Optics: Devices, Materials, and Technologies XV Y1 - 2011 U6 - https://doi.org/10.1117/12.874726 VL - 7941 SP - 79410G PB - Proc. SPIE ER - TY - CHAP A1 - Rozova, Maria A1 - Pomplun, Jan A1 - Zschiedrich, Lin A1 - Schmidt, Frank A1 - Burger, Sven T1 - 3D finite element simulation of optical modes in VCSELs T2 - Proc. SPIE Y1 - 2012 U6 - https://doi.org/10.1117/12.906372 VL - 8255 SP - 82550K ER - TY - CHAP A1 - Schmidt, Frank A1 - Burger, Sven A1 - Pomplun, Jan A1 - Zschiedrich, Lin ED - Greiner, Christoph ED - Wächter, Christoph T1 - Advanced FEM analysis of optical waveguides: algorithms and applications T2 - Integrated Optics Y1 - 2008 U6 - https://doi.org/10.1117/12.765720 VL - 6896 SP - 689602 PB - SPIE ER - TY - JOUR A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank A1 - Schliwa, Andrei A1 - Bimberg, Dieter A1 - Pietrzak, Agnieszka A1 - Wenzel, Hans A1 - Erbert, Götz T1 - Finite element simulation of the optical modes of semiconductor lasers JF - Phys. Status Solidi B Y1 - 2010 U6 - https://doi.org/10.1002/pssb.200945451 VL - 247 SP - 846 EP - 853 ER - TY - JOUR A1 - Pomplun, Jan A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - Adaptive finite element method for simulation of optical nano structures JF - Phys. Status Solidi B Y1 - 2007 U6 - https://doi.org/10.1002/pssb.200743192 VL - 244 SP - 3419 EP - 3434 ER - TY - CHAP A1 - Pomplun, Jan A1 - Holzlöhner, Ronald A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank ED - Adibi, Ali ED - Scherer, Axel ED - Lin, Shawn-Yu T1 - FEM investigation of leaky modes in hollow core photonic crystal fibers T2 - Proc. SPIE, Photonic Crystal Materials and Devices VI Y1 - 2007 UR - http://arxiv.org/pdf/physics/0702165 VL - 6480 SP - 64800M ER - TY - CHAP A1 - Pomplun, Jan A1 - Schmidt, Frank T1 - Reduced Basis Method for Electromagnetic Field Computations T2 - Scientific Computing in Electrical Engineering SCEE 2008 Y1 - 2010 U6 - https://doi.org/10.1007/978-3-642-12294-1_12 SP - 85 PB - Springer Berlin Heidelberg ER - TY - CHAP A1 - Pomplun, Jan A1 - Schmidt, Frank T1 - Reduced Basis Method for Nano Optical Simulations T2 - Integrated Photonics and Nanophotonics Research and Applications Y1 - 2008 SP - IWD7 PB - Optical Society of America ER - TY - CHAP A1 - Pomplun, Jan A1 - Schmidt, Frank A1 - Burger, Sven A1 - Zschiedrich, Lin T1 - Adaptive Reduced Basis Method for Optical Scattering Problems T2 - Integrated Photonics Research, Silicon and Nanophotonics Y1 - 2010 U6 - https://doi.org/10.1364/IPRSN.2010.IWD4 SP - IWD4 PB - OSA ER - TY - JOUR A1 - Pomplun, Jan A1 - Zschiedrich, Lin A1 - Klose, Roland A1 - Schmidt, Frank A1 - Burger, Sven T1 - Finite element simulation of radiation losses in photonic crystal fibers JF - phys. stat. sol. (a) Y1 - 2007 U6 - https://doi.org/10.1002/pssa.200776414 VL - 204 IS - 11 SP - 3822 EP - 3837 ER - TY - CHAP A1 - Pomplun, Jan A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - Reduced basis method for real-time inverse scatterometry T2 - Modelling Aspects in Optical Metrology III Y1 - 2011 U6 - https://doi.org/10.1117/12.889892 VL - 8083 SP - 808308 PB - Proc. SPIE ER - TY - CHAP A1 - Pomplun, Jan A1 - Wenzel, Hans A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Rozova, Maria A1 - Schmidt, Frank A1 - Crump, Paul A1 - Ekhteraei, Hossein A1 - Schultz, Christoph M. A1 - Erbert, Götz T1 - Thermo-optical simulation of high-power diode lasers T2 - Proc. SPIE Y1 - 2012 U6 - https://doi.org/10.1117/12.909330 VL - 8255 SP - 825510 ER - TY - CHAP A1 - Scholze, Frank A1 - Laubis, Christian A1 - Dersch, Uwe A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank ED - Bosse, Harald T1 - The influence of line edge roughness and CD uniformity on EUV scatterometry for CD characterization