TY - CHAP A1 - Burger, Sven A1 - Schmidt, Frank A1 - Zschiedrich, Lin T1 - A fast and efficient Finite-Element Solver for 2D and 3D Photonic Band-Gap Problems T2 - Dig. LEOS/IEEE 2003 Summer Topicals Y1 - 2003 U6 - https://doi.org/10.1109/LEOSST.2003.1224282 SP - 75 ER - TY - CHAP A1 - Burger, Sven A1 - Klose, Roland A1 - März, Reinhard A1 - Schädle, Achim A1 - Schmidt, Frank A1 - Zschiedrich, Lin T1 - Efficient Finite Element Methods for the Design of Microoptical Components T2 - Proc. Microoptics Conf. 2004 Y1 - 2004 ER - TY - CHAP A1 - März, Reinhard A1 - Burger, Sven A1 - Forchel, A. A1 - Heidrich, H. A1 - Hess, O. A1 - Michaelis, D. A1 - Wandel, K. A1 - Wehrspohn, R. ED - Lipson, M. T1 - High-contrast planar photonic crystals T2 - Nanophotonics for Communication Y1 - 2004 U6 - https://doi.org/10.1117/12.580070 VL - 5597 SP - 68 EP - 81 PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Köhle, Roderick A1 - Zschiedrich, Lin A1 - Gao, W. A1 - Schmidt, Frank A1 - März, Reinhard A1 - Nölscher, Christoph ED - Weed, J. ED - Martin, P. T1 - Benchmark of FEM, Waveguide and FDTD Algorithms for Rigorous Mask Simulation T2 - Photomask Technology Y1 - 2005 U6 - https://doi.org/10.1117/12.631696 VL - 5992 SP - 378 EP - 389 PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Klose, Roland A1 - Schädle, Achim A1 - Schmidt, Frank A1 - Enkrich, Christian A1 - Linden, S. A1 - Wegener, M. A1 - Soukoulis, C. ED - Szoplik, T. ED - Özbay, E. ED - Soukoulis, C. ED - Zheludev, N. T1 - Numerical Investigation of Light Scattering off Split-Ring Resonators T2 - Metamaterials Y1 - 2005 U6 - https://doi.org/10.1117/12.622184 VL - 5955 SP - 18 EP - 26 PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Klose, Roland A1 - Schädle, Achim A1 - Schmidt, Frank A1 - Zschiedrich, Lin ED - Sidorin, Y. ED - Wächter, Christoph T1 - FEM modelling of 3D photonic crystals and photonic crystal waveguides T2 - Integrated Optics : Devices, Materials and Technologies IX Y1 - 2005 U6 - https://doi.org/10.1117/12.585895 VL - 5728 SP - 164 EP - 173 PB - Proc. SPIE ER - TY - CHAP A1 - Schmidt, Frank A1 - Burger, Sven A1 - Schädle, Achim A1 - Klose, Roland T1 - Finite element methods for optical device design T2 - Proceedings of the 5th International Conference on Numerical Simulation of Optoelectronic devices Y1 - 2005 U6 - https://doi.org/10.1109/NUSOD.2005.1518133 SP - 57 EP - 58 ER - TY - CHAP A1 - Klose, Roland A1 - Burger, Sven A1 - Schmidt, Frank A1 - Zschiedrich, Lin T1 - A multilevel method for the computation of eigenmodes in 3D photonic crystals T2 - Proceedings of the 5th International Conference on Numerical Simulation of Optoelectronic Devices Y1 - 2005 U6 - https://doi.org/10.1109/NUSOD.2005.1518135 SP - 61 EP - 62 ER - TY - CHAP A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Klose, Roland A1 - Schädle, Achim A1 - Schmidt, Frank ED - Sidorin, Y. ED - Wächter, Christoph T1 - JCMmode: an adaptive finite element solver for the computation of leaky modes T2 - Integrated Optics: Devices, Materials, and Technologies IX Y1 - 2005 U6 - https://doi.org/10.1117/12.590372 VL - 5728 SP - 192 EP - 202 PB - Proc. SPIE ER - TY - CHAP A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Schädle, Achim A1 - Schmidt, Frank T1 - Domain decomposition method for electromagnetic scattering problems: application to EUV lithography T2 - Proceedings of the 5th International Conference on Numerical Simulation