TY - CHAP A1 - Zschiedrich, Lin A1 - Schmidt, Frank ED - Horiuchi, Toshiyuki T1 - Finite element simulation of light propagation in non-periodic mask patterns T2 - Photomask and Next-Generation Lithography Mask Technology XV Y1 - 2008 UR - http://arxiv.org/pdf/0804.2587v1 VL - 7028 PB - SPIE ER - TY - CHAP A1 - Zschiedrich, Lin A1 - Schmidt, Frank A1 - Pomplun, Jan A1 - Burger, Sven T1 - Finite elements for nano-optics applications T2 - Proc. Europ. Opt. Soc. Ann. Meet. 2016 (EOSAM) Y1 - 2016 SN - 978-1-5108-4796-5 SP - 178 ER -