TY - CHAP A1 - Burger, Sven A1 - Lockau, D. A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - Finite-element simulations of light propagation through subwavelength apertures in metal films T2 - International Workshop on Optical Waveguide Theory and Numerical Modelling Y1 - 2009 VL - XVIII SP - 59 PB - Fraunhofer Institute for Applied Optics and Precision Engineering ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin ED - Chigrin, Dmitry T1 - Numerical Investigation of Silicon-on-Insulator 1D Photonic Crystal Microcavities T2 - Theoretical and computational nanooptics Y1 - 2009 U6 - https://doi.org/10.1063/1.3253915 VL - 1176 SP - 43 EP - 45 PB - AIP ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Schmidt, Frank A1 - Kettner, Benjamin A1 - Lockau, D. T1 - 3D Finite-Element Simulations of Enhanced Light Transmission Through Arrays of Holes in Metal Films T2 - Numerical Methods in Optical Metrology Y1 - 2009 U6 - https://doi.org/10.1117/12.827543 VL - 7390 SP - 73900H PB - Proc. SPIE ER - TY - CHAP A1 - Pomplun, Jan A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Schmidt, Frank T1 - Reduced basis method for computational lithography T2 - Photomask Technology Y1 - 2009 U6 - https://doi.org/10.1117/12.829639 VL - 7488 SP - 74882B PB - Proc. SPIE ER - TY - JOUR A1 - Neve-Oz, Y. A1 - Pollok, T. A1 - Burger, Sven A1 - Golosovsky, M. A1 - Davidov, D. T1 - Fast Light and Focusing in 2D Photonic Quasicrystals JF - PIERS Online Y1 - 2009 U6 - https://doi.org/10.2529/PIERS081223080021 VL - 5 SP - 451 ER - TY - JOUR A1 - Decker, Manuel A1 - Burger, Sven A1 - Linden, S. A1 - Wegener, M. T1 - Magnetization waves in split-ring-resonator arrays JF - Phys. Rev. B Y1 - 2009 UR - http://dx.doi.org/10.1103/PhysRevB.80.193102 U6 - https://doi.org/10.1103/PhysRevB.80.193102 VL - 80 IS - 19 SP - 193102 ER - TY - CHAP A1 - Hoffmann, Johannes A1 - Hafner, Christian A1 - Leidenberger, P. A1 - Hesselbarth, J. A1 - Burger, Sven T1 - Comparison of electromagnetic field solvers for the 3D analysis of plasmonic nano antennas T2 - Numerical Methods in Optical Metrology Y1 - 2009 UR - http://dx.doi.org/10.1117/12.828036 U6 - https://doi.org/10.1117/12.828036 VL - 7390 SP - 73900J PB - Proc. SPIE ER - TY - JOUR A1 - Lockau, D. A1 - Zschiedrich, Lin A1 - Burger, Sven T1 - Accurate simulation of light transmission through subwavelength apertures in metal films JF - J. Opt. A Y1 - 2009 U6 - https://doi.org/10.1088/1464-4258/11/11/114013 VL - 11 SP - 114013 ER - TY - CHAP A1 - Lockau, D. A1 - Zschiedrich, Lin A1 - Schmidt, Frank A1 - Burger, Sven A1 - Rech, Bernd T1 - Efficient simulation of plasmonic structures for solar cells T2 - International Workshop on Optical Waveguide Theory and Numerical Modelling Y1 - 2009 VL - XVIII SP - 48 PB - Fraunhofer Institute for Applied Optics and Precision Engineering ER - TY - JOUR A1 - Karl, M. A1 - Kettner, Benjamin A1 - Burger, Sven A1 - Schmidt, Frank A1 - Kalt, H. A1 - Hetterich, M. T1 - Dependencies of micro-pillar cavity quality factors calculated with finite element methods JF - Optics Express Y1 - 2009 UR - http://dx.doi.org/10.1364/OE.17.001144 U6 - https://doi.org/10.1364/OE.17.001144 VL - 17 SP - 1144 ER - TY - CHAP A1 - Skibina, Julia A1 - Iliew, Rumen A1 - Bethge, Jens A1 - Bock, Martin A1 - Fischer, Dorit A1 - Beloglazov, Valentin A1 - Wedell, Reiner A1 - Burger, Sven A1 - Steinmeyer, Günter T1 - A chirped photonic crystal fiber for high-fidelity guiding of sub-100 fs pluses T2 - CLEO/QELS Y1 - 2009 U6 - https://doi.org/10.1364/CLEO.2009.CMHH1 SP - CMHH1 ER - TY - CHAP A1 - Skibina, Julia A1 - Iliew, Rumen A1 - Bethge, Jens A1 - Bock, Martin A1 - Fischer, Dorit A1 - Beloglazov, Valentin A1 - Wedell, Reiner A1 - Burger, Sven A1 - Steinmeyer, Günter T1 - A chirped photonic crystal fiber for ultrashort laser pulse delivery T2 - CLEO Europe - EQEC Y1 - 2009 U6 - https://doi.org/10.1109/CLEOE-EQEC.2009.5196579 ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Kettner, Benjamin A1 - Schmidt, Frank ED - Hergert, W. ED - Wriedt, T. T1 - FEM simulation of light scattering by nonspherical objects T2 - Mie Theory 1908 – 2008 Y1 - 2008 SP - 82 EP - 83 PB - Universität Bremen ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Schmidt, Frank T1 - JCMsuite: An Adaptive FEM Solver for Precise Simulations in Nano-Optics T2 - Integrated Photonics and Nanophotonics Research and Applications Y1 - 2008 U6 - https://doi.org/10.1364/IPNRA.2008.ITuE4 SP - ITuE4 PB - Optical Society of America ER - TY - CHAP A1 - Schmidt, Frank A1 - Burger, Sven A1 - Pomplun, Jan A1 - Zschiedrich, Lin ED - Greiner, Christoph ED - Wächter, Christoph T1 - Advanced FEM analysis of optical waveguides: algorithms and applications T2 - Integrated Optics Y1 - 2008 U6 - https://doi.org/10.1117/12.765720 VL - 6896 SP - 689602 PB - SPIE ER - TY - CHAP A1 - Scholze, Frank A1 - Laubis, Christian A1 - Ulm, Gerhard A1 - Dersch, Uwe A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank ED - Schellenberg, Frank T1 - Evaluation of EUV scatterometry for CD characterization of EUV masks using rigorous FEM-simulation T2 - Emerging Lithographic Technologies XII Y1 - 2008 VL - 6921 PB - SPIE ER - TY - CHAP A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank A1 - Scholze, Frank A1 - Laubis, Christian A1 - Dersch, Uwe ED - Horiuchi, Toshiyuki T1 - Metrology of EUV masks by EUV-scatterometry and finite element analysis T2 - Photomask and Next-Generation Lithography Mask Technology XV Y1 - 2008 VL - 7028 PB - SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank A1 - Evanschitzky, Peter A1 - Erdmann, Andreas ED - Kawahira, H. ED - Zurbrick, L. S. T1 - Benchmark of rigorous methods for electromagnetic field simulation T2 - Photomask Technology Y1 - 2008 UR - http://dx.doi.org/10.1117/12.801248 U6 - https://doi.org/10.1117/12.801248 VL - 7122 SP - 71221 PB - Proc. SPIE ER - TY - CHAP A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Schädle, Achim A1 - Schmidt, Frank ED - Levinson, Harry ED - Dusa, Mircea T1 - A rigorous finite-element domain decomposition method for electromagnetic near field simulations T2 - Optical Microlithography XXI Y1 - 2008 U6 - https://doi.org/10.1117/12.771989 VL - 6924 PB - SPIE ER - TY - CHAP A1 - Pomplun, Jan A1 - Zschiedrich, Lin A1 - Klose, Roland A1 - Schmidt, Frank A1 - Burger, Sven T1 - Finite Element Simulation of Radiation Losses in Photonic Crystal Fibers T2 - Nanophotonic Materials: Photonic Crystals, Plasmonics, and Metamaterials Y1 - 2008 U6 - https://doi.org/10.1002/9783527621880.ch17 SP - 313 EP - 331 PB - Wiley-VCH ER - TY - CHAP A1 - Scholze, Frank A1 - Laubis, Christian A1 - Dersch, Uwe A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank ED - Bosse, Harald T1 - The influence of line edge roughness and CD uniformity on EUV scatterometry for CD characterization of EUV masks T2 - Modeling Aspects in Optical Metrology Y1 - 2007 VL - 6617 SP - 66171A PB - Proc. SPIE ER - TY - JOUR A1 - Pearce, G. J. A1 - Wiederhecker, G. S. A1 - Poulton, Christopher G. A1 - Burger, Sven A1 - Russell, P. St. J. T1 - Models for guidance in kagome-structured hollow-core photonic crystal fibres JF - Optics Express Y1 - 2007 U6 - https://doi.org/10.1364/OE.15.012680 VL - 15 SP - 12680 ER - TY - CHAP A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank A1 - Scholze, Frank A1 - Laubis, Christian A1 - Dersch, Uwe ED - Bosse, Harald T1 - Finite element analysis of EUV lithography T2 - Modeling Aspects in Optical Metrology Y1 - 2007 U6 - https://doi.org/10.1117/12.726156 VL - 6617 SP - 661718 PB - Proc. SPIE ER - TY - JOUR A1 - Pomplun, Jan A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - Adaptive finite element method for simulation of optical nano structures JF - Phys. Status Solidi B Y1 - 2007 U6 - https://doi.org/10.1002/pssb.200743192 VL - 244 SP - 3419 EP - 3434 ER - TY - CHAP A1 - Pomplun, Jan A1 - Holzlöhner, Ronald A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank ED - Adibi, Ali ED - Scherer, Axel ED - Lin, Shawn-Yu T1 - FEM investigation of leaky modes in hollow core photonic crystal fibers T2 - Proc. SPIE, Photonic Crystal Materials and Devices VI Y1 - 2007 UR - http://arxiv.org/pdf/physics/0702165 VL - 6480 SP - 64800M ER - TY - JOUR A1 - Pomplun, Jan A1 - Zschiedrich, Lin A1 - Klose, Roland A1 - Schmidt, Frank A1 - Burger, Sven T1 - Finite element simulation of radiation losses in photonic crystal fibers JF - phys. stat. sol. (a) Y1 - 2007 U6 - https://doi.org/10.1002/pssa.200776414 VL - 204 IS - 11 SP - 3822 EP - 3837 ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank A1 - Köhle, Roderick A1 - Henkel, Thomas A1 - Küchler, Bernd A1 - Nölscher, Christoph ED - Bosse, Harald T1 - 3D simulations of electromagnetic fields in nanostructures using the time-harmonic finite-element method T2 - Modeling Aspects in Optical Metrology Y1 - 2007 U6 - https://doi.org/10.1117/12.726236 VL - 6617 SP - 66170V PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank A1 - Köhle, Roderick A1 - Küchler, Bernd A1 - Nölscher, Christoph T1 - EMF Simulations of Isolated and Periodic 3D Photomask Patterns T2 - Photomask Technology Y1 - 2007 UR - http://arxiv.org/pdf/0709.3934 VL - 6730 SP - 6630 PB - Proc. SPIE ER - TY - JOUR A1 - Dolling, G. A1 - Klein, M. A1 - Wegener, M. A1 - Schädle, Achim A1 - Burger, Sven A1 - Linden, S. T1 - Negative beam displacement for negative-index photonic metamaterials JF - Optics Express Y1 - 2007 U6 - https://doi.org/10.1364/OE.15.014219 VL - 15 IS - 21 SP - 14219 EP - 14227 ER - TY - CHAP A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Pomplun, Jan A1 - Schmidt, Frank ED - Sidorin, Y. ED - Waechter, Ch. T1 - Goal oriented adaptive finite element method for precise simulation of optical components T2 - Proc. SPIE, Integrated Optics Y1 - 2007 UR - http://arxiv.org/pdf/physics/0702128 VL - 6475 SP - 64750H ER - TY - JOUR A1 - Schädle, Achim A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Klose, Roland A1 - Schmidt, Frank T1 - Domain Decomposition Method for Maxwell’s Equations JF - J. Comput. Phys. Y1 - 2007 U6 - https://doi.org/10.1016/j.jcp.2007.04.017 VL - 226 SP - 477 EP - 493 ER - TY - GEN A1 - Schädle, Achim A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Klose, Roland A1 - Schmidt, Frank T1 - Domain Decomposition Method for Maxwell's Equations: Scattering off Periodic Structures N2 - We present a domain decomposition approach for the computation of the