of EUV masks T2 - Modeling Aspects in Optical Metrology Y1 - 2007 VL - 6617 SP - 66171A PB - Proc. SPIE ER - TY - CHAP A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Pomplun, Jan A1 - Schmidt, Frank ED - Sidorin, Y. ED - Waechter, Ch. T1 - Goal oriented adaptive finite element method for precise simulation of optical components T2 - Proc. SPIE, Integrated Optics Y1 - 2007 UR - http://arxiv.org/pdf/physics/0702128 VL - 6475 SP - 64750H ER - TY - CHAP A1 - Zschiedrich, Lin A1 - Greiner, Horst A1 - Pomplun, Jan A1 - Hammerschmidt, Martin A1 - Burger, Sven A1 - Schmidt, Frank T1 - FEM simulations of light extraction from nanostructured organic light-emitting diodes T2 - Renewable Energy and the Environment Optics and Photonics Congress Y1 - 2012 U6 - https://doi.org/10.1364/SOLED.2012.LT2B.5 SP - LT2B.5 PB - Optical Society of America ER - TY - CHAP A1 - Tyminski, Jacek A1 - Popescu, Raluca A1 - Burger, Sven A1 - Pomplun, Jan A1 - Zschiedrich, Lin A1 - Matsuyama, Tomoyuki A1 - Noda, Tomoya ED - Conley, W. T1 - Finite element models of lithographic mask topography T2 - Proc. SPIE Y1 - 2012 U6 - https://doi.org/10.1117/12.916957 VL - 8326 SP - 83261B ER - TY - JOUR A1 - Arellano, Cristina A1 - Mingaleev, Sergei F. A1 - Koltchanov, Igor A1 - Richter, Andre A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank T1 - Efficient design of photonic integrated circuits (PICs) by combining device- and circuit- level simulation tools JF - Proc. SPIE Y1 - 2013 U6 - https://doi.org/10.1117/12.2004378 VL - 8627 SP - 862711 ER - TY - JOUR A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Blome, Mark A1 - Schmidt, Frank T1 - Advanced finite-element methods for design and analysis of nano-optical structures: Applications JF - Proc. SPIE Y1 - 2013 U6 - https://doi.org/10.1117/12.2001094 VL - 8642 SP - 864205 ER - TY - JOUR A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Schmidt, Frank A1 - Bodermann, Bernd T1 - Fast simulation method for parameter reconstruction in optical metrology JF - Proc. SPIE Y1 - 2013 U6 - https://doi.org/10.1117/12.2011154 VL - 8681 SP - 868119 ER - TY - JOUR A1 - Tyminski, Jacek A1 - Pomplun, Jan A1 - Zschiedrich, Lin A1 - Flagello, Donis A1 - Matsuyama, Tomiyuki T1 - Topographic mask modeling with reduced basis finite element method JF - Proc. SPIE Y1 - 2013 U6 - https://doi.org/10.1117/12.2011613 VL - 8683 SP - 86831C ER - TY - CHAP A1 - Wohlfeil, Benjamin A1 - Burger, Sven A1 - Stamatiadis, Christos A1 - Pomplun, Jan A1 - Schmidt, Frank A1 - Zimmermann, Lars A1 - Petermann, Klaus T1 - Numerical Simulation of Grating Couplers for Mode Multiplexed Systems T2 - Proc. SPIE Y1 - 2014 U6 - https://doi.org/10.1117/12.2044461 VL - 8988 SP - 89880K ER - TY - CHAP A1 - Pomplun, Jan A1 - Zschiedrich, Lin A1 - Klose, Roland A1 - Schmidt, Frank A1 - Burger, Sven T1 - Finite Element Simulation of Radiation Losses in Photonic Crystal Fibers T2 - Nanophotonic Materials: Photonic Crystals, Plasmonics, and Metamaterials Y1 - 2008 U6 - https://doi.org/10.1002/9783527621880.ch17 SP - 313 EP - 331 PB - Wiley-VCH ER - TY - CHAP A1 - Wenzel, Hans A1 - Crump, Paul A1 - Ekhteraei, Hossein A1 - Schultz, Christoph M. A1 - Pomplun, Jan A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank A1 - Erbert, Götz T1 - Theoretical and experimental analysis of the lateral modes of high-power broad-area lasers T2 - Numerical Simulation of Optoelectronic Devices Y1 - 2011 U6 - https://doi.org/10.1109/NUSOD.2011.6041183 SP - 143 EP - 144 ER - TY - CHAP A1 - Hammerschmidt, Martin A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank T1 - Adaptive sampling strategies for effcient parameter scans in nano-photonic device simulations T2 - Proc. SPIE Y1 - 2014 U6 - https://doi.org/10.1117/12.2036363 