TY - GEN A1 - Schädle, Achim A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Klose, Roland A1 - Schmidt, Frank T1 - Domain Decomposition Method for Maxwell's Equations: Scattering off Periodic Structures N2 - We present a domain decomposition approach for the computation of the electromagnetic field within periodic structures. We use a Schwarz method with transparent boundary conditions at the interfaces of the domains. Transparent boundary conditions are approximated by the perfectly matched layer method (PML). To cope with Wood anomalies appearing in periodic structures an adaptive strategy to determine optimal PML parameters is developed. We focus on the application to typical EUV lithography line masks. Light propagation within the multi-layer stack of the EUV mask is treated analytically. This results in a drastic reduction of the computational costs and allows for the simulation of next generation lithography masks on a standard personal computer. T3 - ZIB-Report - 06-04 KW - domain decomposition KW - conical diffraction KW - electro-magnetic scattering KW - Maxwell's equations KW - Lithography KW - finite elements Y1 - 2006 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:0297-zib-8984 ER - TY - JOUR A1 - Bodermann, Bernd A1 - Buhr, Egbert A1 - Danzebrink, Hans-Ulrich A1 - Bär, Markus A1 - Scholze, Frank A1 - Krumrey, Michael A1 - Wurm, Matthias A1 - Klapetek, Petr A1 - Hansen, Poul-Erik A1 - Korpelainen, Virpi A1 - van Veghel, Marijn A1 - Yacoot, Andrew A1 - Siitonen, Samuli A1 - El Gawhary, Omar A1 - Burger, Sven A1 - Saastamoinen, Toni T1 - Joint Research on Scatterometry and AFM Wafer Metrology JF - AIP Conference Proceedings Y1 - 2011 U6 - https://doi.org/10.1063/1.3657910 VL - 1395 IS - 1 SP - 319 EP - 323 PB - AIP ER - TY - CHAP A1 - Bodermann, Bernd A1 - Hansen, Poul-Erik A1 - Burger, Sven A1 - Henn, Mark-Alexander A1 - Gross, Hermann A1 - Bär, Markus A1 - Scholze, Frank A1 - Endres, Johannes A1 - Wurm, Matthias T1 - First steps towards a scatterometry reference standard T2 - Proc. SPIE Y1 - 2012 U6 - https://doi.org/10.1117/12.929903 VL - 8466 SP - 84660E ER - TY - JOUR A1 - Burger, Sven T1 - Simulation method improves accuracy for optical metrology and nanooptics design JF - SPIE Newsroom Y1 - 2009 U6 - https://doi.org/10.1117/2.1200905.1629 ER - TY - JOUR A1 - Babicheva, Viktoriia E. A1 - Vergeles, Sergey S. A1 - Vorobev, Petr E. A1 - Burger, Sven T1 - Localized surface plasmon modes in a system of two interacting metallic cylinders JF - J. Opt. Soc. Am. B Y1 - 2012 U6 - https://doi.org/10.1364/JOSAB.29.001263 VL - 29 IS - 6 SP - 1263 EP - 1269 ER - TY - JOUR A1 - Bethge, Jens A1 - Steinmeyer, Günter A1 - Burger, Sven A1 - Lederer, Falk A1 - Iliew, Rumen T1 - Guiding properties of chirped photonic crystal fibers JF - Journal of Lightwave Technology Y1 - 2009 U6 - https://doi.org/10.1109/JLT.2009.2021583 VL - 27 SP - 1698 ER - TY - JOUR A1 - Blome, Mark A1 - McPeak, Kevin A1 - Burger, Sven A1 - Schmidt, Frank A1 - Norris, David T1 - Back-reflector design in thin-film silicon solar cells by rigorous 3D light propagation modeling JF - COMPEL: Int. J. Comput. Mathem. Electr. Electron. Eng. Y1 - 2014 U6 - https://doi.org/10.1108/COMPEL-12-2012-0367 VL - 33 IS - 4 SP - 1282 EP - 1295 ER - TY - CHAP A1 - Burger, Sven A1 - Klose, Roland A1 - Schädle, Achim A1 - Schmidt, Frank A1 - Zschiedrich, Lin T1 - Adaptive FEM solver for the computation