electromagnetic field within periodic structures. We use a Schwarz method with transparent boundary conditions at the interfaces of the domains. Transparent boundary conditions are approximated by the perfectly matched layer method (PML). To cope with Wood anomalies appearing in periodic structures an adaptive strategy to determine optimal PML parameters is developed. We focus on the application to typical EUV lithography line masks. Light propagation within the multi-layer stack of the EUV mask is treated analytically. This results in a drastic reduction of the computational costs and allows for the simulation of next generation lithography masks on a standard personal computer. T3 - ZIB-Report - 06-04 KW - domain decomposition KW - conical diffraction KW - electro-magnetic scattering KW - Maxwell's equations KW - Lithography KW - finite elements Y1 - 2006 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:0297-zib-8984 ER - TY - CHAP A1 - Burger, Sven A1 - Klose, Roland A1 - Schädle, Achim A1 - Schmidt, Frank A1 - Zschiedrich, Lin T1 - Adaptive FEM solver for the computation of electromagnetic eigenmodes in 3D photonic crystal structures T2 - Scientific Computing in Electrical Engineering Y1 - 2006 U6 - https://doi.org/10.1007/978-3-540-32862-9_24 SP - 169 EP - 175 PB - Springer Verlag ER - TY - CHAP A1 - Burger, Sven A1 - Köhle, Roderick A1 - Zschiedrich, Lin A1 - Nguyen, H. A1 - Schmidt, Frank A1 - März, Reinhard A1 - Nölscher, Christoph ED - Martin, P. ED - Naber, R. T1 - Rigorous Simulation of 3D Masks T2 - Photomask Technology Y1 - 2006 UR - http://arxiv.org/pdf/physics/0610218 VL - 6349 SP - 63494Z PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Schädle, Achim A1 - Zschiedrich, Lin A1 - Schmidt, Frank ED - Andrews, David L. ED - Nunzi, Jean-Michel ED - Ostendorf, Andreas T1 - Advanced FEM Analysis of Nano-Optical Devices T2 - Nanophotonics Y1 - 2006 U6 - https://doi.org/10.1117/12.662942 VL - 6195 SP - 72 EP - 82 PB - Proc. SPIE ER - TY - CHAP A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank A1 - Zschiedrich, Lin A1 - Scholze, Frank ED - Martin, P. ED - Naber, R. T1 - Rigorous FEM-Simulation of EUV-Masks: Influence of shape and material parameters T2 - Photomask Technology Y1 - 2006 U6 - https://doi.org/10.1117/12.686828 VL - 6349 SP - 63493D PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schädle, Achim A1 - Klose, Roland A1 - Kettner, Benjamin A1 - Pomplun, Jan A1 - Pollok, T. A1 - Schmidt, Frank T1 - Advanced FEM Analysis of Nano-Optical Devices T2 - Proc. Symposium on Photonics Technologies for the 7th Framework Programme Y1 - 2006 ER - TY - JOUR A1 - Dolling, G. A1 - Wegener, M. A1 - Schädle, Achim A1 - Burger, Sven A1 - Linden, S. T1 - Observation of magnetization waves in negative-index photonic metamaterials JF - Appl. Phys. Lett. Y1 - 2006 U6 - https://doi.org/10.1063/1.2403905 VL - 89 SP - 231118 ER - TY - JOUR A1 - Holzlöhner, Ronald A1 - Burger, Sven A1 - Roberts, P. A1 - Pomplun, Jan T1 - Efficient optimization of hollow-core photonic crystal fiber design using the finite-element method JF - J. Eur. Opt. Soc.