VL - 8980 SP - 89801O PB - SPIE ER - TY - THES A1 - Pomplun, Jan T1 - Reduced basis method for electromagnetic scattering problems Y1 - 2010 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:188-fudissthesis000000017571-3 UR - http://www.diss.fu-berlin.de/diss/receive/FUDISS_thesis_000000017571 ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Schmidt, Frank ED - Bodermann, Bernd T1 - Rigorous simulations of 3D patterns on extreme ultraviolet lithography masks T2 - Modelling Aspects in Optical Metrology III Y1 - 2011 U6 - https://doi.org/10.1117/12.889831 VL - 8083 SP - 80831B PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Schmidt, Frank A1 - Kato, Akiko A1 - Laubis, Christian A1 - Scholze, Frank T1 - Investigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical Simulations T2 - Photomask Technology 2011 Y1 - 2011 U6 - https://doi.org/10.1117/12.896839 VL - 8166 SP - 81661Q PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Pomplun, Jan A1 - Schmidt, Frank A1 - Zschiedrich, Lin T1 - Finite-element method simulations of high-Q nanocavities with 1D photonic bandgap T2 - Physics and Simulation of Optoelectronic Devices XIX Y1 - 2011 U6 - https://doi.org/10.1117/12.875044 VL - 7933 SP - 79330T PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Schmidt, Frank A1 - Kettner, Benjamin A1 - Lockau, D. T1 - 3D Finite-Element Simulations of Enhanced Light Transmission Through Arrays of Holes in Metal Films T2 - Numerical Methods in Optical Metrology Y1 - 2009 U6 - https://doi.org/10.1117/12.827543 VL - 7390 SP - 73900H PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Schmidt, Frank T1 - Finite element method for accurate 3D simulation of plasmonic waveguides T2 - Integrated Optics: Devices, Materials, and Technologies XIV Y1 - 2010 U6 - https://doi.org/10.1117/12.841995 VL - 7604 SP - 76040F PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Schmidt, Frank T1 - JCMsuite: An Adaptive FEM Solver for Precise Simulations in Nano-Optics T2 - Integrated Photonics and Nanophotonics Research and Applications Y1 - 2008 U6 - https://doi.org/10.1364/IPNRA.2008.ITuE4 SP - ITuE4 PB - Optical Society of America ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schädle, Achim A1 - Klose, Roland A1 - Kettner, Benjamin A1 - Pomplun, Jan A1 - Pollok, T. A1 - Schmidt, Frank T1 - Advanced FEM Analysis of Nano-Optical Devices T2 - Proc. Symposium on Photonics Technologies for the 7th Framework Programme Y1 - 2006 ER - TY - CHAP A1 - Burger, Sven A1 - Pomplun, Jan A1 - Schmidt, Frank ED - Bhushan, B. T1 - Finite Element Methods for Computational Nano-optics T2 - Encyclopedia of Nanotechnology Y1 - 2012 U6 - https://doi.org/10.1007/978-90-481-9751-4_17 SP - 837 EP - 843 PB - Springer Netherlands ER - TY - CHAP A1 - Pomplun, Jan A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Schmidt, Frank A1 - Tyminski, Jacek A1 - Flagello, Donis A1 - Toshiharu, N. T1 - Reduced basis method for source mask optimization T2 - Photomask Technology Y1 - 2010 U6 - https://doi.org/10.1117/12.866101 VL - 7823 SP - 78230E PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Gutsche, Philipp A1 - Hammerschmidt, Martin A1 - Herrmann, Sven A1 - Pomplun, Jan A1 - Schmidt, Frank A1 - Wohlfeil, Benjamin A1 - Zschiedrich, Lin T1 - Hp-finite-elements for simulating electromagnetic fields in optical devices with rough textures T2 - Proc. SPIE Y1 - 2015 U6 - https://doi.org/10.1117/12.2190119 VL - 9630 SP - 96300S ER - TY - GEN A1 - Hammerschmidt, Martin A1 - Herrmann, Sven A1 - Pomplun, Jan A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Schmidt, Frank T1 - Reduced basis method for Maxwell's equations with resonance phenomena T2 - Proc. SPIE N2 - Rigorous optical simulations of 