TY - CHAP A1 - Burger, Sven A1 - Kleemann, B. A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - Finite-Element Simulations of Light Propagation through Circular Subwavelength Apertures T2 - Microtechnologies for the New Millenium Y1 - 2009 U6 - https://doi.org/10.1117/12.822828 VL - 7366 SP - 736621 PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Köhle, Roderick A1 - Zschiedrich, Lin A1 - Nguyen, H. A1 - Schmidt, Frank A1 - März, Reinhard A1 - Nölscher, Christoph ED - Martin, P. ED - Naber, R. T1 - Rigorous Simulation of 3D Masks T2 - Photomask Technology Y1 - 2006 UR - http://arxiv.org/pdf/physics/0610218 VL - 6349 SP - 63494Z PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Köhle, Roderick A1 - Zschiedrich, Lin A1 - Gao, W. A1 - Schmidt, Frank A1 - März, Reinhard A1 - Nölscher, Christoph ED - Weed, J. ED - Martin, P. T1 - Benchmark of FEM, Waveguide and FDTD Algorithms for Rigorous Mask Simulation T2 - Photomask Technology Y1 - 2005 U6 - https://doi.org/10.1117/12.631696 VL - 5992 SP - 378 EP - 389 PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Lockau, D. A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - Finite-element simulations of light propagation through subwavelength apertures in metal films T2 - International Workshop on Optical Waveguide Theory and Numerical Modelling Y1 - 2009 VL - XVIII SP - 59 PB - Fraunhofer Institute for Applied Optics and Precision Engineering ER - TY - CHAP A1 - Burger, Sven A1 - Schmidt, Frank A1 - Zschiedrich, Lin T1 - A fast and efficient Finite-Element Solver for 2D and 3D Photonic Band-Gap Problems T2 - Dig. LEOS/IEEE 2003 Summer Topicals Y1 - 2003 U6 - https://doi.org/10.1109/LEOSST.2003.1224282 SP - 75 ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - 3D FEM Simulations of High-Q Resonances in Photonic Crystal Microcavities T2 - Integrated Photonics Research, Silicon and Nanophotonics Y1 - 2010 U6 - https://doi.org/10.1364/IPRSN.2010.IWB7 SP - IWB7 PB - OSA ER - TY - CHAP A1 - Burger, Sven A1 - Schmidt, Frank A1 - Zschiedrich, Lin ED - Jena, Friedrich-Schiller-Universität T1 - FEM simulation of resonances in low-Q cavities for plasmon lasers T2 - International Workshop on Photonic Nanomaterials Y1 - 2010 SN - 978-3-00-031358-5 SP - 36 ER - TY - CHAP A1 - Burger, Sven A1 - Schmidt, Frank A1 - Zschiedrich, Lin T1 - Numerical investigation of optical resonances in circular grating resonators T2 - Silicon Photonics V Y1 - 2010 U6 - https://doi.org/10.1117/12.842061 VL - 7606 SP - 760610 PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Schmidt, Frank A1 - Zschiedrich, Lin T1 - Numerical Investigation of Photonic Crystal Microcavities in Silicon-on-Insulator Waveguides T2 - Photonic and Phononic Crystal Materials and Devices X Y1 - 2010 U6 - https://doi.org/10.1117/12.841867 VL - 7609 SP - 76091Q PB - Proc. SPIE ER - TY - CHAP A1 - Pomplun, Jan A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Schmidt, Frank A1 - Tyminski, Jacek A1 - Flagello, Donis A1 - Toshiharu, N. T1 - Reduced basis method for source mask optimization T2 - Photomask Technology Y1 - 2010 U6 - https://doi.org/10.1117/12.866101 VL - 7823 SP - 78230E PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Schädle, Achim A1 - Zschiedrich, Lin A1 - Schmidt, Frank ED - Andrews, David L. ED - Nunzi, Jean-Michel ED - Ostendorf, Andreas T1 - Advanced FEM Analysis of Nano-Optical Devices T2 - Nanophotonics Y1 - 2006 U6 - https://doi.org/10.1117/12.662942 VL - 6195 SP - 72 EP - 82 PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Klose, Roland A1 - Schädle, Achim A1 - Schmidt, Frank A1 - Enkrich, Christian A1 - Linden, S. A1 - Wegener, M. A1 - Soukoulis, C. ED - Szoplik, T. ED - Özbay, E. ED - Soukoulis, C. ED - Zheludev, N. T1 - Numerical Investigation of Light Scattering off Split-Ring Resonators T2 - Metamaterials Y1 - 2005 U6 - https://doi.org/10.1117/12.622184 VL - 5955 SP - 18 EP - 26 PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Schmidt, Frank A1 - Kettner, Benjamin A1 - Lockau, D. T1 - 3D Finite-Element Simulations of Enhanced Light Transmission Through Arrays of Holes in Metal Films T2 - Numerical Methods in Optical Metrology Y1 - 2009 U6 - https://doi.org/10.1117/12.827543 VL - 7390 SP - 73900H PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Schmidt, Frank T1 - Finite element method for accurate 3D simulation of plasmonic waveguides T2 - Integrated Optics: Devices, Materials, and Technologies XIV Y1 - 2010 U6 - https://doi.org/10.1117/12.841995 VL - 7604 SP - 76040F PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Schmidt, Frank T1 - JCMsuite: An Adaptive FEM Solver for Precise Simulations in Nano-Optics T2 - Integrated Photonics and Nanophotonics Research and Applications Y1 - 2008 U6 - https://doi.org/10.1364/IPNRA.2008.ITuE4 SP - ITuE4 PB - Optical Society of America ER - TY - CHAP A1 - Burger, Sven A1 - Klose, Roland A1 - März, Reinhard A1 - Schädle, Achim A1 - Schmidt, Frank A1 - Zschiedrich, Lin T1 - Efficient Finite Element Methods for the Design of Microoptical Components T2 - Proc. Microoptics Conf. 2004 Y1 - 2004 ER - TY - CHAP A1 - Burger, Sven A1 - Klose, Roland A1 - Schädle, Achim A1 - Schmidt, Frank A1 - Zschiedrich, Lin ED - Sidorin, Y. ED - Wächter, Christoph T1 - FEM modelling of 3D photonic crystals and photonic crystal waveguides T2 - Integrated Optics : Devices, Materials and Technologies IX Y1 - 2005 U6 - https://doi.org/10.1117/12.585895 VL - 5728 SP - 164 EP - 173 PB - Proc. SPIE ER - TY - CHAP A1 - Scholze, Frank A1 - Laubis, Christian A1 - Dersch, Uwe A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank ED - Bosse, Harald T1 - The influence of line edge roughness and CD uniformity on EUV scatterometry for CD characterization of EUV masks T2 - Modeling Aspects in Optical Metrology Y1 - 2007 VL - 6617 SP - 66171A PB - Proc. SPIE ER - TY - CHAP A1 - Pomplun, Jan A1 - Schmidt, Frank T1 - Reduced basis method for fast and robust simulation of electromagnetic scattering problems T2 - Numerical Methods in Optical Metrology Y1 - 2009 U6 - https://doi.org/10.1117/12.827588 VL - 7390 SP - 73900I PB - Proc. SPIE ER - TY - CHAP A1 - Pomplun, Jan A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Schmidt, Frank T1 - Reduced basis method for computational lithography T2 - Photomask Technology Y1 - 2009 U6 - https://doi.org/10.1117/12.829639 VL - 7488 SP - 74882B PB - Proc. SPIE ER -