-Rapid Y1 - 2006 U6 - https://doi.org/10.2971/jeos.2006.06011 VL - 1 SP - 06011 ER - TY - JOUR A1 - Linden, S. A1 - Enkrich, Christian A1 - Dolling, G. A1 - Klein, M. A1 - Zhou, J. A1 - Koschny, T. A1 - Soukoulis, C. A1 - Burger, Sven A1 - Schmidt, Frank A1 - Wegener, M. T1 - Photonic metamaterials: Magnetism at Optical Frequencies JF - IEEE Journal of Selected Topics in Quantum Electronics Y1 - 2006 U6 - https://doi.org/10.1109/JSTQE.2006.880600 VL - 12 IS - 6 SP - 1097 EP - 1105 ER - TY - JOUR A1 - Michaelis, D. A1 - Wächter, Christoph A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Bräuer, Andreas T1 - Micro-optically assisted high index waveguide coupling JF - Appl. Opt. Y1 - 2006 U6 - https://doi.org/10.1364/AO.45.001831 VL - 45 SP - 1831 EP - 1838 ER - TY - CHAP A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Kettner, Benjamin A1 - Schmidt, Frank T1 - Advanced Finite Element Method for Nano-Resonators T2 - Proc. SPIE Y1 - 2006 U6 - https://doi.org/10.1117/12.646252 VL - 6115 SP - 611515 ER - TY - CHAP A1 - Zschiedrich, Lin A1 - März, Reinhard A1 - Burger, Sven A1 - Schmidt, Frank T1 - Efficient 3D Finite Element Simulation of Fiber-Chip Coupling T2 - Integrated Photonics Research and Applications/Nanophotonics Y1 - 2006 U6 - https://doi.org/10.1364/IPRA.2006.ITuF1 SP - ITuF1 ER - TY - CHAP A1 - Burger, Sven A1 - Köhle, Roderick A1 - Zschiedrich, Lin A1 - Gao, W. A1 - Schmidt, Frank A1 - März, Reinhard A1 - Nölscher, Christoph ED - Weed, J. ED - Martin, P. T1 - Benchmark of FEM, Waveguide and FDTD Algorithms for Rigorous Mask Simulation T2 - Photomask Technology Y1 - 2005 U6 - https://doi.org/10.1117/12.631696 VL - 5992 SP - 378 EP - 389 PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Klose, Roland A1 - Schädle, Achim A1 - Schmidt, Frank A1 - Enkrich, Christian A1 - Linden, S. A1 - Wegener, M. A1 - Soukoulis, C. ED - Szoplik, T. ED - Özbay, E. ED - Soukoulis, C. ED - Zheludev, N. T1 - Numerical Investigation of Light Scattering off Split-Ring Resonators T2 - Metamaterials Y1 - 2005 U6 - https://doi.org/10.1117/12.622184 VL - 5955 SP - 18 EP - 26 PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Klose, Roland A1 - Schädle, Achim A1 - Schmidt, Frank A1 - Zschiedrich, Lin ED - Sidorin, Y. ED - Wächter, Christoph T1 - FEM modelling of 3D photonic crystals and photonic crystal waveguides T2 - Integrated Optics : Devices, Materials and Technologies IX Y1 - 2005 U6 - https://doi.org/10.1117/12.585895 VL - 5728 SP - 164 EP - 173 PB - Proc. SPIE ER - TY - CHAP A1 - Schmidt, Frank A1 - Burger, Sven A1 - Schädle, Achim A1 - Klose, Roland T1 - Finite element methods for optical device design T2 - Proceedings of the 5th International Conference on Numerical Simulation of Optoelectronic devices Y1 - 2005 U6 - https://doi.org/10.1109/NUSOD.2005.1518133 SP - 57 EP - 58 ER - TY - JOUR A1 - Enkrich, Christian A1 - Wegener, M. A1 - Linden, S. A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank A1 - Zhou, C. A1 - Koschny, T. A1 - Soukoulis, C. T1 - Magnetic metamaterials at telecommunication and visible frequencies JF - Phys. Rev. Lett. Y1 - 2005 U6 - https://doi.org/10.1103/PhysRevLett.95.203901 VL - 95 SP - 203901 ER - TY - JOUR A1 - Kalkbrenner, T. A1 - Hakanson, U. A1 - Schädle, Achim A1 - Burger, Sven A1 - Henkel, C. A1 - Sandoghdar, V. T1 - Optical microscopy using the spectral modifications of a nano-antenna JF - Phys. Rev. Lett. Y1 - 2005 U6 - https://doi.org/10.1103/PhysRevLett.95.200801 VL - 95 SP - 200801 ER - TY - CHAP A1 - Klose, Roland A1 - Burger, Sven A1 - Schmidt, Frank A1 - Zschiedrich, Lin T1 - A multilevel method for the computation of eigenmodes in 3D photonic crystals T2 - Proceedings of the 5th International Conference on Numerical Simulation of Optoelectronic Devices Y1 - 2005 U6 - https://doi.org/10.1109/NUSOD.2005.1518135 SP - 61 EP - 62 ER -