of Optoelectronic devices Y1 - 2005 U6 - https://doi.org/10.1109/NUSOD.2005.1518132 SP - 55 EP - 56 ER - TY - CHAP A1 - Burger, Sven A1 - Köhle, Roderick A1 - Zschiedrich, Lin A1 - Nguyen, H. A1 - Schmidt, Frank A1 - März, Reinhard A1 - Nölscher, Christoph ED - Martin, P. ED - Naber, R. T1 - Rigorous Simulation of 3D Masks T2 - Photomask Technology Y1 - 2006 UR - http://arxiv.org/pdf/physics/0610218 VL - 6349 SP - 63494Z PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Schädle, Achim A1 - Zschiedrich, Lin A1 - Schmidt, Frank ED - Andrews, David L. ED - Nunzi, Jean-Michel ED - Ostendorf, Andreas T1 - Advanced FEM Analysis of Nano-Optical Devices T2 - Nanophotonics Y1 - 2006 U6 - https://doi.org/10.1117/12.662942 VL - 6195 SP - 72 EP - 82 PB - Proc. SPIE ER - TY - CHAP A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank A1 - Zschiedrich, Lin A1 - Scholze, Frank ED - Martin, P. ED - Naber, R. T1 - Rigorous FEM-Simulation of EUV-Masks: Influence of shape and material parameters T2 - Photomask Technology Y1 - 2006 U6 - https://doi.org/10.1117/12.686828 VL - 6349 SP - 63493D PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schädle, Achim A1 - Klose, Roland A1 - Kettner, Benjamin A1 - Pomplun, Jan A1 - Pollok, T. A1 - Schmidt, Frank T1 - Advanced FEM Analysis of Nano-Optical Devices T2 - Proc. Symposium on Photonics Technologies for the 7th Framework Programme Y1 - 2006 ER - TY - CHAP A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Kettner, Benjamin A1 - Schmidt, Frank T1 - Advanced Finite Element Method for Nano-Resonators T2 - Proc. SPIE Y1 - 2006 U6 - https://doi.org/10.1117/12.646252 VL - 6115 SP - 611515 ER - TY - CHAP A1 - Zschiedrich, Lin A1 - März, Reinhard A1 - Burger, Sven A1 - Schmidt, Frank T1 - Efficient 3D Finite Element Simulation of Fiber-Chip Coupling T2 - Integrated Photonics Research and Applications/Nanophotonics Y1 - 2006 U6 - https://doi.org/10.1364/IPRA.2006.ITuF1 SP - ITuF1 ER - TY - CHAP A1 - Scholze, Frank A1 - Laubis, Christian A1 - Dersch, Uwe A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank ED - Bosse, Harald T1 - The influence of line edge roughness and CD uniformity on EUV scatterometry for CD characterization of EUV masks T2 - Modeling Aspects in Optical Metrology Y1 - 2007 VL - 6617 SP - 66171A PB - Proc. SPIE ER - TY - CHAP A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank A1 - Scholze, Frank A1 - Laubis, Christian A1 - Dersch, Uwe ED - Bosse, Harald T1 - Finite element analysis of EUV lithography T2 - Modeling Aspects in Optical Metrology Y1 - 2007 U6 - https://doi.org/10.1117/12.726156 VL - 6617 SP - 661718 PB - Proc. SPIE ER - TY - CHAP A1 - Pomplun, Jan A1 - Holzlöhner, Ronald A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank ED - Adibi, Ali ED - Scherer, Axel ED - Lin, Shawn-Yu T1 - FEM investigation of leaky modes in hollow core photonic crystal fibers T2 - Proc. SPIE, Photonic Crystal Materials and Devices VI Y1 - 2007 UR - http://arxiv.org/pdf/physics/0702165 VL - 6480 SP - 64800M ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank A1 - Köhle, Roderick A1 - Henkel, Thomas A1 - Küchler, Bernd A1 - Nölscher, Christoph ED - Bosse, Harald T1 - 3D simulations of electromagnetic fields in nanostructures using the time-harmonic finite-element method T2 - Modeling Aspects in Optical Metrology Y1 - 2007 U6 - https://doi.org/10.1117/12.726236 VL - 6617 SP - 66170V PB - Proc. SPIE ER -