of electromagnetic eigenmodes in 3D photonic crystal structures T2 - Scientific Computing in Electrical Engineering Y1 - 2006 U6 - https://doi.org/10.1007/978-3-540-32862-9_24 SP - 169 EP - 175 PB - Springer Verlag ER - TY - CHAP A1 - Burger, Sven A1 - Kleemann, B. A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - Finite-Element Simulations of Light Propagation through Circular Subwavelength Apertures T2 - Microtechnologies for the New Millenium Y1 - 2009 U6 - https://doi.org/10.1117/12.822828 VL - 7366 SP - 736621 PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Köhle, Roderick A1 - Zschiedrich, Lin A1 - Nguyen, H. A1 - Schmidt, Frank A1 - März, Reinhard A1 - Nölscher, Christoph ED - Martin, P. ED - Naber, R. T1 - Rigorous Simulation of 3D Masks T2 - Photomask Technology Y1 - 2006 UR - http://arxiv.org/pdf/physics/0610218 VL - 6349 SP - 63494Z PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Köhle, Roderick A1 - Zschiedrich, Lin A1 - Gao, W. A1 - Schmidt, Frank A1 - März, Reinhard A1 - Nölscher, Christoph ED - Weed, J. ED - Martin, P. T1 - Benchmark of FEM, Waveguide and FDTD Algorithms for Rigorous Mask Simulation T2 - Photomask Technology Y1 - 2005 U6 - https://doi.org/10.1117/12.631696 VL - 5992 SP - 378 EP - 389 PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Lockau, D. A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - Finite-element simulations of light propagation through subwavelength apertures in metal films T2 - International Workshop on Optical Waveguide Theory and Numerical Modelling Y1 - 2009 VL - XVIII SP - 59 PB - Fraunhofer Institute for Applied Optics and Precision Engineering ER - TY - CHAP A1 - Burger, Sven A1 - Pomplun, Jan A1 - Schmidt, Frank ED - Bhushan, B. T1 - Finite Element Methods for Computational Nano-optics T2 - Encyclopedia of Nanotechnology Y1 - 2012 U6 - https://doi.org/10.1007/978-90-481-9751-4_17 SP - 837 EP - 843 PB - Springer Netherlands ER - TY - CHAP A1 - Burger, Sven A1 - Schmidt, Frank A1 - Zschiedrich, Lin T1 - A fast and efficient Finite-Element Solver for 2D and 3D Photonic Band-Gap Problems T2 - Dig. LEOS/IEEE 2003 Summer Topicals Y1 - 2003 U6 - https://doi.org/10.1109/LEOSST.2003.1224282 SP - 75 ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - 3D FEM Simulations of High-Q Resonances in Photonic Crystal Microcavities T2 - Integrated Photonics Research, Silicon and Nanophotonics Y1 - 2010 U6 - https://doi.org/10.1364/IPRSN.2010.IWB7 SP - IWB7 PB - OSA ER - TY - CHAP A1 - Burger, Sven A1 - Schmidt, Frank A1 - Zschiedrich, Lin ED - Jena, Friedrich-Schiller-Universität T1 - FEM simulation of resonances in low-Q cavities for plasmon lasers T2 - International Workshop on Photonic Nanomaterials Y1 - 2010 SN - 978-3-00-031358-5 SP - 36 ER - TY - CHAP A1 - Burger, Sven A1 - Schmidt, Frank A1 - Zschiedrich, Lin T1 - Numerical investigation of optical resonances in circular grating resonators T2 - Silicon Photonics V Y1 - 2010 U6 - https://doi.org/10.1117/12.842061 VL - 7606 SP - 760610 PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Schmidt, Frank A1 - Zschiedrich, Lin T1 - Numerical Investigation of Photonic Crystal Microcavities in Silicon-on-Insulator Waveguides T2 - Photonic and Phononic Crystal Materials and Devices X Y1 - 2010 U6 - https://doi.org/10.1117/12.841867 VL - 7609 SP - 76091Q PB - Proc. SPIE ER - TY - CHAP A1 - Pomplun, Jan A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Schmidt, Frank