TY - CHAP A1 - Bodermann, Bernd A1 - Hansen, Poul-Erik A1 - Burger, Sven A1 - Henn, Mark-Alexander A1 - Gross, Hermann A1 - Bär, Markus A1 - Scholze, Frank A1 - Endres, Johannes A1 - Wurm, Matthias T1 - First steps towards a scatterometry reference standard T2 - Proc. SPIE Y1 - 2012 U6 - https://doi.org/10.1117/12.929903 VL - 8466 SP - 84660E ER - TY - CHAP A1 - Heckel, R. A1 - Ehrig, Hartmut A1 - Golas, Ulrike A1 - Hermann, Frank ED - Ehrig, Hartmut ED - Engels, G. ED - Kreowski, H.-J. ED - Rozenberg, G. T1 - Parallelism and Concurrency of Stochastic Graph Transformations T2 - Proceedings of ICGT 2012 Y1 - 2012 U6 - https://doi.org/10.1007/978-3-642-33654-6_7 VL - 7562 SP - 96 EP - 110 PB - Springer ER -