TY - CHAP A1 - Agcos, Emil A1 - Bodermann, Bernd A1 - Burger, Sven A1 - Dai, Gaoliang A1 - Endres, Johannes A1 - Hansen, Poul-Erik A1 - Nielson, Lars A1 - Madsen, Morten A1 - Heidenreich, Sebastian A1 - Krumrey, Michael A1 - Loechel, Bernd A1 - Probst, Jürgen A1 - Scholze, Frank A1 - Soltwisch, Victor A1 - Wurm, Matthias T1 - Scatterometry reference standards to improve tool matching and traceability in lithographical nanomanufacturing T2 - Proc. SPIE Y1 - 2015 U6 - https://doi.org/10.1117/12.2190409 VL - 9556 SP - 955610 ER - TY - CHAP A1 - Bodermann, Bernd A1 - Hansen, Poul-Erik A1 - Burger, Sven A1 - Henn, Mark-Alexander A1 - Gross, Hermann A1 - Bär, Markus A1 - Scholze, Frank A1 - Endres, Johannes A1 - Wurm, Matthias T1 - First steps towards a scatterometry reference standard T2 - Proc. SPIE Y1 - 2012 U6 - https://doi.org/10.1117/12.929903 VL - 8466 SP - 84660E ER - TY - CHAP A1 - Scholze, Frank A1 - Bodermann, Bernd A1 - Burger, Sven A1 - Endres, Johannes A1 - Haase, Anton A1 - Krumrey, Michael A1 - Laubis, Christian A1 - Soltwisch, Victor A1 - Ullrich, Albrecht A1 - Wernecke, Jan T1 - Determination of line profiles on photomasks using DUV, EUV and X-ray scattering T2 - Proc. SPIE Y1 - 2014 U6 - https://doi.org/10.1117/12.2065941 VL - 9231 SP - 92310M ER - TY - CHAP A1 - Krüger, Jan A1 - Manley, Phillip A1 - Zschiedrich, Lin A1 - Hammerschmidt, Martin A1 - Schneider, Philipp-Immanuel A1 - Köning, Rainer A1 - Bodermann, Bernd T1 - Untersuchung des Schwingungseinflusses auf gemessene Punktspreizfunktionen in der optischen Mikroskopie T2 - Proc. DGaO Y1 - 2022 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:0287-2022-P005-6 SP - P5 ER - TY - CHAP A1 - Manley, Phillip A1 - Krüger, Jan A1 - Zschiedrich, Lin A1 - Hammerschmidt, Martin A1 - Bodermann, Bernd A1 - Köning, Rainer A1 - Schneider, Philipp-Immanuel T1 - Elementary, my dear Zernike: model order reduction for accelerating optical dimensional microscopy T2 - EPJ Web Conf. Y1 - 2022 U6 - https://doi.org/10.1051/epjconf/202226610010 VL - 266 SP - 10010 ER - TY - CHAP A1 - Manley, Phillip A1 - Krüger, Jan A1 - Bodermann, Bernd A1 - Köning, Rainer A1 - Heinrich, Andreas A1 - Eder, Christian A1 - Goehnermeier, Aksel A1 - Zeiser, Ulrike A1 - Hammerschmidt, Martin A1 - Zschiedrich, Lin A1 - Schneider, Philipp-Immanuel T1 - Efficient simulation of microscopic imaging for reconstruction of nanostructures T2 - Proc. SPIE Y1 - 2023 U6 - https://doi.org/10.1117/12.2673077 VL - PC12619 SP - PC126190B ER - TY - CHAP A1 - Krüger, Jan A1 - Bodermann, Bernd A1 - Köning, Rainer A1 - Manley, Phillip A1 - Zschiedrich, Lin A1 - Schneider, Philipp-Immanuel A1 - Heinrich, Andreas A1 - Eder, Christian A1 - Zeiser, Ulrike A1 - Goehnermeier, Aksel T1 - On aberration retrieval for optical microscopes in length metrology T2 - Proc. SPIE Y1 - 2023 U6 - https://doi.org/10.1117/12.2672294 VL - PC12619 SP - PC126190A ER -