A1 - Tyminski, Jacek A1 - Flagello, Donis A1 - Toshiharu, N. T1 - Reduced basis method for source mask optimization T2 - Photomask Technology Y1 - 2010 U6 - https://doi.org/10.1117/12.866101 VL - 7823 SP - 78230E PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Schädle, Achim A1 - Zschiedrich, Lin A1 - Schmidt, Frank ED - Andrews, David L. ED - Nunzi, Jean-Michel ED - Ostendorf, Andreas T1 - Advanced FEM Analysis of Nano-Optical Devices T2 - Nanophotonics Y1 - 2006 U6 - https://doi.org/10.1117/12.662942 VL - 6195 SP - 72 EP - 82 PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin ED - Chigrin, Dmitry T1 - Numerical Investigation of Silicon-on-Insulator 1D Photonic Crystal Microcavities T2 - Theoretical and computational nanooptics Y1 - 2009 U6 - https://doi.org/10.1063/1.3253915 VL - 1176 SP - 43 EP - 45 PB - AIP ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Kettner, Benjamin A1 - Schmidt, Frank ED - Hergert, W. ED - Wriedt, T. T1 - FEM simulation of light scattering by nonspherical objects T2 - Mie Theory 1908 – 2008 Y1 - 2008 SP - 82 EP - 83 PB - Universität Bremen ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Klose, Roland A1 - Schädle, Achim A1 - Schmidt, Frank A1 - Enkrich, Christian A1 - Linden, S. A1 - Wegener, M. A1 - Soukoulis, C. ED - Szoplik, T. ED - Özbay, E. ED - Soukoulis, C. ED - Zheludev, N. T1 - Numerical Investigation of Light Scattering off Split-Ring Resonators T2 - Metamaterials Y1 - 2005 U6 - https://doi.org/10.1117/12.622184 VL - 5955 SP - 18 EP - 26 PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Schmidt, Frank A1 - Kettner, Benjamin A1 - Lockau, D. T1 - 3D Finite-Element Simulations of Enhanced Light Transmission Through Arrays of Holes in Metal Films T2 - Numerical Methods in Optical Metrology Y1 - 2009 U6 - https://doi.org/10.1117/12.827543 VL - 7390 SP - 73900H PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Schmidt, Frank T1 - Finite element method for accurate 3D simulation of plasmonic waveguides T2 - Integrated Optics: Devices, Materials, and Technologies XIV Y1 - 2010 U6 - https://doi.org/10.1117/12.841995 VL - 7604 SP - 76040F PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Schmidt, Frank T1 - JCMsuite: An Adaptive FEM Solver for Precise Simulations in Nano-Optics T2 - Integrated Photonics and Nanophotonics Research and Applications Y1 - 2008 U6 - https://doi.org/10.1364/IPNRA.2008.ITuE4 SP - ITuE4 PB - Optical Society of America ER - TY - JOUR A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - FEM Simulation of Plasmon Laser Resonances JF - AIP Conference Proceedings Y1 - 2010 U6 - https://doi.org/10.1063/1.3498131 VL - 1281 SP - 1613 EP - 1616 PB - AIP ER - TY - CHAP A1 - Burger, Sven A1 - Klose, Roland A1 - März, Reinhard A1 - Schädle, Achim A1 - Schmidt, Frank A1 - Zschiedrich, Lin T1 - Efficient Finite Element Methods for the Design of Microoptical Components T2 - Proc. Microoptics Conf. 2004 Y1 - 2004 ER - TY - CHAP A1 - Burger, Sven A1 - Klose, Roland A1 - Schädle, Achim A1 - Schmidt, Frank A1 - Zschiedrich, Lin ED - Sidorin, Y. ED - Wächter, Christoph T1 - FEM modelling of 3D photonic crystals and photonic crystal waveguides T2 - Integrated Optics : Devices, Materials and Technologies IX Y1 - 2005 U6 - https://doi.org/10.1117/12.585895 VL - 5728 SP - 164 EP - 173 PB - Proc. SPIE ER - TY - CHAP A1 - Bock, Martin A1 - Skibina, Julia A1 - Fischer, Dorit A1 - Grunwald, Rüdiger A1 - Burger, Sven A1 - Beloglazov, Valentin A1 - Steinmeyer, Günter T1 - 10-fs pulse delivery through a fiber T2 - CLEO Y1 - 2012 U6 - https://doi.org/10.1364/CLEO_SI.2012.CTh3G.3 SP - CTh3G.3 PB - Optical Society of America ER - TY - CHAP A1 - Scholze, Frank A1 - Laubis, Christian A1 - Dersch, Uwe A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank ED - Bosse, Harald T1 - The influence of line edge roughness and CD uniformity on EUV scatterometry for CD characterization of EUV masks T2 - Modeling Aspects in Optical Metrology Y1 - 2007 VL - 6617 SP - 66171A PB - Proc. SPIE ER - TY - CHAP A1 - Pomplun, Jan A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Schmidt, Frank T1 - Reduced basis method for computational lithography T2 - Photomask Technology Y1 - 2009 U6 - https://doi.org/10.1117/12.829639 VL - 7488 SP - 74882B PB - Proc. SPIE ER - TY - JOUR A1 - Pearce, G. J. A1 - Wiederhecker, G. S. A1 - Poulton, Christopher G. A1 - Burger, Sven A1 - Russell, P. St. J. T1 - Models for guidance in kagome-structured hollow-core photonic crystal fibres JF - Optics Express Y1 - 2007 U6 - https://doi.org/10.1364/OE.15.012680 VL - 15 SP - 12680 ER - TY - CHAP A1 - Petracek, Jiri A1 - Maes, Bjorn A1 - Burger, Sven A1 - Luksch, Jaroslav A1 - Kwiecien, Pavel A1 - Richter, Ivan T1 - Simulation of high-Q nanocavities with 1D photonic gap T2 - Transparent Optical Networks (ICTON) Y1 - 2012 U6 - https://doi.org/10.1109/ICTON.2012.6253762 SP - 1 EP - 4 PB - IEEE ER - TY - CHAP A1 - Petracek, Jiri A1 - Luksch, Jaroslav A1 - Maes, Bjorn A1 - Burger, Sven A1 - Kwiecien, Pavel A1 - Richter, Ivan ED - Ferrari, M. ED - Marciniak, M. ED - Righini, G. ED - Szoplik, T. ED - Varas, S. T1 - Simulation of photonic crystal nanocavities using a bidirectional eigenmode propagation algorithm: a comparative study T2 - Micro- and nanophotonic materials and devices Y1 - 2012 SN - 9788377980200 SP - 109 EP - 112 PB - IFN-CNR, Trento, Italy ER - TY - CHAP A1 - Schmidt, Frank A1 - Burger, Sven A1 - Pomplun, Jan A1 - Zschiedrich, Lin ED - Greiner, Christoph ED - Wächter, Christoph T1 - Advanced FEM analysis of optical waveguides: algorithms and applications T2 - Integrated Optics Y1 - 2008 U6 - https://doi.org/10.1117/12.765720 VL - 6896 SP - 689602 PB - SPIE ER - TY - CHAP A1 - Schmidt, Frank A1 - Burger, Sven A1 - Schädle, Achim A1 - Klose, Roland T1 - Finite element methods for optical device design T2 - Proceedings of the 5th International Conference on Numerical Simulation of Optoelectronic devices Y1 - 2005 U6 - https://doi.org/10.1109/NUSOD.2005.1518133 SP - 57 EP - 58 ER - TY - JOUR A1 - Neve-Oz, Y. A1 - Pollok, T. A1 - Burger, Sven A1 - Golosovsky, M. A1 - Davidov, D. T1 - Fast Light and Focusing in 2D Photonic Quasicrystals JF - PIERS Online Y1 - 2009 U6 - https://doi.org/10.2529/PIERS081223080021 VL - 5 SP - 451 ER - TY - JOUR A1 - Neve-Oz, Y. A1 - Pollok, T. A1 - Burger, Sven A1 - Golosovsky, M. A1 - Davidov, D. T1 - Resonant Transmission of Electromagnetic Waves through 2D Photonic Quasicrystals JF - J. Appl. Phys. Y1 - 2010 U6 - https://doi.org/10.1063/1.3329542 VL - 107 SP - 063105 ER - TY - JOUR A1 - Neve-Oz, Y. A1 - Pollok, T. A1 - Burger, Sven A1 - Golosovsky, M. A1 - Lifshitz, R. A1 - Davidov, D. T1 - Negative Refraction and Omni Directionality in 2D Photonic Quasicrystal Superstructure JF - AIP Conference Proceedings Y1 - 2010 U6 - https://doi.org/10.1063/1.3498134 VL - 1281 SP - 1622 PB - AIP ER - TY - CHAP A1 - Neve-Oz, Y. A1 - Pollok, T. A1 - Burger, Sven A1 - Golosovsky, M. A1 - Davidov, D. ED - Mastorakis, N. T1 - Localized resonant states and transmission in a two- dimensional photonic quasicrystal T2 - Proc. of the 5th International Conference on Applied Mathematics, Simulation, Modelling (ASM ’II), Corfu, 2011 Y1 - 2011 SN - 978-1-61804-016-9 VL - 1 SP - 178 EP - 182 ER - TY - CHAP A1 - Scholze, Frank A1 - Laubis, Christian A1 - Ulm, Gerhard A1 - Dersch, Uwe A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank ED - Schellenberg, Frank T1 - Evaluation of EUV scatterometry for CD characterization of EUV masks using rigorous FEM-simulation T2 - Emerging Lithographic Technologies XII Y1 - 2008 VL - 6921 PB - SPIE ER - TY - CHAP A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank A1 - Scholze, Frank A1 - Laubis, Christian A1 - Dersch, Uwe ED - Horiuchi, Toshiyuki T1 - Metrology of EUV masks by EUV-scatterometry and finite element analysis T2 - Photomask and Next-Generation Lithography Mask Technology XV Y1 - 2008 VL - 7028 PB - SPIE ER - TY - CHAP A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank A1 - Zschiedrich, Lin A1 - Scholze, Frank ED - Martin, P. ED - Naber, R. T1 - Rigorous FEM-Simulation of EUV-Masks: Influence of shape and material parameters T2 - Photomask Technology Y1 - 2006 U6 - https://doi.org/10.1117/12.686828 VL - 6349 SP - 63493D PB - Proc. SPIE ER - TY - CHAP A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank A1 - Scholze, Frank A1 - Laubis, Christian A1 - Dersch, Uwe ED - Bosse, Harald T1 - Finite element analysis of EUV lithography T2 - Modeling Aspects in Optical Metrology Y1 - 2007 U6 - https://doi.org/10.1117/12.726156 VL - 6617 SP - 661718 PB - Proc. SPIE ER - TY - JOUR A1 - Pomplun, Jan A1 - Burger, Sven A1 - Schmidt, Frank A1 - Schliwa, Andrei A1 - Bimberg, Dieter A1 - Pietrzak, Agnieszka A1 - Wenzel, Hans A1 - Erbert, Götz T1 - Finite element simulation of the optical modes of semiconductor lasers JF - Phys. Status Solidi B Y1 - 2010 U6 - https://doi.org/10.1002/pssb.200945451 VL - 247 SP - 846 EP - 853 ER - TY - JOUR A1 - Pomplun, Jan A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - Adaptive finite element method for simulation of optical nano structures JF - Phys. Status Solidi B Y1 - 2007 U6 - https://doi.org/10.1002/pssb.200743192 VL - 244 SP - 3419 EP - 3434 ER - TY - CHAP A1 - Pomplun, Jan A1 - Holzlöhner, Ronald A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank ED - Adibi, Ali ED - Scherer, Axel ED - Lin, Shawn-Yu T1 - FEM investigation of leaky modes in hollow core photonic crystal fibers T2 - Proc. SPIE, Photonic Crystal Materials and Devices VI Y1 - 2007 UR - http://arxiv.org/pdf/physics/0702165 VL - 6480 SP - 64800M ER - TY - CHAP A1 - Pomplun, Jan A1 - Schmidt, Frank A1 - Burger, Sven A1 - Zschiedrich, Lin T1 - Adaptive Reduced Basis Method for Optical Scattering Problems T2 - Integrated Photonics Research, Silicon and Nanophotonics Y1 - 2010 U6 - https://doi.org/10.1364/IPRSN.2010.IWD4 SP - IWD4 PB - OSA ER - TY - JOUR A1 - Pomplun, Jan A1 - Zschiedrich, Lin A1 - Klose, Roland A1 - Schmidt, Frank A1 - Burger, Sven T1 - Finite element simulation of radiation losses in photonic crystal fibers JF - phys. stat. sol. (a) Y1 - 2007 U6 - https://doi.org/10.1002/pssa.200776414 VL - 204 IS - 11 SP - 3822 EP - 3837 ER -