3-dimensional nano-photonic structures are an important tool in the analysis and optimization of scattering properties of nano-photonic devices or parameter reconstruction. To construct geometrically accurate models of complex structured nano-photonic devices the finite element method (FEM) is ideally suited due to its flexibility in the geometrical modeling and superior convergence properties. Reduced order models such as the reduced basis method (RBM) allow to construct self-adaptive, error-controlled, very low dimensional approximations for input-output relationships which can be evaluated orders of magnitude faster than the full model. This is advantageous in applications requiring the solution of Maxwell's equations for multiple parameters or a single parameter but in real time. We present a reduced basis method for 3D Maxwell's equations based on the finite element method which allows variations of geometric as well as material and frequency parameters. We demonstrate accuracy and efficiency of the method for a light scattering problem exhibiting a resonance in the electric field. T3 - ZIB-Report - 15-37 KW - reduced basis method KW - finite element method KW - maxwell equation KW - photonic crystal KW - nano-photonics Y1 - 2015 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:0297-zib-55687 SN - 1438-0064 VL - 9630 SP - 96300R ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Herrmann, Sven A1 - Schmidt, Frank T1 - hp-finite element method for simulating light scattering from complex 3D structures T2 - Proc. SPIE Y1 - 2015 U6 - https://doi.org/10.1117/12.2085795 VL - 9424 SP - 94240Z ER - TY - GEN A1 - Hammerschmidt, Martin A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank T1 - Adaptive sampling strategies for efficient parameter scans in nano-photonic device simulations N2 - Rigorous optical simulations are an important tool in optimizing scattering properties of nano-photonic devices and are used, for example, in solar cell optimization. The finite element method (FEM) yields rigorous, time-harmonic, high accuracy solutions of the full 3D vectorial Maxwell's equations [1] and furthermore allows for great flexibility and accuracy in the geometrical modeling of these often complex shaped 3D nano-structures. A major drawback of frequency domain methods is the limitation of single frequency evaluations. For example the accurate computation of the short circuit current density of an amorphous silicon / micro-crystalline multi-junction thin film solar cell may require the solution of Maxwell's equations for over a hundred different wavelengths if an equidistant sampling strategy is employed. Also in optical metrology, wavelength scans are frequently used to reconstruct unknown geometrical and material properties of optical systems numerically from measured scatterometric data. In our contribution we present several adaptive numerical integration and sampling routines and study their efficiency in the context of the determination of generation rate profiles of solar cells. We show that these strategies lead to a reduction in the computational effort without loss of accuracy. We discuss the employment of tangential information in a Hermite interpolation scheme to achieve similar accuracy on coarser grids. We explore the usability of these strategies for scatterometry and solar cell simulations. T3 - ZIB-Report - 14-20 KW - finite element method KW - optical simulations KW - adaptive sampling KW - optical metrology KW - parameter scans KW - solar cells Y1 - 2014 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:0297-zib-50395 SN - 1438-0064 ER - TY - GEN A1 - Hammerschmidt, Martin A1 - Herrmann, Sven A1 - Burger, Sven A1 - Pomplun, Jan A1 - Schmidt, Frank T1 - Reduced