TY - JOUR A1 - Kato, Akiko A1 - Burger, Sven A1 - Scholze, Frank T1 - Analytical modeling and 3D finite element simulation of line edge roughness in scatterometry JF - Appl. Optics Y1 - 2012 U6 - https://doi.org/10.1364/AO.51.006457 VL - 51 SP - 6457 EP - 6464 ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Schmidt, Frank A1 - Kato, Akiko A1 - Laubis, Christian A1 - Scholze, Frank T1 - Investigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical Simulations T2 - Photomask Technology 2011 Y1 - 2011 U6 - https://doi.org/10.1117/12.896839 VL - 8166 SP - 81661Q PB - Proc. SPIE ER -