TY - CHAP A1 - Manley, Phillip A1 - Krüger, Jan A1 - Bodermann, Bernd A1 - Köning, Rainer A1 - Heinrich, Andreas A1 - Eder, Christian A1 - Goehnermeier, Aksel A1 - Zeiser, Ulrike A1 - Hammerschmidt, Martin A1 - Zschiedrich, Lin A1 - Schneider, Philipp-Immanuel T1 - Efficient simulation of microscopic imaging for reconstruction of nanostructures T2 - Proc. SPIE Y1 - 2023 U6 - https://doi.org/10.1117/12.2673077 VL - PC12619 SP - PC126190B ER - TY - CHAP A1 - Krüger, Jan A1 - Bodermann, Bernd A1 - Köning, Rainer A1 - Manley, Phillip A1 - Zschiedrich, Lin A1 - Schneider, Philipp-Immanuel A1 - Heinrich, Andreas A1 - Eder, Christian A1 - Zeiser, Ulrike A1 - Goehnermeier, Aksel T1 - On aberration retrieval for optical microscopes in length metrology T2 - Proc. SPIE Y1 - 2023 U6 - https://doi.org/10.1117/12.2672294 VL - PC12619 SP - PC126190A ER - TY - JOUR A1 - Krüger, Jan A1 - Manley, Phillip A1 - Bergmann, Detlef A1 - Köning, Rainer A1 - Bodermann, Bernd A1 - Eder, Christian A1 - Heinrich, Andreas A1 - Schneider, Philipp-Immanuel A1 - Hammerschmidt, Martin A1 - Zschiedrich, Lin A1 - Manske, Eberhard T1 - Introduction and application of a new approach for model-based optical bidirectional measurements JF - Meas. Sci. Technol. Y1 - 2024 U6 - https://doi.org/10.1088/1361-6501/ad4b53 ER -