basis method for the optimization of nano-photonic devices N2 - Optical 3D simulations in many-query and real-time contexts require new solution strategies. We study an adaptive, error controlled reduced basis method for solving parametrized time-harmonic optical scattering problems. Application fields are, among others, design and optimization problems of nano-optical devices as well as inverse problems for parameter reconstructions occuring e. g. in optical metrology. The reduced basis method presented here relies on a finite element modeling of the scattering problem with parametrization of materials, geometries and sources. T3 - ZIB-Report - 16-10 KW - reduced basis method KW - model reduction KW - optical critical dimension metrology KW - electromagnetic field solver Y1 - 2016 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:0297-zib-57556 SN - 1438-0064 ER - TY - GEN A1 - Hammerschmidt, Martin A1 - Herrmann, Sven A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank T1 - Model order reduction for the time-harmonic Maxwell equation applied to complex nanostructures T2 - Proc. SPIE N2 - Fields such as optical metrology and computational lithography require fast and efficient methods for solving the time-harmonic Maxwell’s equation. Highly accurate geometrical modeling and numerical accuracy atcomputational costs are a prerequisite for any simulation study of complex nano-structured photonic devices. We present a reduced basis method (RBM) for the time-harmonic electromagnetic scattering problem based on the hp-adaptive finite element solver JCMsuite capable of handling geometric and non-geometric parameter dependencies allowing for online evaluations in milliseconds. We apply the RBM to compute light-scatteringoptical wavelengths off periodic arrays of fin field-effect transistors (FinFETs) where geometrical properties such as the width and height of the fin and gate can vary in a large range. T3 - ZIB-Report - 16-05 KW - reduced basis method KW - finite element method KW - rigorous optical modeling KW - reduced order models KW - electromagnetic field solver Y1 - 2016 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:0297-zib-57239 SN - 1438-0064 VL - 9742 SP - 97420M ER - TY - GEN A1 - Hammerschmidt, Martin A1 - Barth, Carlo A1 - Pomplun, Jan A1 - Burger, Sven A1 - Becker, Christiane A1 - Schmidt, Frank T1 - Reconstruction of photonic crystal geometries using a reduced basis method for nonlinear outputs N2 - Maxwell solvers based on the hp-adaptive finite element method allow for accurate geometrical modeling and high numerical accuracy. These features are indispensable for the optimization of optical properties or reconstruction of parameters through inverse processes. High computational complexity prohibits the evaluation of the solution for many parameters. We present a reduced basis method (RBM) for the time-harmonic electromagnetic scattering problem allowing to compute solutions for a parameter configuration orders of magnitude faster. The RBM allows to evaluate linear and nonlinear outputs of interest like Fourier transform or the enhancement of the electromagnetic field in milliseconds. We apply the RBM to compute light-scattering off two dimensional photonic crystal structures made of silicon and reconstruct geometrical parameters. T3 - ZIB-Report - 16-06 KW - finite element method KW - rigorous optical modeling KW - photonic crystals KW - reduced basis method KW - parameter estimation KW - optical metrology Y1 - 2016 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:0297-zib-57249 SN - 1438-0064 ER - TY - CHAP A1 - Burger, Sven A1 - Hammerschmidt, Martin A1 - Herrmann, Sven A1 - Pomplun, Jan A1 - Schmidt, Frank T1 - Reduced basis methods for