TY - JOUR A1 - Fodor, Bálint A1 - Kozma, Peter A1 - Burger, Sven A1 - Fried, Miklos A1 - Petrik, Peter T1 - Effective medium approximation of ellipsometric response from random surface roughness simulated by finite-element method JF - Thin Solid Films Y1 - 2016 U6 - https://doi.org/10.1016/j.tsf.2016.01.054 VL - 617 SP - 20 ER - TY - JOUR A1 - Petrik, Peter A1 - Kumar, Nitish A1 - Fried, Miklos A1 - Fodor, Bálint A1 - Juhász, György A1 - Pereira, Silvania A1 - Burger, Sven A1 - Urbach, H. Paul T1 - Fourier ellipsometry – an ellipsometric approach to Fourier scatterometry JF - J. Eur. Opt. Soc.-Rapid Y1 - 2015 U6 - https://doi.org/10.2971/jeos.2015.15002 VL - 10 SP - 15002 ER -