TY - JOUR A1 - Hammerschmidt, Martin A1 - Schneider, Philipp-Immanuel A1 - Santiago, Xavier Garcia A1 - Zschiedrich, Lin A1 - Weiser, Martin A1 - Burger, Sven T1 - Solving inverse problems appearing in design and metrology of diffractive optical elements by using Bayesian optimization JF - Proc. SPIE Y1 - 2018 U6 - https://doi.org/10.1117/12.2315468 VL - 10694 SP - 1069407 ER - TY - GEN A1 - Hammerschmidt, Martin A1 - Weiser, Martin A1 - Santiago, Xavier Garcia A1 - Zschiedrich, Lin A1 - Bodermann, Bernd A1 - Burger, Sven T1 - Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion N2 - We present a Newton-like method to solve inverse problems and to quantify parameter uncertainties. We apply the method to parameter reconstruction in optical scatterometry, where we take into account a priori information and measurement uncertainties using a Bayesian approach. Further, we discuss the influence of numerical accuracy on the reconstruction result. T3 - ZIB-Report - 17-37 KW - computational metrology KW - optical metrology KW - computational lithography KW - nanolithography KW - finite- element methods KW - nanooptics Y1 - 2017 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:0297-zib-64704 SN - 1438-0064 ER - TY - JOUR A1 - Hammerschmidt, Martin A1 - Weiser, Martin A1 - Santiago, Xavier Garcia A1 - Zschiedrich, Lin A1 - Bodermann, Bernd A1 - Burger, Sven T1 - Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion JF - Proc. SPIE Y1 - 2017 U6 - https://doi.org/10.1117/12.2270596 VL - 10330 SP - 1033004 ER - TY - CHAP A1 - Barth, Carlo A1 - Roder, Sebastian A1 - Brodoceanu, Daniel A1 - Kraus, Tobias A1 - Burger, Sven A1 - Hammerschmidt, Martin A1 - Schmidt, Frank A1 - Becker, Christiane T1 - Increased fluorescence of PbS quantum dots on photonic crystal slab structures T2 - Proc. Europ. Opt. Soc. Ann. Meet. 2016 (EOSAM) Y1 - 2016 SN - 978-1-5108-4796-5 SP - 181 ER - TY - CHAP A1 - Hammerschmidt, Martin A1 - Barth, Carlo A1 - Burger, Sven A1 - Becker, Christiane A1 - Schmidt, Frank T1 - Determining 2D photonic crystal geometries from reflectance spectra with a reduced basis method T2 - Proc. Europ. Opt. Soc. Ann. Meet. 2016 (EOSAM) Y1 - 2016 SN - 978-1-5108-4796-5 SP - 281 ER - TY - JOUR A1 - Schneider, Philipp-Immanuel A1 - Hammerschmidt, Martin A1 - Zschiedrich, Lin A1 - Burger, Sven T1 - Using Gaussian process regression for efficient parameter reconstruction JF - Proc. SPIE Y1 - 2019 U6 - https://doi.org/10.1117/12.2513268 VL - 10959 SP - 1095911 ER - TY - JOUR A1 - Schneider, Philipp-Immanuel A1 - Santiago, Xavier Garcia A1 - Soltwisch, Victor A1 - Hammerschmidt, Martin A1 - Burger, Sven A1 - Rockstuhl, Carsten T1 - Benchmarking five global optimization approaches for nano-optical shape optimization and parameter reconstruction JF - ACS Photonics Y1 - 2019 U6 - https://doi.org/10.1021/acsphotonics.9b00706 VL - 6 SP - 2726 ER - TY - CHAP A1 - Jäger, Klaus A1 - Manley, Phillip A1 - Eisenhauer, David A1 - Tockhorn, Philipp A1 - Sutter, Johannes A1 - Hammerschmidt, Martin A1 - Burger, Sven A1 - Albrecht, Steve A1 - Becker, Christiane T1 - Light management with sinusoidal nanotextures T2 - Light, Energy and the Environment 2018 Y1 - 2018 U6 - https://doi.org/10.1364/OSE.2018.OT5C.5 SP - OT5C.5 ER - TY - JOUR A1 - Pflüger, Mika A1 - Kline, R. Joseph A1 - Fernández Herrero, Analia A1 - Hammerschmidt, Martin A1 - Soltwisch, Victor A1 - Krumrey, Michael T1 - Extracting dimensional parameters of gratings produced with self-aligned multiple patterning using grazing-incidence small-angle x-ray scattering JF - J. Micro Nanolithogr. MEMS MOEMS Y1 - 2020 U6 - https://doi.org/10.1117/1.JMM.19.1.014001 VL - 19 SP - 014001 ER - TY - CHAP A1 - Jäger, Klaus A1 - Hammerschmidt, Martin A1 - Köppel, Grit A1 - Burger, Sven A1 - Becker, Christiane T1 - On Accurate Simulations of Thin-Film Solar Cells With a Thick Glass Superstrate T2 - Light, Energy and the Environment 2016 Y1 - 2016 U6 - https://doi.org/10.1364/PV.2016.PM3B.5 SP - PM3B.5 ER - TY - CHAP A1 - Hammerschmidt, Martin A1 - Lockau, Daniel A1 - Burger, Sven A1 - Schmidt, Frank A1 - Schwanke, Christoph A1 - Kirner, Simon A1 - Calnan, Sonya A1 - Stannowski, Bernd A1 - Rech, Bernd T1 - 3D optical modeling of thin-film a-Si/mc-Si tandem solar cells with random textured interfaces using FEM T2 - Renewable Energy and the Environment Optics and Photonics Congress Y1 - 2012 U6 - https://doi.org/10.1364/E2.2012.JM5A.15 SP - JM5A.15 PB - Optical Society