optimization of nano-photonic devices T2 - Proc. Int. Conf. Numerical Simulation of Optoelectronic Devices (NUSOD) Y1 - 2015 U6 - https://doi.org/10.1109/NUSOD.2015.7292871 SP - 159 ER - TY - JOUR A1 - Pomplun, Jan A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Gutsche, Philipp A1 - Schmidt, Frank T1 - Method for fast computation of angular light scattering spectra from 2D periodic arrays JF - Proc. SPIE Y1 - 2016 U6 - https://doi.org/10.1117/12.2219666 VL - 9778 SP - 977839 ER - TY - JOUR A1 - Hammerschmidt, Martin A1 - Barth, Carlo A1 - Pomplun, Jan A1 - Burger, Sven A1 - Becker, Christiane A1 - Schmidt, Frank T1 - Reconstruction of photonic crystal geometries using a reduced basis method for nonlinear outputs JF - Proc. SPIE N2 - Maxwell solvers based on the hp-adaptive finite element method allow for accurate geometrical modeling and high numerical accuracy. These features are indispensable for the optimization of optical properties or reconstruction of parameters through inverse processes. High computational complexity prohibits the evaluation of the solution for many parameters. We present a reduced basis method (RBM) for the time-harmonic electromagnetic scattering problem allowing to compute solutions for a parameter configuration orders of magnitude faster. The RBM allows to evaluate linear and nonlinear outputs of interest like Fourier transform or the enhancement of the electromagnetic field in milliseconds. We apply the RBM to compute light-scattering off two dimensional photonic crystal structures made of silicon and reconstruct geometrical parameters. Y1 - 2016 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:0297-zib-58187 VL - 9756 SP - 97561R ER - TY - JOUR A1 - Hammerschmidt, Martin A1 - Herrmann, Sven A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank T1 - Model order reduction for the time-harmonic Maxwell equation applied to complex nanostructures JF - Proc. SPIE N2 - Fields such as optical metrology and computational lithography require fast and efficient methods for solving the time-harmonic Maxwell's equation. Highly accurate geometrical modelling and numerical accuracy at low computational costs are a prerequisite for any simulation study of complex nano-structured photonic devices. We present a reduced basis method (RBM) for the time-harmonic electromagnetic scattering problem based on the hp-adaptive finite element solver JCMsuite capable of handling geometric and non-geometric parameter dependencies allowing for online evaluations in milliseconds. We apply the RBM to compute light-scattering at optical wavelengths of periodic arrays of fin field-effect transistors (FinFETs) where geometrical properties such as the width and height of the fin and gate can vary in a large range. Y1 - 2016 U6 - https://doi.org/10.1117/12.2212367 VL - 9742 SP - 97420M ER - TY - JOUR A1 - Hammerschmidt, Martin A1 - Herrmann, Sven A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank T1 - Reduced basis method for electromagnetic scattering problem: a case study for FinFETs JF - Optical and Quantum Electronics N2 - Optical 3D simulations in many-query and real-time contexts require new solution strategies. We study an adaptive, error controlled reduced basis method for solving parametrized time-harmonic optical scattering problems. Application fields are, among others, design and optimization problems of nano-optical devices as well as inverse problems for parameter reconstructions occurring e. g. in optical metrology. The reduced basis method pre- sented here relies on a finite element modeling of the scattering problem with parametrization of materials, geometries and sources. Y1 - 2016 U6 - https://doi.org/10.1007/s11082-016-0530-1 VL - 48 SP - 250 ER -