of America ER - TY - CHAP A1 - Zschiedrich, Lin A1 - Greiner, Horst A1 - Pomplun, Jan A1 - Hammerschmidt, Martin A1 - Burger, Sven A1 - Schmidt, Frank T1 - FEM simulations of light extraction from nanostructured organic light-emitting diodes T2 - Renewable Energy and the Environment Optics and Photonics Congress Y1 - 2012 U6 - https://doi.org/10.1364/SOLED.2012.LT2B.5 SP - LT2B.5 PB - Optical Society of America ER - TY - JOUR A1 - Hammerschmidt, Martin A1 - Lockau, Daniel A1 - Burger, Sven A1 - Schmidt, Frank A1 - Schwanke, Christoph A1 - Kirner, Simon A1 - Calnan, Sonya A1 - Stannowski, Bernd A1 - Rech, Bernd T1 - FEM-based optical modeling of silicon thin-film tandem solar cells with randomly textured interfaces in 3D JF - Proc. SPIE Y1 - 2013 U6 - https://doi.org/10.1117/12.2001789 VL - 8620 SP - 86201H ER - TY - JOUR A1 - Lockau, Daniel A1 - Sontheimer, Tobias A1 - Preidel, Veit A1 - Ruske, Florian A1 - Hammerschmidt, Martin A1 - Becker, Christiane A1 - Schmidt, Frank A1 - Rech, Bernd T1 - Advanced microhole arrays for light trapping in thin film silicon solar cells JF - Solar Energy Materials and Solar Cells Y1 - 2014 U6 - https://doi.org/10.1016/j.solmat.2013.11.024 VL - 125 SP - 298 EP - 304 ER - TY - JOUR A1 - Kirner, Simon A1 - Hammerschmidt, Martin A1 - Schwanke, Christoph A1 - Lockau, Daniel A1 - Calnan, Sonya A1 - Frijnts, Tim A1 - Neubert, Sebastian A1 - Schöpke, Andreas A1 - Schmidt, Frank A1 - Zollondz, Jens-Hendrik A1 - Heidelberg, Andreas A1 - Stannowski, Bernd A1 - Rech, Bernd A1 - Schlatmann, Rutger T1 - Implications of TCO Topography on Intermediate Reflector Design for a-Si/μc-Si Tandem Solar Cells — Experiments and Rigorous Optical Simulations JF - IEEE Journal of Photovoltaics Y1 - 2014 U6 - https://doi.org/10.1109/JPHOTOV.2013.2279204 VL - 4 IS - 1 SP - 10 EP - 15 ER - TY - CHAP A1 - Hammerschmidt, Martin A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank T1 - Adaptive sampling strategies for effcient parameter scans in nano-photonic device simulations T2 - Proc. SPIE Y1 - 2014 U6 - https://doi.org/10.1117/12.2036363 VL - 8980 SP - 89801O PB - SPIE ER - TY - CHAP A1 - Hammerschmidt, Martin A1 - Lockau, Daniel A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - Optical modelling of incoherent substrate light-trapping in silicon thin film multi-junction solar cells with finite elements and domain decomposition T2 - Proc. SPIE: Physics and Simulation of Optoelectronic Devices XXII Y1 - 2014 U6 - https://doi.org/10.1117/12.2036346 VL - 8980 SP - 898007 PB - SPIE ER - TY - CHAP A1 - Jäger, Klaus A1 - Barth, Carlo A1 - Hammerschmidt, Martin A1 - Herrmann, Sven A1 - Burger, Sven A1 - Schmidt, Frank A1 - Becker, Christiane ED - European Society for Quantum Solar Energy Conversion, T1 - Sinusoidal Nanotextures for Enhanced Light Management in Thin-Film Solar Cells T2 - 28th Workshop on Quantum Solar Energy Conversion - (QUANTSOL) Y1 - 2016 ER - TY - JOUR A1 - Barth, Carlo A1 - Probst, Jürgen A1 - Herrmann, Sven A1 - Hammerschmidt, Martin A1 - Becker, Christiane T1 - Numerical characterization of symmetry properties for photonic crystals with hexagonal lattice JF - Proc. SPIE N2 - We present a numerical method to characterize the symmetry properties of photonic crystal (PhC) modes based on field distributions, which themselves can be obtained numerically. These properties can be used to forecast specific features of the optical response of such systems, e.g. which modes are allowed to couple to external radiation fields. We use 2D PhCs with a hexagonal lattice of holes in dielectric as an example and apply our technique to reproduce results from analytical considerations. Further, the method is extended to fully vectorial problems in view of 3D PhCs and PhC slabs, its functionality is demonstrated using test cases and, finally, we provide an efficient implementation. The technique can thus readily be applied to output data of all band structure computation methods or even be embedded – gaining additional information about the mode symmetry. Y1 - 2016 U6 - https://doi.org/10.1117/12.2227094 VL - 9885 SP - 988506 ER - TY - JOUR A1 - Jäger, Klaus A1 - Köppel, Grit A1 - Barth, Carlo A1 - Hammerschmidt, Martin A1 - Herrmann, Sven A1 - Burger, Sven A1 - Schmidt, Frank A1 - Becker, Christiane T1 - Sinusoidal gratings for optimized light management in c-Si thin-film solar cells JF - Proc. SPIE Y1 - 2016 U6 - https://doi.org/10.1117/12.2225459 VL - 9898 SP - 989808 ER -